JPH0397422U - - Google Patents

Info

Publication number
JPH0397422U
JPH0397422U JP674090U JP674090U JPH0397422U JP H0397422 U JPH0397422 U JP H0397422U JP 674090 U JP674090 U JP 674090U JP 674090 U JP674090 U JP 674090U JP H0397422 U JPH0397422 U JP H0397422U
Authority
JP
Japan
Prior art keywords
substrate
arm
conveyor
support member
tip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP674090U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP674090U priority Critical patent/JPH0397422U/ja
Publication of JPH0397422U publication Critical patent/JPH0397422U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Special Conveying (AREA)
  • Mounting Of Printed Circuit Boards And The Like (AREA)
JP674090U 1990-01-27 1990-01-27 Pending JPH0397422U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP674090U JPH0397422U (enrdf_load_stackoverflow) 1990-01-27 1990-01-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP674090U JPH0397422U (enrdf_load_stackoverflow) 1990-01-27 1990-01-27

Publications (1)

Publication Number Publication Date
JPH0397422U true JPH0397422U (enrdf_load_stackoverflow) 1991-10-07

Family

ID=31510412

Family Applications (1)

Application Number Title Priority Date Filing Date
JP674090U Pending JPH0397422U (enrdf_load_stackoverflow) 1990-01-27 1990-01-27

Country Status (1)

Country Link
JP (1) JPH0397422U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS644100A (en) * 1987-06-26 1989-01-09 Sony Corp Apparatus for transferring substrate

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS644100A (en) * 1987-06-26 1989-01-09 Sony Corp Apparatus for transferring substrate

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