JPH039501A - Composition for forming thick film resistor - Google Patents

Composition for forming thick film resistor

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Publication number
JPH039501A
JPH039501A JP1144385A JP14438589A JPH039501A JP H039501 A JPH039501 A JP H039501A JP 1144385 A JP1144385 A JP 1144385A JP 14438589 A JP14438589 A JP 14438589A JP H039501 A JPH039501 A JP H039501A
Authority
JP
Japan
Prior art keywords
weight
resistance value
powder
composition
thick film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1144385A
Other languages
Japanese (ja)
Other versions
JPH0654726B2 (en
Inventor
Kiyoshi Yaginuma
柳沼 希世史
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Metal Mining Co Ltd
Original Assignee
Sumitomo Metal Mining Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Metal Mining Co Ltd filed Critical Sumitomo Metal Mining Co Ltd
Priority to JP1144385A priority Critical patent/JPH0654726B2/en
Publication of JPH039501A publication Critical patent/JPH039501A/en
Publication of JPH0654726B2 publication Critical patent/JPH0654726B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

PURPOSE:To reduce the rate of change of resistance value during re-heating process, and improve yield by containing the following at a specified ratio; glass powder containing specified % of PbO and SiO2, powder of at least one kind out of RuO2, Pb2Ru2O6-7, and Bi2Ru2O6-7, organic vehicle, and B2O3 powder. CONSTITUTION:When glass powder containing 35-70wt.% of PbO and 15-40wt.% of SiO2 exceeds 50wt.%, the resistance value becomes too high. When it is less than 10wt.%, the bonding strength of a coating film to a substratum decreases, and therefore 0-50wt.% is desirable. When the addition range of RuO2 and the like is less than 5wt.%, the resistance value becomes too high, the environmental stability deteriorates, and the fluctuation of resistance value increases, so the above range is set as 5-40wt.%. The compounding ratio of organic vehicle indispensable to printing is set at 20-40wt.%. In order to stabilize the resistance value for re-heating, B2O3 is added in the range of 0.2-5.0wt.%. Thereby composition for a resistance coating film which can make the change of resistance value cased by re-heating smaller than the conventional film can be obtained.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明はセラミック基体上に厚膜抵抗体を形成するため
の厚膜抵抗体形成用組成物に関する。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a composition for forming a thick film resistor on a ceramic substrate.

〔従来の技術〕[Conventional technology]

軟化点400〜700σのガラスフリットに所要の抵抗
値になるように導電性粉末を混合し、これを有機ビヒク
ルに分散したペーストを、アルミナ等のセラミック基体
上に、スクリーン印刷法や転写法により所要形状に塗布
し、600〜900σで焼成して、基体上に電子回路部
品としての厚膜抵抗体を形成することが行なわれている
A glass frit with a softening point of 400 to 700σ is mixed with conductive powder to give the required resistance value, and a paste made by dispersing this in an organic vehicle is applied onto a ceramic substrate such as alumina using a screen printing method or a transfer method. A thick film resistor is formed on a substrate as an electronic circuit component by coating it in a shape and firing at 600 to 900σ.

この導電性粉末としてAg、 Pdの他にRuOやパイ
ロクロアであるPb Ru O、Bi Ru Oを使2
  2 6〜7      2   2  1y−,7
用することにより抵抗値の安定性を改善したりすること
も公知である。
In addition to Ag and Pd, RuO and pyrochlore Pb Ru O and Bi Ru O are used as the conductive powder.
2 6~7 2 2 1y-,7
It is also known that the stability of resistance value can be improved by using

この厚膜抵抗体を使ったチップ抵抗器などの製造工程で
は、通常厚膜抵抗体の抵抗値を調整した後に、ガラスコ
ートなどの目的の為に600σ程度の再加熱工程が入る
。この再加熱工程での抵抗値の変化を考慮して、その前
にトリミングという抵抗値の調整を行なっている。この
工程での抵抗値の変化が大きいと最終の抵抗値を予定の
範囲内に収めることが困難となり、歩留りを悪化させる
大きな原因となっている。
In the manufacturing process of chip resistors and the like using this thick film resistor, after adjusting the resistance value of the thick film resistor, a reheating process of about 600σ is usually performed for purposes such as glass coating. In consideration of the change in resistance value during this reheating process, the resistance value is adjusted by trimming before that. If the change in resistance value during this process is large, it becomes difficult to keep the final resistance value within a predetermined range, which is a major cause of deterioration in yield.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

本発明はこの再加熱工程での抵抗値の変化率の小さい、
従って歩留り良く厚膜抵抗体の得られる主として低抵抗
値を有する厚膜抵抗体形成用組成物を提供することを課
題とする。
The present invention has a small rate of change in resistance value during this reheating process.
Therefore, it is an object of the present invention to provide a composition for forming a thick film resistor mainly having a low resistance value, which allows thick film resistors to be obtained with good yield.

