JPH0387559U - - Google Patents
Info
- Publication number
- JPH0387559U JPH0387559U JP14492389U JP14492389U JPH0387559U JP H0387559 U JPH0387559 U JP H0387559U JP 14492389 U JP14492389 U JP 14492389U JP 14492389 U JP14492389 U JP 14492389U JP H0387559 U JPH0387559 U JP H0387559U
- Authority
- JP
- Japan
- Prior art keywords
- block
- workpiece
- pressure
- ring
- polishing device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 7
- 239000000463 material Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14492389U JPH0387559U (US20080094685A1-20080424-C00004.png) | 1989-12-18 | 1989-12-18 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14492389U JPH0387559U (US20080094685A1-20080424-C00004.png) | 1989-12-18 | 1989-12-18 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0387559U true JPH0387559U (US20080094685A1-20080424-C00004.png) | 1991-09-05 |
Family
ID=31691594
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14492389U Pending JPH0387559U (US20080094685A1-20080424-C00004.png) | 1989-12-18 | 1989-12-18 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0387559U (US20080094685A1-20080424-C00004.png) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000354959A (ja) * | 1999-06-10 | 2000-12-26 | Applied Materials Inc | 基板に圧力を加えて保持するためのキャリアヘッド |
JP2001334454A (ja) * | 2000-05-29 | 2001-12-04 | Shin Etsu Handotai Co Ltd | ワークの研磨方法並びにワーク保持板及びワーク研磨装置 |
JP2007276110A (ja) * | 2001-05-29 | 2007-10-25 | Ebara Corp | 基板キャリアシステムおよび基板を研磨する方法 |
-
1989
- 1989-12-18 JP JP14492389U patent/JPH0387559U/ja active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000354959A (ja) * | 1999-06-10 | 2000-12-26 | Applied Materials Inc | 基板に圧力を加えて保持するためのキャリアヘッド |
JP2001334454A (ja) * | 2000-05-29 | 2001-12-04 | Shin Etsu Handotai Co Ltd | ワークの研磨方法並びにワーク保持板及びワーク研磨装置 |
JP2007276110A (ja) * | 2001-05-29 | 2007-10-25 | Ebara Corp | 基板キャリアシステムおよび基板を研磨する方法 |
JP4660505B2 (ja) * | 2001-05-29 | 2011-03-30 | 株式会社荏原製作所 | 基板キャリアシステムおよび基板を研磨する方法 |