JPH039538A - Resin seal metal mold for semiconductor device - Google Patents

Resin seal metal mold for semiconductor device

Info

Publication number
JPH039538A
JPH039538A JP14635489A JP14635489A JPH039538A JP H039538 A JPH039538 A JP H039538A JP 14635489 A JP14635489 A JP 14635489A JP 14635489 A JP14635489 A JP 14635489A JP H039538 A JPH039538 A JP H039538A
Authority
JP
Japan
Prior art keywords
semiconductor element
resin
element mounting
mold
mounting part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14635489A
Other languages
Japanese (ja)
Inventor
Yoichi Oikawa
洋一 及川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP14635489A priority Critical patent/JPH039538A/en
Publication of JPH039538A publication Critical patent/JPH039538A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To prevent the inclination of a semiconductor element mounting part caused by resin pressure at the time of sealing, by installing protruding parts for pressing a semiconductor element mounting part on the main mold surface of the cavity part of a metal mold. CONSTITUTION:A lead frame 10 is sandwiched by a top force 1 and a bottom force 2; resin is sealed into a cavity part 3 formed by the top force 1 and the bottom force 2; thereby resin sealing is performed. In this metal mold, protruding parts 6 for pressing a semiconductor element mounting part 9 are installed on the main mold surface of the top force 1 and the bottom force 2 constituting the cavity part 3. That is, the protruding parts 6 installed on the top force 1 and the bottom force 2 press the semiconductor element mounting part 9 and a printed board 11 arranged thereon from vertical direction, and arranged them at a position where contact with metal thin wires can be evaded. Thereby the inclination of the semiconductor element mounting part 9 caused by resin pressure can be prevented.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は半導体装置用樹脂封止金型に関する。[Detailed description of the invention] [Industrial application field] The present invention relates to a resin sealing mold for semiconductor devices.

〔従来の技術〕[Conventional technology]

従来、この種の樹脂封止金型は、第7図の縦断面図に示
すように上金型1と下金型2とからなっている。この金
型は、上下二つの金型の間に挟まれて設置された半導体
素子7を所定形状の樹脂モールドICとして封止するた
めの中空部(以下キャビティ部3という)と、樹脂の通
路となるランナ一部4と、ランナ一部4から各キャビテ
ィ部3への注入口となるゲート部5とから構成されてい
る。
Conventionally, this type of resin-sealing mold consists of an upper mold 1 and a lower mold 2, as shown in the longitudinal cross-sectional view of FIG. This mold has a hollow part (hereinafter referred to as cavity part 3) for sealing a semiconductor element 7 placed between two upper and lower molds as a resin molded IC of a predetermined shape, and a resin passage. It is composed of a runner part 4 and a gate part 5 which serves as an injection port from the runner part 4 to each cavity part 3.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

上述した従来の半導体装置用樹脂封止金型は、封入樹脂
がキャビティ部の横一方向から充填されるため、半導体
素子搭載部が樹脂圧力で傾くという欠点がある。
The above-described conventional resin-sealing mold for a semiconductor device has the disadvantage that the semiconductor element mounting portion tilts due to the pressure of the resin because the encapsulating resin is filled from one direction laterally in the cavity portion.

この傾きがひどい場合には、第9図の縦断面図。If this inclination is severe, the longitudinal cross-sectional view of FIG.

に示すように、リードlθと半導体素子7とを電気的に
接続する金属細線8を切断したり、また金属細線8がパ
ッケージ表面である樹脂13から露出してしまうことも
ある。
As shown in FIG. 2, the thin metal wire 8 that electrically connects the lead lθ and the semiconductor element 7 may be cut, or the thin metal wire 8 may be exposed from the resin 13 that is the package surface.

近年、マイコンやゲートアレイなどの半導体素子の集積
度が急増し、半導体素子の面積も急激に大きくなってい
る。それに伴い、パッケージのビン数も急激に増えてい
る。
In recent years, the degree of integration of semiconductor devices such as microcomputers and gate arrays has rapidly increased, and the area of semiconductor devices has also rapidly increased. Along with this, the number of packaging bottles is also rapidly increasing.

