JPH0395979A - 超伝導集積回路の良否の診断方法 - Google Patents

超伝導集積回路の良否の診断方法

Info

Publication number
JPH0395979A
JPH0395979A JP1231876A JP23187689A JPH0395979A JP H0395979 A JPH0395979 A JP H0395979A JP 1231876 A JP1231876 A JP 1231876A JP 23187689 A JP23187689 A JP 23187689A JP H0395979 A JPH0395979 A JP H0395979A
Authority
JP
Japan
Prior art keywords
electrode
oxide film
integrated circuit
wafer
anode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1231876A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0587194B2 (cs
Inventor
Akira Kamishiro
暁 神代
Hiroshi Nakagawa
博 仲川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP1231876A priority Critical patent/JPH0395979A/ja
Publication of JPH0395979A publication Critical patent/JPH0395979A/ja
Publication of JPH0587194B2 publication Critical patent/JPH0587194B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
JP1231876A 1989-09-07 1989-09-07 超伝導集積回路の良否の診断方法 Granted JPH0395979A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1231876A JPH0395979A (ja) 1989-09-07 1989-09-07 超伝導集積回路の良否の診断方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1231876A JPH0395979A (ja) 1989-09-07 1989-09-07 超伝導集積回路の良否の診断方法

Publications (2)

Publication Number Publication Date
JPH0395979A true JPH0395979A (ja) 1991-04-22
JPH0587194B2 JPH0587194B2 (cs) 1993-12-15

Family

ID=16930410

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1231876A Granted JPH0395979A (ja) 1989-09-07 1989-09-07 超伝導集積回路の良否の診断方法

Country Status (1)

Country Link
JP (1) JPH0395979A (cs)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5691725A (en) * 1995-09-08 1997-11-25 Mitsubishi Denki Kabushiki Kaisha Distance measuring apparatus capable of measuring plural distance data for calculated angle ranges
US5699150A (en) * 1995-07-14 1997-12-16 Mitsubushi Denki Kabushiki Kaisha Vehicle optical radar apparatus
US5959734A (en) * 1997-11-26 1999-09-28 Mitsubishi Denki Kabushiki Kaisha Distance measuring device
US6064471A (en) * 1997-11-26 2000-05-16 Mitsubishi Denki Kabushiki Kaisha Distance measuring device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50149975A (cs) * 1974-05-22 1975-12-01

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50149975A (cs) * 1974-05-22 1975-12-01

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5699150A (en) * 1995-07-14 1997-12-16 Mitsubushi Denki Kabushiki Kaisha Vehicle optical radar apparatus
US5691725A (en) * 1995-09-08 1997-11-25 Mitsubishi Denki Kabushiki Kaisha Distance measuring apparatus capable of measuring plural distance data for calculated angle ranges
US5959734A (en) * 1997-11-26 1999-09-28 Mitsubishi Denki Kabushiki Kaisha Distance measuring device
US6064471A (en) * 1997-11-26 2000-05-16 Mitsubishi Denki Kabushiki Kaisha Distance measuring device

Also Published As

Publication number Publication date
JPH0587194B2 (cs) 1993-12-15

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term