JPH0392860A - Photosensitive resin composition - Google Patents
Photosensitive resin compositionInfo
- Publication number
- JPH0392860A JPH0392860A JP23020689A JP23020689A JPH0392860A JP H0392860 A JPH0392860 A JP H0392860A JP 23020689 A JP23020689 A JP 23020689A JP 23020689 A JP23020689 A JP 23020689A JP H0392860 A JPH0392860 A JP H0392860A
- Authority
- JP
- Japan
- Prior art keywords
- group
- electron
- polymer
- photosensitive resin
- acrylate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011342 resin composition Substances 0.000 title claims abstract description 10
- 229920000642 polymer Polymers 0.000 claims abstract description 29
- 125000003118 aryl group Chemical group 0.000 claims abstract description 14
- 125000003647 acryloyl group Chemical group O=C([*])C([H])=C([H])[H] 0.000 claims abstract description 10
- 125000006575 electron-withdrawing group Chemical group 0.000 claims description 8
- 239000000470 constituent Substances 0.000 claims description 5
- 230000035945 sensitivity Effects 0.000 abstract description 11
- 125000000962 organic group Chemical group 0.000 abstract description 4
- -1 cinnamoyl group Chemical group 0.000 description 26
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 15
- 239000000178 monomer Substances 0.000 description 13
- 238000000034 method Methods 0.000 description 11
- 238000006243 chemical reaction Methods 0.000 description 10
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 10
- 229920001519 homopolymer Polymers 0.000 description 9
- 230000000052 comparative effect Effects 0.000 description 8
- 239000011347 resin Substances 0.000 description 7
- 229920005989 resin Polymers 0.000 description 7
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 6
- 235000013985 cinnamic acid Nutrition 0.000 description 5
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 5
- OKKJLVBELUTLKV-UHFFFAOYSA-N methanol Natural products OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 5
- WBYWAXJHAXSJNI-UHFFFAOYSA-N methyl p-hydroxycinnamate Natural products OC(=O)C=CC1=CC=CC=C1 WBYWAXJHAXSJNI-UHFFFAOYSA-N 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- JZWPRCWBKDCVNH-UHFFFAOYSA-N 3-[4-(dimethylamino)phenyl]prop-2-enoyl chloride Chemical compound CN(C)C1=CC=C(C=CC(Cl)=O)C=C1 JZWPRCWBKDCVNH-UHFFFAOYSA-N 0.000 description 4
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 4
- 230000003993 interaction Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- WBYWAXJHAXSJNI-VOTSOKGWSA-M .beta-Phenylacrylic acid Natural products [O-]C(=O)\C=C\C1=CC=CC=C1 WBYWAXJHAXSJNI-VOTSOKGWSA-M 0.000 description 3
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- MSKUIJKHEHAXKG-UHFFFAOYSA-N C(C(=C)C)(=O)OCCOC(C=CC1=CC=C(C=C1)N(CC)CC)=O Chemical compound C(C(=C)C)(=O)OCCOC(C=CC1=CC=C(C=C1)N(CC)CC)=O MSKUIJKHEHAXKG-UHFFFAOYSA-N 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- KXNQKOAQSGJCQU-UHFFFAOYSA-N benzo[e][1,3]benzothiazole Chemical class C1=CC=C2C(N=CS3)=C3C=CC2=C1 KXNQKOAQSGJCQU-UHFFFAOYSA-N 0.000 description 3
- 229930016911 cinnamic acid Natural products 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 3
- YXIWHUQXZSMYRE-UHFFFAOYSA-N 1,3-benzothiazole-2-thiol Chemical compound C1=CC=C2SC(S)=NC2=C1 YXIWHUQXZSMYRE-UHFFFAOYSA-N 0.000 description 2
- 125000000954 2-hydroxyethyl group Chemical group [H]C([*])([H])C([H])([H])O[H] 0.000 description 2
- VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical compound C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 2
- SOGAXMICEFXMKE-UHFFFAOYSA-N Butylmethacrylate Chemical compound CCCCOC(=O)C(C)=C SOGAXMICEFXMKE-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 2
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 2
- BAPJBEWLBFYGME-UHFFFAOYSA-N Methyl acrylate Chemical compound COC(=O)C=C BAPJBEWLBFYGME-UHFFFAOYSA-N 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- 239000002318 adhesion promoter Substances 0.000 description 2
- 125000000217 alkyl group Chemical group 0.000 description 2
- 150000001649 bromium compounds Chemical class 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- DOIRQSBPFJWKBE-UHFFFAOYSA-N dibutyl phthalate Chemical compound CCCCOC(=O)C1=CC=CC=C1C(=O)OCCCC DOIRQSBPFJWKBE-UHFFFAOYSA-N 0.000 description 2
- JQCXWCOOWVGKMT-UHFFFAOYSA-N diheptyl phthalate Chemical compound CCCCCCCOC(=O)C1=CC=CC=C1C(=O)OCCCCCCC JQCXWCOOWVGKMT-UHFFFAOYSA-N 0.000 description 2
- 239000000975 dye Substances 0.000 description 2
- 125000003700 epoxy group Chemical group 0.000 description 2
- FJKIXWOMBXYWOQ-UHFFFAOYSA-N ethenoxyethane Chemical compound CCOC=C FJKIXWOMBXYWOQ-UHFFFAOYSA-N 0.000 description 2
- 150000002430 hydrocarbons Chemical group 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- KJFMBFZCATUALV-UHFFFAOYSA-N phenolphthalein Chemical compound C1=CC(O)=CC=C1C1(C=2C=CC(O)=CC=2)C2=CC=CC=C2C(=O)O1 KJFMBFZCATUALV-UHFFFAOYSA-N 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 239000004014 plasticizer Substances 0.000 description 2
- 238000006116 polymerization reaction Methods 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- HGDZRSNJGRIAKS-GQCTYLIASA-N (e)-3-(3,4-dimethoxyphenyl)prop-2-enoyl chloride Chemical compound COC1=CC=C(\C=C\C(Cl)=O)C=C1OC HGDZRSNJGRIAKS-GQCTYLIASA-N 0.000 description 1
- ZFOVCSTVYYYRSU-ZZXKWVIFSA-N (e)-3-(4-chlorophenyl)prop-2-enoyl chloride Chemical compound ClC(=O)\C=C\C1=CC=C(Cl)C=C1 ZFOVCSTVYYYRSU-ZZXKWVIFSA-N 0.000 description 1
- RUPXNPWALFDXJD-ZZXKWVIFSA-N (e)-3-(4-nitrophenyl)prop-2-enoyl chloride Chemical compound [O-][N+](=O)C1=CC=C(\C=C\C(Cl)=O)C=C1 RUPXNPWALFDXJD-ZZXKWVIFSA-N 0.000 description 1
- SCYULBFZEHDVBN-UHFFFAOYSA-N 1,1-Dichloroethane Chemical compound CC(Cl)Cl SCYULBFZEHDVBN-UHFFFAOYSA-N 0.000 description 1
