JPH0387559U - - Google Patents

Info

Publication number
JPH0387559U
JPH0387559U JP14492389U JP14492389U JPH0387559U JP H0387559 U JPH0387559 U JP H0387559U JP 14492389 U JP14492389 U JP 14492389U JP 14492389 U JP14492389 U JP 14492389U JP H0387559 U JPH0387559 U JP H0387559U
Authority
JP
Japan
Prior art keywords
block
workpiece
pressure
ring
polishing device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14492389U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14492389U priority Critical patent/JPH0387559U/ja
Publication of JPH0387559U publication Critical patent/JPH0387559U/ja
Pending legal-status Critical Current

Links

JP14492389U 1989-12-18 1989-12-18 Pending JPH0387559U (US20080094685A1-20080424-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14492389U JPH0387559U (US20080094685A1-20080424-C00004.png) 1989-12-18 1989-12-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14492389U JPH0387559U (US20080094685A1-20080424-C00004.png) 1989-12-18 1989-12-18

Publications (1)

Publication Number Publication Date
JPH0387559U true JPH0387559U (US20080094685A1-20080424-C00004.png) 1991-09-05

Family

ID=31691594

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14492389U Pending JPH0387559U (US20080094685A1-20080424-C00004.png) 1989-12-18 1989-12-18

Country Status (1)

Country Link
JP (1) JPH0387559U (US20080094685A1-20080424-C00004.png)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000354959A (ja) * 1999-06-10 2000-12-26 Applied Materials Inc 基板に圧力を加えて保持するためのキャリアヘッド
JP2001334454A (ja) * 2000-05-29 2001-12-04 Shin Etsu Handotai Co Ltd ワークの研磨方法並びにワーク保持板及びワーク研磨装置
JP2007276110A (ja) * 2001-05-29 2007-10-25 Ebara Corp 基板キャリアシステムおよび基板を研磨する方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000354959A (ja) * 1999-06-10 2000-12-26 Applied Materials Inc 基板に圧力を加えて保持するためのキャリアヘッド
JP2001334454A (ja) * 2000-05-29 2001-12-04 Shin Etsu Handotai Co Ltd ワークの研磨方法並びにワーク保持板及びワーク研磨装置
JP2007276110A (ja) * 2001-05-29 2007-10-25 Ebara Corp 基板キャリアシステムおよび基板を研磨する方法
JP4660505B2 (ja) * 2001-05-29 2011-03-30 株式会社荏原製作所 基板キャリアシステムおよび基板を研磨する方法

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