JPH0392057U - - Google Patents
Info
- Publication number
- JPH0392057U JPH0392057U JP15148489U JP15148489U JPH0392057U JP H0392057 U JPH0392057 U JP H0392057U JP 15148489 U JP15148489 U JP 15148489U JP 15148489 U JP15148489 U JP 15148489U JP H0392057 U JPH0392057 U JP H0392057U
- Authority
- JP
- Japan
- Prior art keywords
- insulating film
- pattern wiring
- thin film
- electrode
- light receiving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010408 film Substances 0.000 claims description 4
- 239000010409 thin film Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 1
Description
第1図は本考案の一実施例の薄膜受光装置部品
を示す図であり、aは分割パターンと開口部を示
す図、bは断面図、cはパターン配線を示す図、
dは断面図である。
1……ガラス基板、2……透明電極、3……半
導体薄膜、4……電極、5……絶縁膜、6……パ
ターン配線、8……開口部。
FIG. 1 is a diagram showing parts of a thin film light receiving device according to an embodiment of the present invention, in which a is a diagram showing a dividing pattern and an opening, b is a cross-sectional diagram, and c is a diagram showing pattern wiring;
d is a cross-sectional view. DESCRIPTION OF SYMBOLS 1... Glass substrate, 2... Transparent electrode, 3... Semiconductor thin film, 4... Electrode, 5... Insulating film, 6... Pattern wiring, 8... Opening.
Claims (1)
、及びこれらを覆う絶縁膜を有し、該絶縁膜上に
パターン配線を有し、上記絶縁膜に設けられた開
口部で上記電極と上記パターン配線とが接続され
ていることを特徴とする薄膜受光装置部品。 It has a semiconductor thin film and an electrode formed on a transparent insulating substrate, an insulating film covering them, a pattern wiring on the insulating film, and an opening provided in the insulating film to connect the electrode and the pattern wiring. A thin film light receiving device component, characterized in that:
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15148489U JPH0392057U (en) | 1989-12-29 | 1989-12-29 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15148489U JPH0392057U (en) | 1989-12-29 | 1989-12-29 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0392057U true JPH0392057U (en) | 1991-09-19 |
Family
ID=31697782
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15148489U Pending JPH0392057U (en) | 1989-12-29 | 1989-12-29 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0392057U (en) |
-
1989
- 1989-12-29 JP JP15148489U patent/JPH0392057U/ja active Pending