- UYEDESPZQLZMCL-UHFFFAOYSA-N 1,2-dimethylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=C(C)C(C)=CC=C3SC2=C1 UYEDESPZQLZMCL-UHFFFAOYSA-N 0.000 description 1
- YHMYGUUIMTVXNW-UHFFFAOYSA-N 1,3-dihydrobenzimidazole-2-thione Chemical compound C1=CC=C2NC(S)=NC2=C1 YHMYGUUIMTVXNW-UHFFFAOYSA-N 0.000 description 1
- YAOJJEJGPZRYJF-UHFFFAOYSA-N 1-ethenoxyhexane Chemical compound CCCCCCOC=C YAOJJEJGPZRYJF-UHFFFAOYSA-N 0.000 description 1
- IAHOUQOWMXVMEH-UHFFFAOYSA-N 2,4,6-trinitroaniline Chemical compound NC1=C([N+]([O-])=O)C=C([N+]([O-])=O)C=C1[N+]([O-])=O IAHOUQOWMXVMEH-UHFFFAOYSA-N 0.000 description 1
- GOXQRTZXKQZDDN-UHFFFAOYSA-N 2-Ethylhexyl acrylate Chemical compound CCCCC(CC)COC(=O)C=C GOXQRTZXKQZDDN-UHFFFAOYSA-N 0.000 description 1
- WYGWHHGCAGTUCH-UHFFFAOYSA-N 2-[(2-cyano-4-methylpentan-2-yl)diazenyl]-2,4-dimethylpentanenitrile Chemical compound CC(C)CC(C)(C#N)N=NC(C)(C#N)CC(C)C WYGWHHGCAGTUCH-UHFFFAOYSA-N 0.000 description 1
- OVOUKWFJRHALDD-UHFFFAOYSA-N 2-[2-(2-acetyloxyethoxy)ethoxy]ethyl acetate Chemical compound CC(=O)OCCOCCOCCOC(C)=O OVOUKWFJRHALDD-UHFFFAOYSA-N 0.000 description 1
- DXYGJDUJLDXFOD-UHFFFAOYSA-N 2-[2-[2-(2-acetyloxyethoxy)ethoxy]ethoxy]ethyl acetate Chemical compound CC(=O)OCCOCCOCCOCCOC(C)=O DXYGJDUJLDXFOD-UHFFFAOYSA-N 0.000 description 1
- ZCDADJXRUCOCJE-UHFFFAOYSA-N 2-chlorothioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(Cl)=CC=C3SC2=C1 ZCDADJXRUCOCJE-UHFFFAOYSA-N 0.000 description 1
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- WDQMWEYDKDCEHT-UHFFFAOYSA-N 2-ethylhexyl 2-methylprop-2-enoate Chemical compound CCCCC(CC)COC(=O)C(C)=C WDQMWEYDKDCEHT-UHFFFAOYSA-N 0.000 description 1
- OMIGHNLMNHATMP-UHFFFAOYSA-N 2-hydroxyethyl prop-2-enoate Chemical compound OCCOC(=O)C=C OMIGHNLMNHATMP-UHFFFAOYSA-N 0.000 description 1
- XFOHWECQTFIEIX-UHFFFAOYSA-N 2-nitrofluorene Chemical compound C1=CC=C2C3=CC=C([N+](=O)[O-])C=C3CC2=C1 XFOHWECQTFIEIX-UHFFFAOYSA-N 0.000 description 1
- LJAQKDOWIRQJAF-UHFFFAOYSA-N 3-(2,4-dimethoxyphenyl)prop-2-enoyl chloride Chemical compound COc1ccc(C=CC(Cl)=O)c(OC)c1 LJAQKDOWIRQJAF-UHFFFAOYSA-N 0.000 description 1
- NIEKJOQFHOXIQK-UHFFFAOYSA-N 3-(4-cyanophenyl)prop-2-enoyl chloride Chemical compound ClC(=O)C=CC1=CC=C(C#N)C=C1 NIEKJOQFHOXIQK-UHFFFAOYSA-N 0.000 description 1
- RIYDEYWRFIHXBD-UHFFFAOYSA-N 3-[4-(trifluoromethyl)phenyl]prop-2-enoyl chloride Chemical compound FC(F)(F)C1=CC=C(C=CC(Cl)=O)C=C1 RIYDEYWRFIHXBD-UHFFFAOYSA-N 0.000 description 1
- IWTYTFSSTWXZFU-UHFFFAOYSA-N 3-chloroprop-1-enylbenzene Chemical compound ClCC=CC1=CC=CC=C1 IWTYTFSSTWXZFU-UHFFFAOYSA-N 0.000 description 1
- OKHTXMYUDWHGOC-UHFFFAOYSA-N 4-(3-chlorophenyl)butan-2-one Chemical compound CC(=O)CCC1=CC=CC(Cl)=C1 OKHTXMYUDWHGOC-UHFFFAOYSA-N 0.000 description 1
- SXIFAEWFOJETOA-UHFFFAOYSA-N 4-hydroxy-butyl Chemical group [CH2]CCCO SXIFAEWFOJETOA-UHFFFAOYSA-N 0.000 description 1
- CDSULTPOCMWJCM-UHFFFAOYSA-N 4h-chromene-2,3-dione Chemical class C1=CC=C2OC(=O)C(=O)CC2=C1 CDSULTPOCMWJCM-UHFFFAOYSA-N 0.000 description 1
- CUARLQDWYSRQDF-UHFFFAOYSA-N 5-Nitroacenaphthene Chemical compound C1CC2=CC=CC3=C2C1=CC=C3[N+](=O)[O-] CUARLQDWYSRQDF-UHFFFAOYSA-N 0.000 description 1
- QXAMGWKESXGGNV-UHFFFAOYSA-N 7-(diethylamino)-1-benzopyran-2-one Chemical compound C1=CC(=O)OC2=CC(N(CC)CC)=CC=C21 QXAMGWKESXGGNV-UHFFFAOYSA-N 0.000 description 1
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical group CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 1
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 1
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- HHFJCMINQUHSPB-UHFFFAOYSA-N C(C)C(=O)O.CC1=CC=CC=2SC3=CC=CC=C3C(C12)=O Chemical compound C(C)C(=O)O.CC1=CC=CC=2SC3=CC=CC=C3C(C12)=O HHFJCMINQUHSPB-UHFFFAOYSA-N 0.000 description 1
- NSMZXIPRYLWJSE-UHFFFAOYSA-O C[S+](C(C=CC1=CC=CC=C11)=C1N1)C1=C(C(C1=CC=CC=C1)=O)C(C1=CC=CC=C1)=O Chemical compound C[S+](C(C=CC1=CC=CC=C11)=C1N1)C1=C(C(C1=CC=CC=C1)=O)C(C1=CC=CC=C1)=O NSMZXIPRYLWJSE-UHFFFAOYSA-O 0.000 description 1
- JIGUQPWFLRLWPJ-UHFFFAOYSA-N Ethyl acrylate Chemical compound CCOC(=O)C=C JIGUQPWFLRLWPJ-UHFFFAOYSA-N 0.000 description 1
- WOBHKFSMXKNTIM-UHFFFAOYSA-N Hydroxyethyl methacrylate Chemical compound CC(=C)C(=O)OCCO WOBHKFSMXKNTIM-UHFFFAOYSA-N 0.000 description 1
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 description 1
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 1
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 1
- VCUFZILGIRCDQQ-KRWDZBQOSA-N N-[[(5S)-2-oxo-3-(2-oxo-3H-1,3-benzoxazol-6-yl)-1,3-oxazolidin-5-yl]methyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical group O=C1O[C@H](CN1C1=CC2=C(NC(O2)=O)C=C1)CNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F VCUFZILGIRCDQQ-KRWDZBQOSA-N 0.000 description 1
- 239000002202 Polyethylene glycol Substances 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 241000220317 Rosa Species 0.000 description 1
- XTXRWKRVRITETP-UHFFFAOYSA-N Vinyl acetate Chemical compound CC(=O)OC=C XTXRWKRVRITETP-UHFFFAOYSA-N 0.000 description 1
- 235000010724 Wisteria floribunda Nutrition 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000001476 alcoholic effect Effects 0.000 description 1
- XYLMUPLGERFSHI-UHFFFAOYSA-N alpha-Methylstyrene Chemical compound CC(=C)C1=CC=CC=C1 XYLMUPLGERFSHI-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 125000003368 amide group Chemical group 0.000 description 1
- RJGDLRCDCYRQOQ-UHFFFAOYSA-N anthrone Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3CC2=C1 RJGDLRCDCYRQOQ-UHFFFAOYSA-N 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- IONYAPWXJUCNPR-UHFFFAOYSA-N benzo[e][1]benzofuran-1-one Chemical class C1=CC=CC2=C3C(=O)COC3=CC=C21 IONYAPWXJUCNPR-UHFFFAOYSA-N 0.000 description 1
- 150000008366 benzophenones Chemical class 0.000 description 1