この超多ビンの樹脂モールドパッケージは、設計の際に
半導体素子搭載部を大きく、外部リード間ピッチを狭く
、内部リードの幅を細く且つ長さを短く設計されている
This ultra-bin resin mold package is designed to have a large semiconductor element mounting portion, a narrow pitch between external leads, and a narrow internal lead width and short length.

更に多ビンにしようとするとリードフレームの加工精度
を越えるため、第8図の縦断面図に示すように、銅配線
12などの微細配線を巡らしたプリント基板11を半導
体素子搭載部9の上に設置した半導体装置も考案されて
いる。
In order to increase the number of bins, the processing precision of the lead frame would be exceeded, so as shown in the vertical cross-sectional view of FIG. Installed semiconductor devices have also been devised.

このような超多ビンパッケージは、半導体素子搭載部が
従来より大きいため、小さな樹脂圧力でも半導体素子搭
載部が傾いてしまい、前記欠点が生じ易い。
In such a super multi-bin package, since the semiconductor element mounting part is larger than the conventional one, the semiconductor element mounting part is inclined even with a small resin pressure, and the above-mentioned drawback is likely to occur.

〔課題を解決するための手段〕[Means to solve the problem]

本発明は、上下金型でリードフレームを挟みこの上下金
型で形成される中空部に樹脂を封入して樹脂封止を行う
半導体装置用樹脂封止金型において、前記中空部を形成
する上下金型のそれぞれの主型面に半導体素子搭載部を
押さえる突起部を設けた半導体装置用樹脂封止金型であ
る。
The present invention provides a resin sealing mold for a semiconductor device in which a lead frame is sandwiched between the upper and lower molds, and a resin is sealed in a hollow part formed by the upper and lower molds to perform resin sealing. This is a resin-sealed mold for a semiconductor device in which a protrusion for pressing a semiconductor element mounting portion is provided on each main mold surface of the mold.

〔実施例〕〔Example〕

次に本発明について図面を参照して説明する。 Next, the present invention will be explained with reference to the drawings.

第1図は本発明の第1の実施例を示す斜視図である。第
2図は半導体素子を搭載したリードフレームを挟み込ん
でいる時の上記実施例の縦断面図であり、第3図はその
下金型の平面図である。第4図(a)、(b)は上記実
施例の突起部の位置が異なる上金型及び下金型の平面図
である。
FIG. 1 is a perspective view showing a first embodiment of the present invention. FIG. 2 is a longitudinal cross-sectional view of the above-mentioned embodiment when a lead frame on which a semiconductor element is mounted is sandwiched, and FIG. 3 is a plan view of the lower mold. FIGS. 4(a) and 4(b) are plan views of an upper mold and a lower mold in which the positions of the projections of the above embodiment are different.

第1図において、上金型1と下金型2のキャビティ部3
の主型面には、円錐状の突起部6がそれぞれ設けられて
゛いる。この例では、突起部6は上下金型共それぞれ同
じ位置に配置されているが、第4図(a)、(b)に示
すように、上下それぞれ違う位置でも楕わない。
In FIG. 1, the cavity part 3 of the upper mold 1 and the lower mold 2
A conical protrusion 6 is provided on each main mold surface. In this example, the projections 6 are arranged at the same position in both the upper and lower molds, but as shown in FIGS. 4(a) and 4(b), they do not oval even if the projections 6 are located at different positions in the upper and lower molds.

第2図において、上金型1及び下金型2にある突起部6
は、半導体素子搭載部9とその上に設置されているプリ
ント基板】1を上下方向から押さえている。この突起部
6は金属細線8に接触しない位置に配置する。
In FIG. 2, protrusions 6 on the upper mold 1 and the lower mold 2
1 holds down the semiconductor element mounting portion 9 and the printed circuit board 1 installed thereon from above and below. This protrusion 6 is arranged at a position where it does not come into contact with the thin metal wire 8.

