JPH0381730A - Manufacture of liquid crystal display panel - Google Patents

Manufacture of liquid crystal display panel

Info

Publication number
JPH0381730A
JPH0381730A JP21912989A JP21912989A JPH0381730A JP H0381730 A JPH0381730 A JP H0381730A JP 21912989 A JP21912989 A JP 21912989A JP 21912989 A JP21912989 A JP 21912989A JP H0381730 A JPH0381730 A JP H0381730A
Authority
JP
Japan
Prior art keywords
rubbing
substrate
cleaning
treatment
scrubbing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP21912989A
Other languages
Japanese (ja)
Inventor
Yoshiro Koike
善郎 小池
Yusuke Nakagawa
裕介 中川
Seiji Tanuma
清治 田沼
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP21912989A priority Critical patent/JPH0381730A/en
Publication of JPH0381730A publication Critical patent/JPH0381730A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To clean the surfaces of oriented films without adversely affecting an orientation treatment by subjecting the surfaces of the oriented films on substrates to a rubbing treatment, then subjecting the surfaces of the oriented film to a scrubbing treatment in the same directions as the rubbing directions while making washing liquid flow. CONSTITUTION:The oriented film is formed on the substrates 1. Since the twisting angle is 90 deg., the rubbing direction of the common substrate is intersected orthogonally with that of the segment substrate facing this substrate. The rubbing directions intersect at 45 deg. with the side AB of the substrate 1. The directions face C from the vertex A of the common substrate and conversely face A from the direction C of the segment substrate in either case. After the surfaces of the oriented films are subjected to the rubbing treatment, the surfaces are subjected to the scrubbing treatment in the same direction as the rubbing directions while making the washing water flow by using a washing brush 3.

Description

【発明の詳細な説明】 〔概 要〕 液晶表示パネルの製造方法、特にラビング処理およびそ
の後の洗浄工程に関し、 配向処理工程においてゴξが付着することによる歩留り
低下を防止することを目的・とし、基板上に形成した配
向膜表面にラビング処理を施した後、該配向膜表面を、
洗浄液を流しながら前記ラビング処理方向と同一方向に
スクラブ処理を施す工程を含む構成、及び、基板上に形
成した配向膜表面を、洗浄液を流しながら所定方向にス
クラブ処理を施すことにより、前記配向膜表面の洗浄と
配向処理とを同時に施す工程を含む構成とする。
[Detailed Description of the Invention] [Summary] The purpose of this invention is to prevent a decrease in yield due to adhesion of rubber ξ in the alignment treatment process in a method for manufacturing a liquid crystal display panel, particularly in the rubbing treatment and subsequent cleaning process. After performing a rubbing treatment on the surface of the alignment film formed on the substrate, the surface of the alignment film is
A configuration including a step of performing a scrubbing process in the same direction as the rubbing process direction while flowing a cleaning liquid, and a step of scrubbing the surface of the alignment film formed on the substrate in a predetermined direction while flowing the cleaning liquid, thereby removing the alignment film. The structure includes a step of simultaneously performing surface cleaning and orientation treatment.

〔産業上の利用分野〕[Industrial application field]

本発明は、液晶表示パネルの製造方法、特にラビング処
理およびその後の洗浄工程に関する。
The present invention relates to a method for manufacturing a liquid crystal display panel, and particularly to a rubbing treatment and subsequent cleaning process.

現在、液晶の配向処理方法として広く適用されているラ
ビング処理法では、基板表面にゴξが付着する等の問題
があり、より清浄な配向処理方法あるいは配向処理に悪
影響を与えない効果的な洗浄方法の出現を強く望まれて
いる。
Currently, the rubbing method, which is widely used as an alignment treatment method for liquid crystals, has problems such as the adhesion of rubber onto the substrate surface. The emergence of a method is strongly desired.