- AOJOEFVRHOZDFN-UHFFFAOYSA-N benzyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC1=CC=CC=C1 AOJOEFVRHOZDFN-UHFFFAOYSA-N 0.000 description 1
- GCTPMLUUWLLESL-UHFFFAOYSA-N benzyl prop-2-enoate Chemical compound C=CC(=O)OCC1=CC=CC=C1 GCTPMLUUWLLESL-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229960001506 brilliant green Drugs 0.000 description 1
- HXCILVUBKWANLN-UHFFFAOYSA-N brilliant green cation Chemical compound C1=CC(N(CC)CC)=CC=C1C(C=1C=CC=CC=1)=C1C=CC(=[N+](CC)CC)C=C1 HXCILVUBKWANLN-UHFFFAOYSA-N 0.000 description 1
- CQEYYJKEWSMYFG-UHFFFAOYSA-N butyl acrylate Chemical compound CCCCOC(=O)C=C CQEYYJKEWSMYFG-UHFFFAOYSA-N 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 150000001851 cinnamic acid derivatives Chemical class 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- IQFVPQOLBLOTPF-HKXUKFGYSA-L congo red Chemical compound [Na+].[Na+].C1=CC=CC2=C(N)C(/N=N/C3=CC=C(C=C3)C3=CC=C(C=C3)/N=N/C3=C(C4=CC=CC=C4C(=C3)S([O-])(=O)=O)N)=CC(S([O-])(=O)=O)=C21 IQFVPQOLBLOTPF-HKXUKFGYSA-L 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- ZXJXZNDDNMQXFV-UHFFFAOYSA-M crystal violet Chemical compound [Cl-].C1=CC(N(C)C)=CC=C1[C+](C=1C=CC(=CC=1)N(C)C)C1=CC=C(N(C)C)C=C1 ZXJXZNDDNMQXFV-UHFFFAOYSA-M 0.000 description 1
- 238000006297 dehydration reaction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- YQGOJNYOYNNSMM-UHFFFAOYSA-N eosin Chemical compound [Na+].OC(=O)C1=CC=CC=C1C1=C2C=C(Br)C(=O)C(Br)=C2OC2=C(Br)C(O)=C(Br)C=C21 YQGOJNYOYNNSMM-UHFFFAOYSA-N 0.000 description 1
- IINNWAYUJNWZRM-UHFFFAOYSA-L erythrosin B Chemical compound [Na+].[Na+].[O-]C(=O)C1=CC=CC=C1C1=C2C=C(I)C(=O)C(I)=C2OC2=C(I)C([O-])=C(I)C=C21 IINNWAYUJNWZRM-UHFFFAOYSA-L 0.000 description 1
- 125000004185 ester group Chemical group 0.000 description 1
- 125000001033 ether group Chemical group 0.000 description 1
- SUPCQIBBMFXVTL-UHFFFAOYSA-N ethyl 2-methylprop-2-enoate Chemical compound CCOC(=O)C(C)=C SUPCQIBBMFXVTL-UHFFFAOYSA-N 0.000 description 1
- JVICFMRAVNKDOE-UHFFFAOYSA-M ethyl violet Chemical compound [Cl-].C1=CC(N(CC)CC)=CC=C1C(C=1C=CC(=CC=1)N(CC)CC)=C1C=CC(=[N+](CC)CC)C=C1 JVICFMRAVNKDOE-UHFFFAOYSA-M 0.000 description 1
- 125000000524 functional group Chemical group 0.000 description 1
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 1
- 150000002334 glycols Chemical class 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- PBZROIMXDZTJDF-UHFFFAOYSA-N hepta-1,6-dien-4-one Chemical compound C=CCC(=O)CC=C PBZROIMXDZTJDF-UHFFFAOYSA-N 0.000 description 1
- JTHNLKXLWOXOQK-UHFFFAOYSA-N hex-1-en-3-one Chemical compound CCCC(=O)C=C JTHNLKXLWOXOQK-UHFFFAOYSA-N 0.000 description 1
- LNCPIMCVTKXXOY-UHFFFAOYSA-N hexyl 2-methylprop-2-enoate Chemical compound CCCCCCOC(=O)C(C)=C LNCPIMCVTKXXOY-UHFFFAOYSA-N 0.000 description 1
- LNMQRPPRQDGUDR-UHFFFAOYSA-N hexyl prop-2-enoate Chemical compound CCCCCCOC(=O)C=C LNMQRPPRQDGUDR-UHFFFAOYSA-N 0.000 description 1
- 125000004029 hydroxymethyl group Chemical group [H]OC([H])([H])* 0.000 description 1
- 229940107698 malachite green Drugs 0.000 description 1
- FDZZZRQASAIRJF-UHFFFAOYSA-M malachite green Chemical compound [Cl-].C1=CC(N(C)C)=CC=C1C(C=1C=CC=CC=1)=C1C=CC(=[N+](C)C)C=C1 FDZZZRQASAIRJF-UHFFFAOYSA-M 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- FQPSGWSUVKBHSU-UHFFFAOYSA-N methacrylamide Chemical compound CC(=C)C(N)=O FQPSGWSUVKBHSU-UHFFFAOYSA-N 0.000 description 1
- DWCZIOOZPIDHAB-UHFFFAOYSA-L methyl green Chemical compound [Cl-].[Cl-].C1=CC(N(C)C)=CC=C1C(C=1C=CC(=CC=1)[N+](C)(C)C)=C1C=CC(=[N+](C)C)C=C1 DWCZIOOZPIDHAB-UHFFFAOYSA-L 0.000 description 1
- STZCRXQWRGQSJD-GEEYTBSJSA-M methyl orange Chemical compound [Na+].C1=CC(N(C)C)=CC=C1\N=N\C1=CC=C(S([O-])(=O)=O)C=C1 STZCRXQWRGQSJD-GEEYTBSJSA-M 0.000 description 1
- 229940012189 methyl orange Drugs 0.000 description 1
- CEQFOVLGLXCDCX-WUKNDPDISA-N methyl red Chemical compound C1=CC(N(C)C)=CC=C1\N=N\C1=CC=CC=C1C(O)=O CEQFOVLGLXCDCX-WUKNDPDISA-N 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- QYZFTMMPKCOTAN-UHFFFAOYSA-N n-[2-(2-hydroxyethylamino)ethyl]-2-[[1-[2-(2-hydroxyethylamino)ethylamino]-2-methyl-1-oxopropan-2-yl]diazenyl]-2-methylpropanamide Chemical compound OCCNCCNC(=O)C(C)(C)N=NC(C)(C)C(=O)NCCNCCO QYZFTMMPKCOTAN-UHFFFAOYSA-N 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- PNJWIWWMYCMZRO-UHFFFAOYSA-N pent‐4‐en‐2‐one Natural products CC(=O)CC=C PNJWIWWMYCMZRO-UHFFFAOYSA-N 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- 150000003021 phthalic acid derivatives Chemical class 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 239000003505 polymerization initiator Substances 0.000 description 1
- 229920001451 polypropylene glycol Polymers 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- HJWLCRVIBGQPNF-UHFFFAOYSA-N prop-2-enylbenzene Chemical compound C=CCC1=CC=CC=C1 HJWLCRVIBGQPNF-UHFFFAOYSA-N 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 150000004053 quinones Chemical class 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 125000001424 substituent group Chemical group 0.000 description 1
- 238000001308 synthesis method Methods 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- DQFBYFPFKXHELB-VAWYXSNFSA-N trans-chalcone Chemical group C=1C=CC=CC=1C(=O)\C=C\C1=CC=CC=C1 DQFBYFPFKXHELB-VAWYXSNFSA-N 0.000 description 1
- FUSUHKVFWTUUBE-UHFFFAOYSA-N vinyl methyl ketone Natural products CC(=O)C=C FUSUHKVFWTUUBE-UHFFFAOYSA-N 0.000 description 1
Abstract
Description
【発明の詳細な説明】
[産業上の利用分野]
本発明は、LSI素子や印刷版などの画像形成材料に利
用可能な、光二量化可能な基を有する重合体を含む高感
度な感光性樹脂組威物に関する。Detailed Description of the Invention [Industrial Application Field] The present invention relates to a highly sensitive photosensitive resin containing a polymer having a photodimerizable group, which can be used in image forming materials such as LSI elements and printing plates. Regarding kumiimono.
