JPH0388255U - - Google Patents
Info
- Publication number
- JPH0388255U JPH0388255U JP14981189U JP14981189U JPH0388255U JP H0388255 U JPH0388255 U JP H0388255U JP 14981189 U JP14981189 U JP 14981189U JP 14981189 U JP14981189 U JP 14981189U JP H0388255 U JPH0388255 U JP H0388255U
- Authority
- JP
- Japan
- Prior art keywords
- clamper
- semiconductor wafer
- wafer
- wafer holder
- disk
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 5
- 238000010586 diagram Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14981189U JPH0388255U (cs) | 1989-12-25 | 1989-12-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14981189U JPH0388255U (cs) | 1989-12-25 | 1989-12-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0388255U true JPH0388255U (cs) | 1991-09-10 |
Family
ID=31696186
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14981189U Pending JPH0388255U (cs) | 1989-12-25 | 1989-12-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0388255U (cs) |
-
1989
- 1989-12-25 JP JP14981189U patent/JPH0388255U/ja active Pending
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