〔課題を解決するための手段〕[Means to solve the problem]

本発明は、Pb035〜70重量%、SiO15〜40
重量%を含有する組成のガラス粉末10〜50重量%、
RuO、Pb Ru O、Bi Ru Oの何れか少2
     2   2 6++7     2   2
6〜7なくとも一種の粉末5〜40重量%、RuO2を
少なくとも5重量%、EO粉末0.2〜5.0重量%の
割3 合にこれらを含有する厚膜抵抗体形成用組成物、及びP
bO35〜70重量%、S゛10 15〜40重量%を
含有する組成のガラス粉末10〜50重量%、RuOを
少なくとも5重量%を含みAg5Pdのガラス粉末10
〜60重量%、RuO2を少なくとも5重量%、BO粉
末0.2〜5.0重量%の割合に33 これらを含有する厚膜抵抗体形成用組成物を課題を解決
するための手段とするものである。
In the present invention, Pb035-70% by weight, SiO15-40%
10-50% by weight of glass powder with a composition containing % by weight;
A small amount of any of RuO, Pb Ru O, Bi Ru O
2 2 6++7 2 2
6-7 A composition for forming a thick film resistor, which contains at least 5 to 40% by weight of at least one kind of powder, at least 5% by weight of RuO2, and 0.2 to 5.0% by weight of EO powder; and P
10-50% by weight of glass powder with a composition containing 35-70% by weight of bO, 15-40% by weight of S゛10, glass powder of Ag5Pd 10 containing at least 5% by weight of RuO
~60% by weight, at least 5% by weight of RuO2, and 0.2 to 5.0% by weight of BO powder.33 A composition for forming a thick film resistor containing these is a means for solving the problem. It is.

固形物粉末は、ビヒクルと混合してペースト状とし、1
50〜400メツシユスクリーンを通して基体に塗布す
るため、ペーストが円滑にスクリーンを通過しつるよう
にするため平均粒径10μm以下、好ましくは5μm以
下の粉末として用いる。
The solid powder is mixed with a vehicle to form a paste, and 1
Since the paste is applied to the substrate through a 50 to 400 mesh screen, it is used as a powder with an average particle size of 10 μm or less, preferably 5 μm or less, so that the paste passes through the screen smoothly and sticks.

有機ビヒクルは、従来と同様にターピネオール、ブチル
カルピトールアセテート、トルエンなどの溶媒にエチル
セルロース、メタクリレート樹脂等を溶解したものが用
いられる。
As the organic vehicle, a solution of ethyl cellulose, methacrylate resin, etc. in a solvent such as terpineol, butylcarpitol acetate, toluene, etc. is used as in the conventional method.

上記のガラス粉末、RuO、Pb Ru O、Bi R
u2      2   2 6++7 0621、Ag5Pdの粉末、BO粉末、有機ビヒクル
以外に、従来からTOR(抵抗温度係数)を小さくする
ために用いられているMnOs Mn O、Mn 01
GuO1Nb O、Sb O、TiOを5重ffi%以
内で添加することもできる。
The above glass powder, RuO, Pb Ru O, Bi R
In addition to u2 2 2 6++7 0621, Ag5Pd powder, BO powder, and organic vehicle, MnOs Mn O, Mn 01, which have been conventionally used to reduce TOR (temperature coefficient of resistance)
GuO1NbO, SbO, and TiO can also be added in an amount of up to 5% by weight.

上記のガラスとしては、PbO,SiOの外にガラス成
分として通常配合されているZn0SB O、Al01
CaO1EaO1KO1Na 0SZnO1TiOの少
なくとも一種3〜35重量%を軟化点や熱膨張率等を調
節するために添加することが出来る。
The above glasses include Zn0SB O and Al01, which are usually blended as glass components in addition to PbO and SiO.
3 to 35% by weight of at least one of CaO1EaO1KO1Na0SZnO1TiO can be added in order to adjust the softening point, coefficient of thermal expansion, etc.