[従来の技術コ
環化付加反応によって架橋する光架橋性材料はよく知ら
れており、これらはLSI素子や印刷版などの画像形成
材料に利用されている。これらの光架橋性材料の中でも
芳香核に隣接した光二量化可能な不飽和二重結合を有す
るシンナモイル基、シンナミリデン酢酸基やカルコン基
等を側鎖又は主鎖に有する感光性樹脂は有用で、実用化
されているものもある。しかし、一般には光重合性感光
性樹脂等と比べ低感度であり、高感度化をはかるため様
々な改良が試みられてきた。[Prior Art] Photocrosslinkable materials that are crosslinked by a cocycloaddition reaction are well known, and these are used in image forming materials such as LSI devices and printing plates. Among these photocrosslinkable materials, photosensitive resins having a cinnamoyl group, a cinnamylidene acetate group, a chalcone group, etc. in the side chain or main chain, which have a photodimerizable unsaturated double bond adjacent to an aromatic nucleus, are useful and have a practical use. There are some that have been converted. However, they generally have lower sensitivity than photopolymerizable photosensitive resins, etc., and various improvements have been attempted to increase sensitivity.
上記の光二量化可能な不飽和二重結合を有する感光性樹
脂は300nm前後に吸収極大を持つものが多いため、
高感度化をはかる手段は従来主として増感剤の探索に向
けられていた。特公昭51−46697号、特公昭52
−41054号、特公昭5 5−3 3 6 9 9号
、特開昭57−24935号、特開昭60−93427
号公報等に有用な増感剤の記載がみられる。しかし、そ
の効果はいまだ十分なものではない。Since many of the above-mentioned photosensitive resins having photodimerizable unsaturated double bonds have an absorption maximum around 300 nm,
Conventionally, means for increasing sensitivity have mainly been directed to the search for sensitizers. Special Publication No. 51-46697, Special Publication No. 52
-41054, JP 5-5-3-3-6-9-9, JP-A-57-24935, JP-A-60-93427
Descriptions of useful sensitizers can be found in the above publications. However, the effects are still not sufficient.
一方、その他の高感度化手段として、例えば感光基間の
相互作用を利用するものがある。特開昭55−1189
11号公報には、シンナモイル残基のフェニル基上にそ
れぞれ電子供与性基と電子吸引性基を有する重合体をブ
レンドする方法が記載されている。これは、電子供与性
基と電子吸引性基間の相互作用によりシンナモイル残基
上の光二量化可能な不飽和二重結合の反応性が高められ
更に異種高分子鎖間の反応が促進されるため架橋効率が
上昇することを利用したものである。しかし2種以上の
高分子のブレンドであるため高分子同士の相溶性が問題
となる場合があり、感度上昇効果は十分ではなかった。On the other hand, as other means for increasing sensitivity, for example, there are methods that utilize interaction between photosensitive groups. Japanese Patent Publication No. 55-1189
No. 11 describes a method of blending a polymer having an electron-donating group and an electron-withdrawing group on each phenyl group of a cinnamoyl residue. This is because the interaction between the electron-donating group and the electron-withdrawing group increases the reactivity of the photodimerizable unsaturated double bond on the cinnamoyl residue and further promotes the reaction between different polymer chains. This method takes advantage of the fact that crosslinking efficiency increases. However, since it is a blend of two or more types of polymers, compatibility between the polymers may be a problem, and the effect of increasing sensitivity was not sufficient.
従って本発明の目的は、光二量化可能な不飽和二重結合
を有する重合体を含むより高感度な感光性樹脂組成物を
提供することにある。Therefore, an object of the present invention is to provide a photosensitive resin composition with higher sensitivity, which contains a photodimerizable polymer having an unsaturated double bond.
本発明者は、該目的を達成すべく鋭意研究を重ねた結果
本発明に到達したものである。すなわち本発明は、
(A)1つ以上の電子供与性基で置換されたアリール基
をβ位に有するアクリロイル基、及び(B)1つ以上の
電子吸引性基で置換されたアリール基をβ位に有するア
クリロイル基を共に構成単位として含む重合体を主戒分
とする感光性樹脂組成物に関するものである。ここで、
「アリール基をβ位に有するアクリロイル基」とは下記
一般式(I)で表される基を意味する。The present inventor has arrived at the present invention as a result of extensive research in order to achieve the object. That is, the present invention provides (A) an acryloyl group having an aryl group substituted with one or more electron-donating groups at the β-position, and (B) an aryl group substituted with one or more electron-withdrawing groups in the β-position. The present invention relates to a photosensitive resin composition whose main component is a polymer containing an acryloyl group in both positions as a constituent unit. here,
"Acryloyl group having an aryl group at the β position" means a group represented by the following general formula (I).
σ
O
(R’は水素原子または1価の有機基、R2はアリール
基)
該重合体の代表例として、以下の一般式(II)及び一
般式(IIr)を共に構成単位に含む重合体が挙げられ
る。σ O (R' is a hydrogen atom or a monovalent organic group, R2 is an aryl group) A typical example of the polymer is a polymer containing both the following general formula (II) and general formula (IIr) as constituent units. Can be mentioned.
