JPH0397931U - - Google Patents

Info

Publication number
JPH0397931U
JPH0397931U JP679190U JP679190U JPH0397931U JP H0397931 U JPH0397931 U JP H0397931U JP 679190 U JP679190 U JP 679190U JP 679190 U JP679190 U JP 679190U JP H0397931 U JPH0397931 U JP H0397931U
Authority
JP
Japan
Prior art keywords
thick
semiconductor device
film
frequency semiconductor
aluminum nitride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP679190U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP679190U priority Critical patent/JPH0397931U/ja
Publication of JPH0397931U publication Critical patent/JPH0397931U/ja
Pending legal-status Critical Current

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Landscapes

  • Semiconductor Integrated Circuits (AREA)

Description

【図面の簡単な説明】
第1図はこの考案の一実施例を示す高周波半導
体装置の部分断面斜視図、第2図は従来の高周波
半導体装置を構成する等価回路の回路図、第3図
は従来の高周波半導体装置の部分断面斜視図であ
る。 図において、1〜4は厚膜インダクタンス素子
、5,6はトランジスタ、10〜17はキヤパシ
タンス素子、29は窒化アルミニウム基板を示す
。なお、図中、同一符号は同一、または相当部分
を示す。

Claims (1)

    【実用新案登録請求の範囲】
  1. 高周波増幅素子、キヤパシタンス素子及び厚膜
    インダクタンス素子を有する厚膜混成集積回路に
    於いて、前記各素子を窒化アルミニウム基板上に
    形成したことを特徴とする高周波半導体装置。
JP679190U 1990-01-25 1990-01-25 Pending JPH0397931U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP679190U JPH0397931U (ja) 1990-01-25 1990-01-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP679190U JPH0397931U (ja) 1990-01-25 1990-01-25

Publications (1)

Publication Number Publication Date
JPH0397931U true JPH0397931U (ja) 1991-10-09

Family

ID=31510464

Family Applications (1)

Application Number Title Priority Date Filing Date
JP679190U Pending JPH0397931U (ja) 1990-01-25 1990-01-25

Country Status (1)

Country Link
JP (1) JPH0397931U (ja)

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