〔作用〕[Effect]

本発明におけるガラス組成において、PbOの含有量を
70重量%までとするのは、PbOが70重量%を超え
るようになると、基体に塗布したペーストを焼成して被
膜とするとき最高焼成温度での軟化が著しくパターン形
状がくずれるようになるからである。PI)Oが35重
量%よりも少ないか、SiOが40重量%を超えるよう
になると逆に焼成の際の軟化が不充分となるため、焼成
した被膜が多孔質となり弱くなる。SiOが15重量%
未満ではガラス化しにくくなる。
In the glass composition of the present invention, the content of PbO is set to 70% by weight.If PbO exceeds 70% by weight, the paste applied to the substrate will be fired at the maximum firing temperature to form a film. This is because the softening becomes significant and the pattern shape becomes distorted. If the PI)O content is less than 35% by weight or if the SiO content exceeds 40% by weight, the softening during firing will be insufficient and the fired coating will become porous and weak. 15% by weight of SiO
If it is less than that, it becomes difficult to vitrify.

以上からPbO35〜70重量%、Si0 15〜40
重量%とした。
From the above, PbO 35-70% by weight, Si0 15-40%
It was expressed as weight%.

ガラス粉末は50重量%を超えると、抵抗値が高くなり
すぎ、10重11%未満では被膜の基体に対する接着強
度が低下するので、10〜50重ft%とする。
When the glass powder exceeds 50% by weight, the resistance value becomes too high, and when it is less than 10% by weight and 11% by weight, the adhesive strength of the coating film to the substrate decreases, so it is set at 10 to 50% by weight.

RuOSPb Ru O、Bi Ru O粉末が40重
量雪2!・〜丁意−〜丁 ■を超えるようになると、焼成後の被膜が極端に多孔質
となり被膜強度が弱くなり信頼性が低下し、5重量%よ
り少ないと抵抗値が高くなりすぎ150C′恒濡放置寿
命などの環境安定性が悪化し、抵抗値の変動が大きくな
るのでこれらRuO等の添加範囲を5〜40重量%の範
囲とする。導電性成分としてRuOにAgやPdを併用
する場合には、上意 記の理由からRuOは少なくとも5重量%は必要であり
、RuOとAgやpaとの合計が20重量%未満では抵
抗値が高くなりすぎ、60重量%を超えるようになると
抵抗値が低くなり過ぎ抵抗体ではなくなる。
RuOSPb Ru O, Bi Ru O powder is 40 weight snow 2!・If it exceeds 〜Choice−〜Cho■, the coating after firing becomes extremely porous, the coating strength becomes weak, and reliability decreases.If it is less than 5% by weight, the resistance value becomes too high and 150C' constant. Since the environmental stability such as the life when left wet is deteriorated and the resistance value fluctuates greatly, the addition range of RuO, etc. is set to be in the range of 5 to 40% by weight. When RuO is used in combination with Ag or Pd as a conductive component, at least 5% by weight of RuO is required for the above reasons, and if the total of RuO and Ag or pa is less than 20% by weight, the resistance value will decrease. If it becomes too high, exceeding 60% by weight, the resistance value will become too low and it will no longer be a resistor.

有機ビヒクルは、この組成物をインキ状にして印刷する
には欠かせないものであるが、20重量%未満ではイン
キ状にすることが困難となり、40重量%を超えると現
在一般に使用されている印刷条件では被膜が薄くなりす
ぎ、抵抗値が大きく変動するようになるので、有機ビヒ
クルの配合比率を20〜40重量%とする。
The organic vehicle is essential for printing this composition in the form of ink, but if it is less than 20% by weight, it becomes difficult to form it into ink, and if it exceeds 40% by weight, it is generally used. Under printing conditions, the film becomes too thin and the resistance value fluctuates greatly, so the blending ratio of the organic vehicle is set to 20 to 40% by weight.