(R’は水素原子またはメチル基、R4は2価の有機基
または単なる結合、RSは水素原子または電子供与性基
、Rsは1個以上の電子供与性基で置換されたアリール
基)
R7
j
l
O (III)
(R’は水素原子またはメチル基、R8は2価の有機基
または単なる結合、Rgは水素原子または電子吸引性基
、R ”は1個以上の電子吸引性基で置換されたアリー
ル基)
上記の一般式(II)及び一般式(IllF)を共に構
成単位に含む重合体は重合法でも高分子反応法でも得る
ことができる。(R' is a hydrogen atom or a methyl group, R4 is a divalent organic group or a simple bond, RS is a hydrogen atom or an electron donating group, Rs is an aryl group substituted with one or more electron donating groups) R7 j l O (III) (R' is a hydrogen atom or a methyl group, R8 is a divalent organic group or a simple bond, Rg is a hydrogen atom or an electron-withdrawing group, R'' is substituted with one or more electron-withdrawing groups) (aryl group) The polymer containing both the above general formula (II) and general formula (IllF) as constituent units can be obtained by a polymerization method or a polymer reaction method.
重合法による合成は、一般式(IV) R3 l 0 (■) (R”〜R@は前に定義したものと同様である。Synthesis by polymerization method is general formula (IV) R3 l 0 (■) (R''~R@ are the same as defined previously.
)
及び一般式(V)
R7
C
CH.−C R’11
(R ” ) 一〇 −C −C −C H −R ′
01
0 (V)
(R’〜Rl0は前に定義したものと同様である。) and general formula (V) R7 C CH. -C R'11 (R'') 10 -C -C -C H -R'
01 0 (V) (R' to Rl0 are the same as defined previously.
)
で表される単量体を共存させ、適当な重合開始剤の存在
下で反応させることにょり達戒される。) can be achieved by allowing the monomers represented by the formula to coexist and reacting in the presence of a suitable polymerization initiator.
一般式(IV)の単量体は分子中に電子供与性基置換シ
ンナモイル残基を有する単量体であればよく、従って前
記一般式(IV)のR4は単に前記シンナモイル残基と
重合性基とを結合し得るものの中から任意に選択するこ
とができる。このR4の例としては、単なる結合、置換
基を有していてもよい炭化水素基、エーテル基、エステ
ル基、アミド基等を含有する炭化水素基などがある。The monomer of general formula (IV) may be a monomer having an electron-donating group-substituted cinnamoyl residue in the molecule. Therefore, R4 of the general formula (IV) simply combines the cinnamoyl residue and the polymerizable group. can be arbitrarily selected from those that can be combined with. Examples of R4 include a simple bond, a hydrocarbon group which may have a substituent, and a hydrocarbon group containing an ether group, an ester group, an amide group, and the like.
同じように、一般式(V)の単量体も分子中に電子吸引
性基置換ジンナモイル残基を有する単量体であればよい
ので、一般式(IV)のRaもこのシンナモイル残基と
重合性基とを結合する役割を果たし得るものの中から任
意に選択することができる。Similarly, since the monomer of general formula (V) may be a monomer having a cinnamoyl residue substituted with an electron-withdrawing group in the molecule, Ra of general formula (IV) can also be polymerized with this cinnamoyl residue. It can be arbitrarily selected from those that can play the role of bonding with a functional group.
一般式(IV)及び一般式(V)の単量体は種々の方法
で合成される。代表的な例として、特公昭49−281
22号公報等に記載のごとく、ヒドロキシ基を有する(
メタ)アクリレートと置換シンナモイルハライドの反応
による方法がある。Monomers of general formula (IV) and general formula (V) are synthesized by various methods. As a representative example, the
As described in Publication No. 22 etc., it has a hydroxy group (
One method involves the reaction of meth)acrylate with substituted cinnamoyl halide.
ヒドロキシ基を有する(メタ)アクリレートとしては、
ヒドロキシメチル(メタ)アクリレート、2−ヒドロキ
シエチル(メタ)アクリレート、2−ヒドロキシプロビ
ル(メタ)アクリレート、3−ヒドロキシプ口ピル(メ
タ)アクリレート、2一ヒドロキシブチル(メタ)アク
リレート、4一ヒドロキシブチル(メタ)アクリレート
、ポリエチレングリコールモノ(メタ)アクリレート、
ポリプロピレングリコールモノ(メタ)アクリレート等
が挙げられる。As a (meth)acrylate having a hydroxy group,
Hydroxymethyl (meth)acrylate, 2-hydroxyethyl (meth)acrylate, 2-hydroxypropyl (meth)acrylate, 3-hydroxybutyl (meth)acrylate, 2-hydroxybutyl (meth)acrylate, 4-hydroxybutyl (meth)acrylate, polyethylene glycol mono(meth)acrylate,
Examples include polypropylene glycol mono(meth)acrylate.
置換シンナモイルハライドの例は、電子供与性基が置換
されたものとして、4−ジメチルアミノシンナモイルク
ロリド、4−ジエチルアミノシンナモイルクロリド、4
−メトキシシンナモイルクロリド、3,4−ジメトキシ
シンナモイルクロリド、2,4−ジメトキシシンナモイ
ルクロリド、4,−メチルシンナモイルクロリド及び対
応するブロミドなどである。また電子吸引性基が置換さ
れたものとしては、4−シアノシンナモイルクロリド、
4−ニトロシンナモイルクロリド、3−ニトロシンナモ
イルクロリド、2,4−ジニトロシンナモイルクロリド
、4−トリフルオロメチルシンナモイルクロリド、4−
アセチルシンナモイルクロリド、4−クロロシンナモイ
ルクロリド、4,α−ジシアノシンナモイルクロリド及
び対応するブロミドなどである。Examples of substituted cinnamoyl halides are 4-dimethylaminocinnamoyl chloride, 4-diethylaminocinnamoyl chloride, 4-dimethylaminocinnamoyl chloride, 4-dimethylaminocinnamoyl chloride, and 4-dimethylaminocinnamoyl chloride.
-methoxycinnamoyl chloride, 3,4-dimethoxycinnamoyl chloride, 2,4-dimethoxycinnamoyl chloride, 4,-methylcinnamoyl chloride and the corresponding bromides. Examples of substituted electron-withdrawing groups include 4-cyanocinnamoyl chloride,
4-Nitrocinnamoyl chloride, 3-nitrocinnamoyl chloride, 2,4-dinitrocinnamoyl chloride, 4-trifluoromethylcinnamoyl chloride, 4-
These include acetylcinnamoyl chloride, 4-chlorocinnamoyl chloride, 4,α-dicyanocinnamoyl chloride and the corresponding bromides.
上述の反応で得られる単量体は、ヒドロキシ基を有する
(メタ)アクリレートと置換桂皮酸の脱水反応によって
も得ることができる。The monomer obtained by the above reaction can also be obtained by a dehydration reaction of a (meth)acrylate having a hydroxy group and a substituted cinnamic acid.
この他、グリシジル(メタ)アクリレートに代表される
エポキシ基含有付加重合性単量体と置換桂皮酸の反応、
クロロメチルスチレンに代表されるハロゲン化アルキル
基含有付加重合性単量体と置換桂皮酸アルカリ塩の反応
等でも所望の単量体を得ることができる。In addition, reactions between epoxy group-containing addition polymerizable monomers such as glycidyl (meth)acrylate and substituted cinnamic acids,
The desired monomer can also be obtained by reacting a halogenated alkyl group-containing addition polymerizable monomer typified by chloromethylstyrene with a substituted cinnamic acid alkali salt.