第5図及び第6図は、本発明の第2の実施例の縦断面図
であり、第5図は樹脂を封入する前の状態を示し、第6
図は封入した直後の状態を示している。
5 and 6 are longitudinal sectional views of the second embodiment of the present invention, with FIG. 5 showing the state before resin is encapsulated, and FIG.
The figure shows the state immediately after being sealed.

この実施例では、突起部6が上下に可動する構造を備え
ている。この金型を使用して、硬化したモールド樹脂を
離型する際、第6図のように上金型1と下金型2に存在
する突起部6が主型面下まで引っ込む。
This embodiment has a structure in which the protrusion 6 can move up and down. When this mold is used to release the cured mold resin, the protrusions 6 present on the upper mold 1 and the lower mold 2 retract to below the surface of the main mold, as shown in FIG.

このように突起部がキャビティ部の主型面の下まで引っ
込むため、第1の実施例に比べ封止した半導体装置を金
型から取り出し易いという利点がある。
Since the protrusion retracts below the main mold surface of the cavity portion in this manner, there is an advantage that the sealed semiconductor device can be easily removed from the mold compared to the first embodiment.

〔発明の効果〕〔Effect of the invention〕

以上説明したように本発明は、金型のキャビティ部の主
型面に半導体素子搭載部を押さえる突起部を有すること
により、封入時の樹脂圧力に対し半導体素子搭載部が傾
かないという効果がある。
As explained above, the present invention has the effect that the semiconductor element mounting part does not tilt due to the resin pressure during encapsulation by having the protrusion that presses the semiconductor element mounting part on the main mold surface of the cavity part of the mold. .

第2の利点として、半導体素子搭載部が傾かないので、
半導体素子及び半導体素子搭載部をパッケージ高さの中
央に置く必要がなく、中央よりも上や下に置くことがで
きるため、半導体装置の設計や組立の自由度が向上する
という効果がある。
The second advantage is that the semiconductor element mounting part does not tilt.
Since the semiconductor element and the semiconductor element mounting part do not need to be placed at the center of the package height and can be placed above or below the center, there is an effect that the degree of freedom in designing and assembling the semiconductor device is improved.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の第1の実施例を示す斜視図、第2図は
その縦断面図、第3図はその下金型の平面図、第4図(
a)、(b)はそれぞれその上金型及び下金型の平面図
、第5図及び第6図はそれぞれ本発明の第2の実施例を
示す縦断面図、第7図、第8図及び第9図はそれぞれ従
来の半導体装置用樹脂封止金型を示す縦断面図である。 1・・・上金型、2・・・下金型、3・・・キャビティ
部、4・・・ランナ一部、5・・・ゲート部、6・・・
突起部、7・・・半導体素子、8・・・金属細線、9・
・・半導体素子搭載部、10・・・リード、11・・・
プリント基板、12・・・銅配線、13・・・樹脂。
Fig. 1 is a perspective view showing the first embodiment of the present invention, Fig. 2 is a longitudinal sectional view thereof, Fig. 3 is a plan view of the lower mold, and Fig. 4 (
a) and (b) are respectively plan views of the upper and lower molds, FIGS. 5 and 6 are longitudinal sectional views showing the second embodiment of the present invention, and FIGS. 7 and 8, respectively. and FIG. 9 are vertical cross-sectional views showing conventional resin-sealing molds for semiconductor devices. DESCRIPTION OF SYMBOLS 1... Upper mold, 2... Lower mold, 3... Cavity part, 4... Part of runner, 5... Gate part, 6...
Projection, 7... Semiconductor element, 8... Metal thin wire, 9...
...Semiconductor element mounting section, 10...Lead, 11...
Printed circuit board, 12... copper wiring, 13... resin.