BOは本発明の目的である再加熱に対して抵抗値を安定
化するために添加され、ガラス中に分散してガラス中に
分相を生ぜしめ、ガラス相を安定化することにより、再
加熱による抵抗値の変化を小さくするのではないかと考
えられるが、添加量が0.2重量%未満では効果がなく
、5重量%を超えて添加してもこれ以上の効果の向上は
認められないので、0.2〜5.0重量%の範囲とした
BO is added to stabilize the resistance value against reheating, which is the purpose of the present invention, and is dispersed in the glass to cause phase separation in the glass, thereby stabilizing the glass phase. It is thought that it may reduce the change in resistance value due to the addition amount, but it is not effective if the amount added is less than 0.2% by weight, and no further improvement in the effect is observed even if added in excess of 5% by weight. Therefore, the content was set in the range of 0.2 to 5.0% by weight.

〔実施例〕〔Example〕

RuO、Pb Ru O、Bi Ru O、MnO、P
(l粉2      2   2 6〜丁      
  鵞    t  ・〜丁未として平均粒径0.1μ
m以下のものを、Ag粉末として平均粒径1.2μmの
ものを、ガラス粉末として第1表に示す組成の平均粒径
で1.5〜3μmのものを、BOは200メツシユの篩
を全部通過したものを使用した。
RuO, Pb RuO, BiRuO, MnO, P
(1 flour 2 2 2 6 ~ cloves
Average particle size: 0.1μ
Ag powder with an average particle size of 1.2 μm, glass powder with an average particle size of 1.5 to 3 μm with the composition shown in Table 1, and BO with a 200 mesh sieve. I used what passed.

第 1  表(重量%) これらの無機粉末にエチルセルロース10重量%を含有
するターピネオール溶液を添加して3本ロールミルで混
練して第2表に示す組成の低抵抗体用ペーストを調製し
た。
Table 1 (% by weight) A terpineol solution containing 10% by weight of ethyl cellulose was added to these inorganic powders and kneaded in a three-roll mill to prepare a paste for a low resistance element having the composition shown in Table 2.

純度96%のアルミナ基板の上に、pasi量%Agヘ
ーストからなる導電ペーストをスクリーン印刷法により
塗布して、ピーク温度150σのベルト炉で溶剤を乾燥
し、次いでピーク温度850σ×9分間の温度分布を有
するベルト炉を通して焼成して電極を形成する。
On an alumina substrate with a purity of 96%, a conductive paste consisting of %Ag haste was applied by screen printing, and the solvent was dried in a belt furnace with a peak temperature of 150σ, followed by a temperature distribution with a peak temperature of 850σ x 9 minutes. The electrodes are formed by firing through a belt furnace having a belt furnace.

電極間を橋渡しするように上記のペーストを印刷し電極
と同じ方法で乾燥焼成して抵抗体被膜を形成した。抵抗
体被膜の大きさは1鰭角である。
The above paste was printed so as to bridge between the electrodes, and dried and fired in the same manner as the electrodes to form a resistor film. The size of the resistor coating is one fin angle.

抵抗体は一組成当り20個作成し、まずデジタルマルチ
メーターで焼成直後に初期抵抗値を測定した。この平抑
値をシート抵抗値(Ω10)という。
Twenty resistors were prepared for each composition, and the initial resistance value was measured using a digital multimeter immediately after firing. This suppression value is called a sheet resistance value (Ω10).

この上に黒色のガラスペーストを印刷乾燥し、今度はビ
ーク600σ×5分間の台形の温度分布をもつベルト焼
成炉に通してガラスを焼成した。この焼成後の抵抗値を
測定し、初期抵抗値に対する焼成後の抵抗値の抵抗値変
化率(△R%)を求めた。
A black glass paste was printed and dried on this, and the glass was fired in a belt firing furnace having a trapezoidal temperature distribution with a peak of 600σ x 5 minutes. The resistance value after firing was measured, and the resistance change rate (ΔR%) of the resistance value after firing with respect to the initial resistance value was determined.

第2表にその結果を示す。Table 2 shows the results.

第  2  表 (11重量%] (註)表中A、BSOはガラスの種類 備考欄比・・比較例の略 実・・実施例の略 第2表をみると、ガラスのABCの何れにも成分として
BOが含まれているが、ガラスとは別にBOを0.2〜
5.0重量%添加したものは何れも△R%が改善されて
いることが判る。
Table 2 (11% by weight) (Note) In the table, A and BSO are the glass types in the notes column. BO is included as a component, but apart from glass, BO is added from 0.2 to
It can be seen that ΔR% is improved in all cases where 5.0% by weight is added.