〔従来の技術〕[Conventional technology]

従来の配向膜のラビングおよびその後の洗浄方法は、ま
ず最初に、レーヨン、ナイロン等の繊維よりなるラビン
グロールにより、配向膜表面を一方向に配向処理し、そ
の後にウェット洗浄を行なうのが一般的である。
Conventional alignment film rubbing and subsequent cleaning methods generally involve first aligning the alignment film surface in one direction using a rubbing roll made of fibers such as rayon or nylon, and then performing wet cleaning. It is.

ここで接触方式の洗浄方法を用いず、非接触方式のウェ
ット洗浄を行なうのは、接触方式の洗浄を行なうと、配
向膜表面をこするため、前工程のラビング処理で規定し
た配向方向を乱してしまうためである。
The reason why we perform non-contact wet cleaning instead of using a contact cleaning method is that contact cleaning scrapes the surface of the alignment film, which disturbs the alignment direction specified in the rubbing process in the previous process. This is because you end up doing it.

従って、このウェット洗浄法としては、ラビング処理に
よる配向処理に悪影響を及ぼさないように、エアーによ
るバブリング洗浄、超音波洗浄などの非接触方式の洗浄
方法を用いている。
Therefore, as this wet cleaning method, a non-contact cleaning method such as air bubbling cleaning or ultrasonic cleaning is used so as not to adversely affect the alignment treatment by rubbing treatment.

上述したような非接触型の洗浄法は、基板に付着したゴ
ミの除去率は、接触型の洗浄より一般に劣ることが知ら
れている。
It is known that the above-mentioned non-contact type cleaning method is generally inferior to the contact type cleaning method in terms of removal rate of dust attached to the substrate.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

従って従来の製造工程では、配向処理時に基板表面に付
着したゴミによる短絡、ギャップ厚異常等の不良が発生
し、しかもそれは製造現場および製造プロセスの清浄度
に対応している。
Therefore, in the conventional manufacturing process, defects such as short circuits and gap thickness abnormalities occur due to dust adhering to the substrate surface during the alignment process, and these problems also depend on the cleanliness of the manufacturing site and manufacturing process.

本発明は、配向膜表面を、配向処理に悪影響を及ぼすこ
となく接触方式の洗浄を可能にすることを目的とする。
An object of the present invention is to enable contact cleaning of the surface of an alignment film without adversely affecting alignment processing.

〔課題を解決するための手段〕[Means to solve the problem]

本発明を第1図(a)、 (b)により説明する。 The present invention will be explained with reference to FIGS. 1(a) and 1(b).

同図(a)に示すように、基板1上に形成した配向膜表
面に、矢印Iで示す方向にラビング処理を施したとする
As shown in FIG. 2A, it is assumed that the surface of the alignment film formed on the substrate 1 is subjected to rubbing treatment in the direction shown by arrow I.

ラビング処理を終了した後の洗浄工程では、第1図(b
)に示す如く、水のような洗浄液を流しながら、この配
向膜表面に上記ラビング処理と同一方向にスクラブ処理
を行なう。
In the cleaning process after finishing the rubbing process, the cleaning process shown in Fig. 1 (b
), a scrubbing process is performed on the surface of this alignment film in the same direction as the above-mentioned rubbing process while flowing a cleaning liquid such as water.

スクラブ処理とは、ブラシや布、或いはスポンジのよう
なもので、配向膜表面をこすることを言う。本発明では
、スクラブ処理でこする方向を、前述のラビング処理方
向と同一とする。
The scrubbing process refers to rubbing the surface of the alignment film with something like a brush, cloth, or sponge. In the present invention, the direction of scrubbing is the same as the above-mentioned rubbing direction.

それには、洗浄ロール2の表面に例えばスポンジを巻き
つけ、これを洗浄ブラシ3とし、洗浄ロール2の軸方向
に直交する方向を上記ラビング処理方向(図の矢印■〉
と−敗させ、この状態で上記洗浄ロール2を矢印■の方
向に回転させて・上記回転するスポンジで配向膜表面を
スクラブ処理する。
To do this, wrap a sponge, for example, around the surface of the cleaning roll 2, use this as the cleaning brush 3, and point the direction perpendicular to the axial direction of the cleaning roll 2 in the rubbing direction (arrow ■ in the figure).
In this state, the cleaning roll 2 is rotated in the direction of the arrow (2), and the surface of the alignment film is scrubbed with the rotating sponge.