Claims (1)

【特許請求の範囲】[Claims] 上下金型でリードフレームを挟みこの上下金型で形成さ
れる中空部に樹脂を封入して樹脂封止を行う半導体装置
用樹脂封止金型において、前記中空部を形成する上下金
型のそれぞれの主型面に半導体素子搭載部を押さえる突
起部を設けたことを特徴とする半導体装置用樹脂封止金
型。
In a resin sealing mold for a semiconductor device in which a lead frame is sandwiched between the upper and lower molds and a resin is sealed in a hollow part formed by the upper and lower molds to perform resin sealing, each of the upper and lower molds forming the hollow part. 1. A resin-sealing mold for a semiconductor device, characterized in that a protrusion for pressing a semiconductor element mounting portion is provided on the main mold surface.
JP14635489A 1989-06-07 1989-06-07 Resin seal metal mold for semiconductor device Pending JPH039538A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14635489A JPH039538A (en) 1989-06-07 1989-06-07 Resin seal metal mold for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14635489A JPH039538A (en) 1989-06-07 1989-06-07 Resin seal metal mold for semiconductor device

Publications (1)

Publication Number Publication Date
JPH039538A true JPH039538A (en) 1991-01-17

Family

ID=15405821

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14635489A Pending JPH039538A (en) 1989-06-07 1989-06-07 Resin seal metal mold for semiconductor device

Country Status (1)

Country Link
JP (1) JPH039538A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06268101A (en) * 1993-03-17 1994-09-22 Hitachi Ltd Semiconductor device and its manufacture, electronic device, lead frame, and mounting substrate
JP2008091763A (en) * 2006-10-04 2008-04-17 Mitsubishi Electric Corp Semiconductor device, manufacturing method thereof, and manufacturing method of mounting substrate

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06268101A (en) * 1993-03-17 1994-09-22 Hitachi Ltd Semiconductor device and its manufacture, electronic device, lead frame, and mounting substrate
JP2008091763A (en) * 2006-10-04 2008-04-17 Mitsubishi Electric Corp Semiconductor device, manufacturing method thereof, and manufacturing method of mounting substrate

Similar Documents

Publication Publication Date Title
KR101297015B1 (en) Method of manufacturing fan-out semiconductor package using lead frame, semiconductor package thereof, and package on package thereof
US6521980B1 (en) Controlling packaging encapsulant leakage
US6630729B2 (en) Low-profile semiconductor package with strengthening structure
US5872395A (en) Bent tip method for preventing vertical motion of heat spreaders during injection molding of IC packages
US6627976B1 (en) Leadframe for semiconductor package and mold for molding the same
US20030211660A1 (en) BOC BGA package for die with I-shaped bond pad layout
US20030148557A1 (en) BOC BGA package for die with I-shaped bond pad layout
US6864423B2 (en) Bump chip lead frame and package
KR100222349B1 (en) Semiconductor chip packaging
US5684332A (en) Method of packaging a semiconductor device with minimum bonding pad pitch and packaged device therefrom
JP3259377B2 (en) Semiconductor device
JPH039538A (en) Resin seal metal mold for semiconductor device
KR950034696A (en) Ultra-thin semiconductor package and manufacturing method thereof
JPH11186481A (en) Lead frame
KR900001989B1 (en) Semiconductor device
JP3212527B2 (en) BGA type hollow semiconductor package with light irradiation window
JPH0529527A (en) Semiconductor device
KR900001988B1 (en) Leadframe for semiconductor device
KR19990086280A (en) Semiconductor package
KR200169976Y1 (en) Semiconductor package
JPH05326587A (en) Method and device for sealing resin-sealed-type semiconductor device
KR0156335B1 (en) A semiconductor chip package using a tie bar
JPH02202042A (en) Resin-sealed semiconductor device
JPH0653264A (en) Manufacture of semiconductor device
KR100253708B1 (en) Semiconductor package and method for manufacture thereof