一般式(IV)及び一般式(V)の単量体は、他の共重
合可能な付加重合性単量体と共重合させてもよい。代表
的な単量体としては、メタクリル酸、メタクリル酸メチ
ル、メタクリル酸エチル、メタクリル酸プロビル、メタ
クリル酸ブチル、メタクリル酸ヘキシル、メタクリル酸
2−エチルヘキシル、メタクリル酸ベンジル、メタクリ
ル酸2−ヒドロキシエチル、アクリル酸、アクリル酸メ
チル、アクリル酸エチル、アクリル酸プロビル、アクリ
ル酸ブチル、アクリル酸ヘキシル、アクリル酸2一エチ
ルヘキシル、アクリル酸ベンジル、アクリル酸2−ヒド
ロキシエチル、アクリロニトリル、スチレン、α−メチ
ルスチレン、ビニルトルエン、アクリルアミド、メタク
リルアミド、ビニルメチルケトン、ビニルプロビルケト
ン、ビニルメチル工一テル、ビニルエチルエーテル、ビ
ニルヘキシルエーテル及びビニルアセテート等が挙げら
れる。The monomers of general formula (IV) and general formula (V) may be copolymerized with other copolymerizable addition polymerizable monomers. Typical monomers include methacrylic acid, methyl methacrylate, ethyl methacrylate, probyl methacrylate, butyl methacrylate, hexyl methacrylate, 2-ethylhexyl methacrylate, benzyl methacrylate, 2-hydroxyethyl methacrylate, and acrylic. Acid, methyl acrylate, ethyl acrylate, probyl acrylate, butyl acrylate, hexyl acrylate, 2-ethylhexyl acrylate, benzyl acrylate, 2-hydroxyethyl acrylate, acrylonitrile, styrene, α-methylstyrene, vinyltoluene , acrylamide, methacrylamide, vinyl methyl ketone, vinyl propyl ketone, vinyl methyl alcohol, vinyl ethyl ether, vinyl hexyl ether, vinyl acetate, and the like.
上記の一般式(n)及び一般式(I[I)を共に構成単
位に含む重合体は、また、高分子反応法でも得ることが
できる。代表的な合成法としては、ポリビニルアルコー
ル、ポリ 〔2−ヒドロキシエチル(メタ)アクリレー
ト〕等のアルコール性水酸基を有する重合体に、前述の
電子供与性基置換シンナモイルハライド及び電子吸引性
基置換シンナモイルハライドを段階的に反応させる方法
が挙げられる。また、ポリグリシジル(メタ)アクリレ
ート等のエボキシ基含有重合体と置換桂皮酸の反応、ボ
リクロロメチルスチレン等のハロゲン化アルキル基含有
重合体と置換桂皮酸アルカリ塩の反応等も挙げられる。The polymer containing both the above general formula (n) and general formula (I[I) as constituent units can also be obtained by a polymer reaction method. A typical synthesis method involves adding the aforementioned electron-donating group-substituted cinnamoyl halide and electron-withdrawing group-substituted cinnamoyl halide to a polymer having an alcoholic hydroxyl group, such as polyvinyl alcohol or poly[2-hydroxyethyl (meth)acrylate]. One example is a method of reacting moyl halide in stages. Other examples include reactions between epoxy group-containing polymers such as polyglycidyl (meth)acrylate and substituted cinnamic acids, and reactions between halogenated alkyl group-containing polymers such as polychloromethylstyrene and substituted cinnamic acid alkali salts.
以上のようにして合成される重合体の数平均分子量はs
,ooo〜200,000の範囲にあるのが望ましい。The number average molecular weight of the polymer synthesized as above is s
, ooo to 200,000.
この範囲より高分子になると溶媒に溶けにくく種々の用
途に支障をきたすようになり、また、この範囲より低分
子になると光架橋後の樹脂の強度が低くなり実用的でな
くなる。If the molecular weight is higher than this range, it will be difficult to dissolve in solvents and will interfere with various uses, and if the molecular weight is lower than this range, the strength of the resin after photocrosslinking will be low, making it impractical.
また、該重合体中の(A)構或単位と(B)構或単位の
割合は、(A)/ (B)モル比が20/80〜8 0
/2 0の範囲になることが好ましい。Further, the ratio of (A) structural units and (B) structural units in the polymer is such that the (A)/(B) molar ratio is 20/80 to 80.
The range is preferably /20.
この範囲内で(A)と(B)の間で相互作用を生じ、そ
れぞれの単位のみから成る重合体より光反応性が高くな
る。Within this range, interaction occurs between (A) and (B), resulting in higher photoreactivity than a polymer consisting only of each unit.
該重合体は、そのままで(A)構或単位と(B)構成単
位の相互作用により光反応性が増大しているが、更に増
感剤を用いることによりその機能を強化させることがで
きる。Although the polymer has increased photoreactivity as it is due to the interaction between the (A) structural unit and the (B) structural unit, its function can be further enhanced by using a sensitizer.
増感剤としてはベンゾフェノン誘導体、ペンズアンスロ
ン誘導体、キノン類、芳香族二トロ化合物、ナフトチア
ゾリン誘導体、ペンゾチアゾリン誘導体、チオキサント
ン類、ナフトチアゾール誘導体、ケトクマリン化合物、
ペンゾチアゾール誘導体、ナフトフラノン化合物、ビリ
リウム塩、チアビリリウム塩等を挙げることができる。Sensitizers include benzophenone derivatives, penzanthrone derivatives, quinones, aromatic nitro compounds, naphthothiazoline derivatives, penzothiazoline derivatives, thioxanthones, naphthothiazole derivatives, ketocoumarin compounds,
Examples include penzothiazole derivatives, naphthofuranone compounds, biryllium salts, and thiavirylium salts.
具体的にはミヒラーケトン、N,N’ −ジエチルア
ミノベンゾフェノン、ペンズアンスロン、(3−メチル
−1.3−ジアザー1,9−ベンズ)アンスロンピクラ
ミド、5−ニトロアセナフテン、2−クロロチオキサン
トン、2−イソプロビルチオキサントン、ジメチルチオ
キサントン、メチルチオキサントン−1−エチルカルボ
キシレート、2−ニトロフルオレン、2−ペンゾイルメ
チレン−3一メチルナフトチアゾリン、2−ジベンゾイ
ルメチレン−3−メチルナフトチアゾリン、3,3′カ
ルボニルービス(7−ジエチルアミノクマリン) 、2
,4.6−4リフエニルチアピリリウムバークロレート
、2−(バラークロロベンゾイル)ナフトチアゾール及
び米国特許第4,147,552号、第4,062,6
86号、第4,1l6,466号公報に開示されている
増感剤等を挙げることができる。これらの増感剤の添加
量は全組成物の約0.5〜約20重量%、より好ましく
はl−10重量%が適当である。Specifically, Michler's ketone, N,N'-diethylaminobenzophenone, penzanthrone, (3-methyl-1,3-diaza-1,9-benz)anthrone picramide, 5-nitroacenaphthene, 2-chlorothioxanthone, 2- Isoprobylthioxanthone, dimethylthioxanthone, methylthioxanthone-1-ethylcarboxylate, 2-nitrofluorene, 2-penzoylmethylene-3-methylnaphthothiazoline, 2-dibenzoylmethylene-3-methylnaphthothiazoline, 3,3'carbonylrubis( 7-diethylaminocoumarin), 2
, 4.6-4 rifhenylthiapyrylium verchlorate, 2-(varchlorobenzoyl)naphthothiazole and U.S. Pat. No. 4,147,552, No. 4,062,6
Examples include sensitizers disclosed in Japanese Patent No. 86 and No. 4,116,466. The appropriate amount of these sensitizers added is about 0.5 to about 20% by weight, more preferably 1-10% by weight of the total composition.