これでスポンジ3が配向膜表面をこする方向は、ラビン
グの方向と一致する。そこで、基板1を洗浄ロール2に
対して、矢印■の方向に相対的に移動させる。
The direction in which the sponge 3 rubs the alignment film surface now matches the rubbing direction. Therefore, the substrate 1 is moved relative to the cleaning roll 2 in the direction of the arrow (■).

このようにすると、配向膜表面に付着していたゴξは、
スポンジ3でこすりとられ、流水とともに流れ去り、し
かもスポンジ3でこする方向は、矢印■の方向となり、
ラビング方向(矢印■)と一致する。
In this way, the rubber ξ attached to the surface of the alignment film is
It is rubbed off with the sponge 3 and washed away with the running water, and the direction of rubbing with the sponge 3 is the direction of the arrow ■.
Matches the rubbing direction (arrow ■).

〔作 用〕[For production]

上述した如く、スクラブ処理は配向膜表面をこするので
、ラビングを施したのと同じように配向方向を規定する
効果を有する。しかし本発明では、上述したようにスク
ラブ処理の方向をラビング処理の方向を一致させたので
、スクラブ処理で規定される配向方向はラビング処理に
より規定される配向方向と一致し、ラビングによる配向
処理に悪影響を及ぼすことはない。
As described above, since the scrubbing process rubs the surface of the alignment film, it has the same effect of defining the alignment direction as rubbing. However, in the present invention, as described above, the direction of the scrubbing process is made to match the direction of the rubbing process, so the alignment direction defined by the scrubbing process matches the alignment direction defined by the rubbing process, and the orientation process by rubbing There will be no adverse effects.

従って、本発明によれば、配向処理に何ら影響をおよぼ
すことなく、付着ゴくの除去を効果的に行なうことがで
き、結果として、付着ゴξによる不良を著しく低減する
ことができる。
Therefore, according to the present invention, the adhered gobs can be effectively removed without any influence on the alignment process, and as a result, defects caused by the adhered gobs ξ can be significantly reduced.

〔実 施 例〕〔Example〕

以下本発明の一実施例を図面により説明する。 An embodiment of the present invention will be described below with reference to the drawings.

第2図(a)〜(d)に本発明の一実施例での配向処理
方向とスクラブ処理方向を示す。本実施例は通常のTN
型液晶(ツイスト角90’)を用いた単純マトリクスパ
ネルに適用した例であって、第2図(a)、 (C1の
矢印■および■はラビング処理方向である。
FIGS. 2(a) to 2(d) show the orientation processing direction and scrubbing processing direction in one embodiment of the present invention. This example is a normal TN
This is an example in which the present invention is applied to a simple matrix panel using a type liquid crystal (twist angle 90'), and in FIG.

本実施例ではツイスト角が90°であるから、コモン基
板とこれに対向するセグメント基板の上記ラビング方向
は直交する。上記第2図(a)、 (b)では、互いに
相対向する配向膜が形成された面を上側に描いであるの
で、ラビング方向は図示したように、いずれも基板lの
辺ABと45°で交わり・コモン基板では頂点AからC
の方に向き、セグメント基板では逆にCの方からAの方
に向かう向きとなる。
In this embodiment, since the twist angle is 90°, the rubbing directions of the common board and the segment board facing the common board are perpendicular to each other. In FIGS. 2(a) and 2(b) above, the surfaces on which the alignment films facing each other are formed are drawn upward, so the rubbing direction is 45° with respect to the side AB of the substrate l as shown. Intersect at ・In the common board, vertices A to C
On the segment board, the direction is conversely from C to A.