(発明の効果〕 本発明によれば再度の加熱による抵抗値の変化を従来よ
りも小さくできる抵抗被膜を形成しうる組成物を提供で
きる。
(Effects of the Invention) According to the present invention, it is possible to provide a composition capable of forming a resistive film in which the change in resistance value due to reheating can be made smaller than before.

Claims (2)

【特許請求の範囲】[Claims] (1)PbO35〜70重量%、SiO_215〜40
重量%を含有する組成のガラス粉末10〜50重量%、
RuO_2、Pb_2Ru_2O_6_〜_7、Bi_
2Ru_2O_6_〜_7の何れか少なくとも一種の粉
末5〜40重量%、有機ビヒクル20〜40重量%、B
_2O_3粉末0.2〜5.0重量%の割合にこれらを
含有する厚膜抵抗体形成用組成物。
(1) PbO35-70% by weight, SiO_215-40
10-50% by weight of glass powder with a composition containing % by weight;
RuO_2, Pb_2Ru_2O_6_~_7, Bi_
5-40% by weight of powder of at least one of 2Ru_2O_6_-_7, 20-40% by weight of organic vehicle, B
A composition for forming a thick film resistor containing 0.2 to 5.0% by weight of _2O_3 powder.
(2)PbO35〜70重量%、SiO_215〜40
重量%を含有する組成のガラス粉末10〜50重量%、
RuO_2を少なくとも5重量%を含み、Ag、Pdの
一方又は両方とで20〜60重量%、有機ビヒクル20
〜40重量%、B_2O_3粉末0.2〜5.0重量%
の割合にこれらを含有する厚膜抵抗体形成用組成物。
(2) PbO35-70% by weight, SiO_215-40
10-50% by weight of glass powder with a composition containing % by weight;
Contains at least 5% by weight of RuO_2, 20-60% by weight of one or both of Ag and Pd, and 20% by weight of an organic vehicle.
~40% by weight, B_2O_3 powder 0.2-5.0% by weight
A composition for forming a thick film resistor containing these in a proportion of .
JP1144385A 1989-06-07 1989-06-07 Thick film resistor forming composition Expired - Fee Related JPH0654726B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1144385A JPH0654726B2 (en) 1989-06-07 1989-06-07 Thick film resistor forming composition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1144385A JPH0654726B2 (en) 1989-06-07 1989-06-07 Thick film resistor forming composition

Publications (2)

Publication Number Publication Date
JPH039501A true JPH039501A (en) 1991-01-17
JPH0654726B2 JPH0654726B2 (en) 1994-07-20

Family

ID=15360907

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1144385A Expired - Fee Related JPH0654726B2 (en) 1989-06-07 1989-06-07 Thick film resistor forming composition

Country Status (1)

Country Link
JP (1) JPH0654726B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5474711A (en) * 1993-05-07 1995-12-12 E. I. Du Pont De Nemours And Company Thick film resistor compositions
WO2019059290A1 (en) * 2017-09-22 2019-03-28 住友金属鉱山株式会社 Composition for thick film resistor, thick film resistance paste, and thick film resistor
CN114883027A (en) * 2022-05-05 2022-08-09 潮州三环(集团)股份有限公司 Thick film resistor paste

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5474711A (en) * 1993-05-07 1995-12-12 E. I. Du Pont De Nemours And Company Thick film resistor compositions
WO2019059290A1 (en) * 2017-09-22 2019-03-28 住友金属鉱山株式会社 Composition for thick film resistor, thick film resistance paste, and thick film resistor
JP2019062178A (en) * 2017-09-22 2019-04-18 住友金属鉱山株式会社 Composition for thick film resistor, thick film resistance paste and thick film resistor
TWI793175B (en) * 2017-09-22 2023-02-21 日商住友金屬鑛山股份有限公司 Composition for thick film resistor, thick film resistor paste, and thick film resistor
CN114883027A (en) * 2022-05-05 2022-08-09 潮州三环(集团)股份有限公司 Thick film resistor paste
CN114883027B (en) * 2022-05-05 2023-09-01 潮州三环(集团)股份有限公司 Thick film resistor paste

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