本発明の感光性樹脂組成物には、さらに必要に応じて染
料、密着促進剤、可塑剤などの添加剤を加えてもよい。The photosensitive resin composition of the present invention may further contain additives such as dyes, adhesion promoters, and plasticizers, if necessary.
染料の例は、ブリリアントグリーン、エオシン、エチル
バイオレット、エリスロシンB、メチルグリーン、クリ
スタルバイオレット、ペイジ・ソクフクシン、フェノー
ルフタレイン、メチルオレンジ、バラメチルレッド、コ
ンゴウレッド、メチルバイオレット、マラカイトグリー
ンなどである。Examples of dyes are brilliant green, eosin, ethyl violet, erythrosin B, methyl green, crystal violet, page sokfuchsin, phenolphthalein, methyl orange, rose methyl red, congo red, methyl violet, malachite green, etc.
密着促進剤の例としては、ペンズイミダゾール、化合物
、2−メルカプトベンズチアゾール、2ーメルカプトベ
ンズイミダゾールなど特開昭53−702号に記載の化
合物等が挙げられる。Examples of adhesion promoters include penzimidazole, compounds, 2-mercaptobenzthiazole, 2-mercaptobenzimidazole, and other compounds described in JP-A-53-702.
可塑剤の例は、ジブチルフタレート、ジヘプチルフタレ
ート等のフタル酸エステル類;トリエチレングリコール
ジアセテート、テトラエチレングリコールジアセテート
等のグリコールエステル類などである。Examples of plasticizers include phthalic acid esters such as dibutyl phthalate and diheptyl phthalate; glycol esters such as triethylene glycol diacetate and tetraethylene glycol diacetate.
本発明の感光性樹脂組成物を、メチルエチルケトン、シ
クロヘキサノン、アセトン、テトラヒドロフラン、ジメ
チルホルムアミド、ジメチルスルホキシド、エチルセロ
ソルブ、ジクロロエタン等の有機溶剤に溶かし、アルミ
ニウム板、銅板、亜鉛板等の金属板またはポリエチレン
テレフタレ−ト等のプラスチックベースの表面に流延、
吹き付け、塗布などの手段により均一な層となし、次い
で乾燥することにより製膜することができる。このよう
にして得られた感光性樹脂膜に像形成露光を行った後、
前述の有機溶剤を用いて現像処理を施すことにより鮮明
なレリーフ像を得ることができる。The photosensitive resin composition of the present invention is dissolved in an organic solvent such as methyl ethyl ketone, cyclohexanone, acetone, tetrahydrofuran, dimethyl formamide, dimethyl sulfoxide, ethyl cellosolve, dichloroethane, etc. - Casting onto the surface of plastic base such as
A film can be formed by forming a uniform layer by means such as spraying or coating, and then drying it. After performing image forming exposure on the photosensitive resin film obtained in this way,
A clear relief image can be obtained by performing a development process using the above-mentioned organic solvent.
本発明の感光性樹脂組或物は光反応性が高く、単独重合
体から成る組成物よりも高感度である。The photosensitive resin composition of the present invention has high photoreactivity and is more sensitive than compositions made of homopolymers.
また、一見、電子供与性単位と電子受容性単位を同一高
分子鎖中に含むため分子内反応が優先すると考えられる
が、予想に反して2種以上の単独重合体の混合の場合よ
り高感度であり、かつ、相溶性の心配をする必要もなく
調液が容易であるため、フォトレジスト、印刷版等の用
途に非常に有用である。In addition, at first glance, it seems that intramolecular reactions take precedence because the same polymer chain contains electron-donating units and electron-accepting units, but contrary to expectations, the sensitivity is higher when a mixture of two or more homopolymers is used. Moreover, it is easy to prepare a solution without worrying about compatibility, so it is very useful for applications such as photoresists and printing plates.
以下に、実施例により本発明を更に詳細に説明するが、
本発明はこれらに限定されるものではない。Below, the present invention will be explained in more detail with reference to Examples.
The present invention is not limited to these.
実施例1
2−(4−ジエチルアミノシンナモイルオキシ)エチル
メタクリレート10重量部、2−(4−トリフルオロメ
チルシンナモイルオキシ)エチルメタクリレート10重
量部、テトラヒド口フラン80重量部及び2,2′−ア
ゾビス(2.4−ジメチルバレロニトリル)0.02重
量部を混合し、10分間窒素ガスをパージした後、62
℃の恒温浴中に8時間浸漬した。反応生成物をメタノー
ル中に滴下することにより、共重合体を黄色粉末状固体
として得た。GPCによる分子量測定で、数平均分子量
は27500と求められた。Example 1 10 parts by weight of 2-(4-diethylaminocinnamoyloxy)ethyl methacrylate, 10 parts by weight of 2-(4-trifluoromethylcinnamoyloxy)ethyl methacrylate, 80 parts by weight of tetrahydrofuran, and 2,2'-azobis (2.4-Dimethylvaleronitrile) 0.02 parts by weight was mixed, and after purging with nitrogen gas for 10 minutes, 62 parts by weight of
It was immersed in a constant temperature bath at ℃ for 8 hours. By dropping the reaction product into methanol, a copolymer was obtained as a yellow powdery solid. The number average molecular weight was determined to be 27,500 by molecular weight measurement using GPC.
この重合体10重量部をシクロへキサノン90重量部に
溶解し、回転塗布機を用いて親水化処理が施されたアル
ミ板上に塗布、乾燥した。このようにして得られた樹脂
膜に、濃度がl段階につき0.15の増分で変化するグ
レースケール(富士写真フイルム(株)製「富士ステッ
プガイドP」)を重ね、光源として2kW超高圧水銀ラ
ンプ((株)オーク製作所製「ジェットプリンターJ
P−2 0 0 0EXJ )を用いてiooカウント
露光した。この試料を常法に従いシクロヘキサノンで現
像、染色し不溶化段数を求めた。結果を表に示す。数が
大きい程感度が高いことを示す。10 parts by weight of this polymer was dissolved in 90 parts by weight of cyclohexanone, and the solution was coated on an aluminum plate that had been subjected to a hydrophilic treatment using a rotary coater and dried. A gray scale whose density changes in increments of 0.15 per l step (Fuji Step Guide P, manufactured by Fuji Photo Film Co., Ltd.) was overlaid on the resin film thus obtained, and a 2kW ultra-high pressure mercury was used as a light source. Lamp (manufactured by Oak Seisakusho Co., Ltd. "Jet Printer J"
P-2000EXJ) was used for ioo count exposure. This sample was developed and stained with cyclohexanone according to a conventional method, and the number of insolubilization stages was determined. The results are shown in the table. The larger the number, the higher the sensitivity.