本実施例は基板lとして300X 250x 1.1m
mのものを用い、配向膜は、ポリイミド系の樹脂を転写
印刷法により、0.1 μmの厚さで形成した。
In this example, the substrate l is 300 x 250 x 1.1 m.
The alignment film was formed using a polyimide resin with a thickness of 0.1 μm by a transfer printing method.

ラビングに使用したロール材(ラビング材)はレーヨン
を用い、接触深さを400μmとした。スクラブ処理に
用いた洗浄ブラシ3としては、KANEBO製ベルタリ
ン材よりなるものを用いた。
The roll material (rubbing material) used for rubbing was rayon, and the contact depth was 400 μm. The cleaning brush 3 used in the scrubbing process was made of Bertalin material manufactured by KANEBO.

スクラブ洗浄装置には、基板が枚葉流れをするベルトコ
ンベアを用い、スクラブ用ロールをベルトコンベアの移
動方向(矢印■)に対して45°傾けたものとした。ま
た、スクラブ時には水シヤワーが連続的に基板上に施さ
れるようにしである。
The scrub cleaning device used a belt conveyor that allowed substrates to flow one by one, and the scrubbing roll was tilted at 45 degrees with respect to the moving direction (arrow ■) of the belt conveyor. Further, during scrubbing, a water shower is continuously applied to the substrate.

配向処理方向とほぼ同一な方向で基板面をこするために
は、基板lの移動スピードが洗浄ブラシ3の回転スピー
ドに比較し、無視できる程度であればよい。そこで本実
施例では、洗浄ロールの径を50mmとし、基板移動速
度5mm/s、ロール回転速度300r、p、mとし、
2度スクラブを行なった。
In order to scrub the substrate surface in substantially the same direction as the orientation processing direction, it is sufficient that the moving speed of the substrate 1 is negligible compared to the rotational speed of the cleaning brush 3. Therefore, in this example, the diameter of the cleaning roll is 50 mm, the substrate moving speed is 5 mm/s, the roll rotation speed is 300 r, p, m,
I scrubbed twice.

本実施例の効果を、従来方法で作製したものと比較して
第3図に示す。比較試料は、イソプロピルアルコールに
よる超音波洗浄を10分×2度行なったものである。こ
の従来方法で作製した試料と、本実施例で作製した液晶
表示パネルとも、ギャップ厚は5μmで、10パネルを
10ツトとして、各60ツトずつ作製した。
The effects of this example are shown in FIG. 3 in comparison with those produced by the conventional method. The comparative sample was subjected to ultrasonic cleaning using isopropyl alcohol twice for 10 minutes. For both the sample manufactured by this conventional method and the liquid crystal display panel manufactured in this example, the gap thickness was 5 μm, and 10 panels were each manufactured in 60 pieces.

これを上下基板間の短絡について評価したところ、本実
施例では白丸で示すように、合計60枚のパネル中、不
良は僅か1枚であったのに対し、従来方法で作製した試
料では、黒丸で示す如く、不良は各ロフトとも20%前
後発生し、全体で11枚が不良となった。
When this was evaluated for short circuits between the upper and lower substrates, in this example, only one out of a total of 60 panels was defective, as shown by the white circles, whereas in the sample manufactured using the conventional method, there was a black circle. As shown in the figure, defects occurred at around 20% for each loft, and a total of 11 sheets were defective.

このように 本発明の効果は著しく、また配向状態につ
いては、本実施例と従来方法との間で、全く差は認めら
れなかった。
As described above, the effect of the present invention is remarkable, and no difference was observed between the present example and the conventional method in terms of the orientation state.

上記一実施例ではラビング処理の後、スクラブ処理によ
る洗浄を行なったが、これに変えて、スクラブ処理自体
が配向処理能力を有することを利用して、特にラビング
処理を行なわずにスクラブ処理のみを行うようにするこ
ともできる。
In the above example, cleaning was performed by scrubbing after the rubbing, but instead of this, by taking advantage of the fact that the scrubbing itself has alignment processing ability, only the scrubbing was performed without any particular rubbing. You can also do it.

この場合には、スクラブ処理が、配向処理と洗浄とを兼
ねることとなる。
In this case, the scrubbing process serves as both an alignment process and a cleaning process.

以上のべた如く本発明では、配向処理に影響を及ぼすこ
とでなく、接触方式の洗浄方法であるスクラブ処理が可
能となり、ゴξを効果的に除去することができた。
As described above, in the present invention, the scrubbing process, which is a contact type cleaning method, can be performed without affecting the alignment process, and the gore ξ can be effectively removed.

〔発明の効果〕〔Effect of the invention〕

以上説明した如く本発明によれば、付着したゴミを配向
処理に悪影響を及ぼすことなく、効果的に除去すること
が可能となり、清浄度の高い配向処理工程が可能となり
、液晶表示パネルの製造歩留りが向上する。
As explained above, according to the present invention, it is possible to effectively remove attached dust without adversely affecting the alignment process, enabling a highly clean alignment process, and improving the manufacturing yield of liquid crystal display panels. will improve.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の原理説明図、 第2図は本発明の詳細な説明図、 第3図は本発明の効果説明図である。 図において、lは基板、2は洗浄ロール、3は洗浄ブラ
シ、1.IV、Vはラビング処理方向、■は洗浄ロール
の回転方向、■は基板の移動方向を示す。 手擺明ハ原社欽明開 (Ql (Q 半4をロ月百−史、m窪利を紀口R図 纂2図
FIG. 1 is an explanatory diagram of the principle of the present invention, FIG. 2 is a detailed explanatory diagram of the present invention, and FIG. 3 is an explanatory diagram of the effects of the present invention. In the figure, l is a substrate, 2 is a cleaning roll, 3 is a cleaning brush, 1. IV and V indicate the rubbing treatment direction, ■ indicates the rotation direction of the cleaning roll, and ■ indicates the moving direction of the substrate. The hand-printed version of the handbook was written by Harasha Kinmeikai (Ql).

Claims (2)

【特許請求の範囲】[Claims] (1)基板上に形成した配向膜表面にラビング処理を施
した後、該配向膜表面を、洗浄液を流しながら前記ラビ
ング処理方向と同一方向にスクラブ処理を施す工程を含
むことを特徴とする液晶表示パネルの製造方法。
(1) A liquid crystal display comprising the step of performing a rubbing process on the surface of an alignment film formed on a substrate, and then performing a scrubbing process on the surface of the alignment film in the same direction as the rubbing process direction while flowing a cleaning liquid. A method of manufacturing a display panel.
(2)基板上に形成した配向膜表面を、洗浄液を流しな
がら所定方向にスクラブ処理を施すことにより、前記配
向膜表面の洗浄と配向処理とを同時に施す工程を含むこ
とを特徴とする液晶表示パネルの製造方法。
(2) A liquid crystal display characterized by including a step of simultaneously performing cleaning and alignment treatment on the surface of the alignment film formed on the substrate by scrubbing the surface of the alignment film formed on the substrate in a predetermined direction while flowing a cleaning liquid. How to manufacture panels.
JP21912989A 1989-08-25 1989-08-25 Manufacture of liquid crystal display panel Pending JPH0381730A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21912989A JPH0381730A (en) 1989-08-25 1989-08-25 Manufacture of liquid crystal display panel

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21912989A JPH0381730A (en) 1989-08-25 1989-08-25 Manufacture of liquid crystal display panel

Publications (1)

Publication Number Publication Date
JPH0381730A true JPH0381730A (en) 1991-04-08

Family

ID=16730695

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21912989A Pending JPH0381730A (en) 1989-08-25 1989-08-25 Manufacture of liquid crystal display panel

Country Status (1)

Country Link
JP (1) JPH0381730A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6007638A (en) * 1996-02-13 1999-12-28 Lion Corporation Detergent composition and cleaning method using the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6007638A (en) * 1996-02-13 1999-12-28 Lion Corporation Detergent composition and cleaning method using the same

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