実施例2
2−(4−ジエチルアミノシンナモイルオキシ)エチル
メタクリレート10.7重量部、2−(4−シアノシン
ナモイルオキシ)エチルメタクリレート9.3重量部、
テトラヒド口フラン80重量部及び2,2′−アゾビス
(2,4−ジメチルバレ口ニトリル)0.02重量部を
混合し、実施例lと同様の条件で反応して黄色粉末状固
体を得た。GPCによる分子量測定で、数平均分子量は
33100と求められた。この重合体を用いて実施例l
と同様の試料作或、評価を行った。結果を表に示す。Example 2 10.7 parts by weight of 2-(4-diethylaminocinnamoyloxy)ethyl methacrylate, 9.3 parts by weight of 2-(4-cyanocinnamoyloxy)ethyl methacrylate,
80 parts by weight of tetrahydrofuran and 0.02 parts by weight of 2,2'-azobis(2,4-dimethylvalenitrile) were mixed and reacted under the same conditions as in Example 1 to obtain a yellow powdery solid. The number average molecular weight was determined to be 33,100 by molecular weight measurement using GPC. Example 1 Using this polymer
Samples were prepared and evaluated in the same manner as described above. The results are shown in the table.
比較例1
2−(4−−ジエチルアミノシンナモイルオキシ)エチ
ルメタクリレートを実施例lと同様の条件で重合させ単
独重合体を合或した。GPCにより数平均分子量は14
500と求められた。この重合体を用いて実施例lと同
様の試料作成、評価を行った。結果を表に示す。Comparative Example 1 2-(4-diethylaminocinnamoyloxy)ethyl methacrylate was polymerized under the same conditions as in Example 1 to synthesize a homopolymer. The number average molecular weight is 14 by GPC.
I was asked for 500. Using this polymer, samples were prepared and evaluated in the same manner as in Example 1. The results are shown in the table.
比較例2
2−(4−トリフルオ口メチルシンナモイルオキシ)エ
チルメタクリレートを実施例1と同様の条件で重合させ
単独重合体を合成した。GPCにより数平均分子量は2
5600と求められた。この重合体を用いて実施例1と
同様の試料作成、評価を行った。結果を表に示す。Comparative Example 2 2-(4-trifluoromethylcinnamoyloxy)ethyl methacrylate was polymerized under the same conditions as in Example 1 to synthesize a homopolymer. The number average molecular weight was determined by GPC to be 2.
5600 was requested. Using this polymer, samples were prepared and evaluated in the same manner as in Example 1. The results are shown in the table.
比較例3
2−(4−シアノシンナモイルオキシ)エチルメタクリ
レートを実施例1と同様の条件で重合させ単独重合体を
合成した。GPCにより数平均分子量は23200と求
められた。この重合体を用いて実施例1と同様の試料作
或、評価を行った。Comparative Example 3 2-(4-cyanocinnamoyloxy)ethyl methacrylate was polymerized under the same conditions as in Example 1 to synthesize a homopolymer. The number average molecular weight was determined to be 23,200 by GPC. Using this polymer, samples were prepared and evaluated in the same manner as in Example 1.
結果を表に示す。The results are shown in the table.
比較例4
比較例l、2で合成した単独重合体を5重量部ずつとシ
クロヘキサノン90重量部を混合し溶液を調製した。こ
れを用いて実施例1と同様の試料作或、評価を行った。Comparative Example 4 5 parts by weight of each of the homopolymers synthesized in Comparative Examples 1 and 2 and 90 parts by weight of cyclohexanone were mixed to prepare a solution. Using this, samples were prepared and evaluated in the same manner as in Example 1.
結果を表に示す。The results are shown in the table.
比較例5
゛比較例lで合成した単独重合体を5.4重量部、比較
例3で合成した単独重合体を4.6重量部及びシクロヘ
キサノン90重量部を混合し溶液を調製した。これを用
いて実施例lと同様の試料作成、評価を行った。結果を
表に示す。Comparative Example 5 5.4 parts by weight of the homopolymer synthesized in Comparative Example 1, 4.6 parts by weight of the homopolymer synthesized in Comparative Example 3, and 90 parts by weight of cyclohexanone were mixed to prepare a solution. Using this, samples were prepared and evaluated in the same manner as in Example 1. The results are shown in the table.
表
〔発明の効果〕
本発明の感光性樹脂組成物は光反応性が高く高感度であ
り、また2種以上の単独重合体の混合の場合より高感度
であり、かつ、相溶性の心配をする必要がないので、フ
ォトレジスト、印刷版等の用途に非常に有用である。Table [Effects of the Invention] The photosensitive resin composition of the present invention has high photoreactivity and high sensitivity, and is also more sensitive than a mixture of two or more homopolymers, and does not have to worry about compatibility. Since there is no need to do this, it is very useful for applications such as photoresists and printing plates.
Claims (1)
をβ位に有するアクリロイル基、及び(B)1つ以上の
電子吸引性基で置換されたアリール基をβ位に有するア
クリロイル基を共に構成単位として含む重合体を主成分
とする感光性樹脂組成物(A) an acryloyl group having an aryl group substituted with one or more electron-donating groups at the β-position, and (B) an acryloyl group having an aryl group substituted with one or more electron-withdrawing groups at the β-position A photosensitive resin composition whose main component is a polymer containing as a constituent unit
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23020689A JPH0392860A (en) | 1989-09-05 | 1989-09-05 | Photosensitive resin composition |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23020689A JPH0392860A (en) | 1989-09-05 | 1989-09-05 | Photosensitive resin composition |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0392860A true JPH0392860A (en) | 1991-04-18 |
Family
ID=16904237
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP23020689A Pending JPH0392860A (en) | 1989-09-05 | 1989-09-05 | Photosensitive resin composition |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0392860A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012515228A (en) * | 2009-01-12 | 2012-07-05 | エルジー・ケム・リミテッド | Norbornene-based polymer containing photoreactive functional group having halogen-based substituent, method for producing the same, and alignment film using the same |
JP2013533350A (en) * | 2010-07-07 | 2013-08-22 | エルジー・ケム・リミテッド | Photoreactive norbornene copolymer, method for producing the same, and alignment film including the same |
WO2014035203A1 (en) * | 2012-08-31 | 2014-03-06 | 주식회사 엘지화학 | Styryl-based compound, coloring material comprising the styryl-based compound, photosensitive resin composition comprising the coloring material, photoresist material prepared from the photosensitive resin composition, color filter comprising the photoresist material, and display device comprising the color filter |
JP2016196441A (en) * | 2015-04-06 | 2016-11-24 | Jsr株式会社 | Compound having specific structure and photosensitive composition comprising the same |
-
1989
- 1989-09-05 JP JP23020689A patent/JPH0392860A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012515228A (en) * | 2009-01-12 | 2012-07-05 | エルジー・ケム・リミテッド | Norbornene-based polymer containing photoreactive functional group having halogen-based substituent, method for producing the same, and alignment film using the same |
JP2013533350A (en) * | 2010-07-07 | 2013-08-22 | エルジー・ケム・リミテッド | Photoreactive norbornene copolymer, method for producing the same, and alignment film including the same |
WO2014035203A1 (en) * | 2012-08-31 | 2014-03-06 | 주식회사 엘지화학 | Styryl-based compound, coloring material comprising the styryl-based compound, photosensitive resin composition comprising the coloring material, photoresist material prepared from the photosensitive resin composition, color filter comprising the photoresist material, and display device comprising the color filter |
CN104768925A (en) * | 2012-08-31 | 2015-07-08 | 株式会社Lg化学 | Styryl-based compound, coloring material comprising the styryl-based compound, photosensitive resin composition comprising the coloring material, photoresist material prepared from the photosensitive resin composition, color filter comprising the photoresist material, and display device comprising the color filter |
JP2016196441A (en) * | 2015-04-06 | 2016-11-24 | Jsr株式会社 | Compound having specific structure and photosensitive composition comprising the same |
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