JPS6455530A - Production of liquid crystal display panel - Google Patents

Abstract

PURPOSE:To prevent the intrusion of foreign matter into a cell and to eliminate the defect by the foreign matter by subjecting a substrate to dry process rubbing, then to wet process cleaning by cleaning water having a flow velocity in the same direction as the rubbing direction and brush. CONSTITUTION:The substrate 10 on which polyimide is coated as an oriented film is sucked to a table 11 and is subjected to the dry process rubbing by a revolving roller 5 on which a rubbing cloth 13 is wound. The substrate 10 is further moved and is cleaned in the same direction as the rubbing direction by the water 18 ejected from a cleaning nozzle 17. The substrate is also cleaned by the brush 19. The substrate is thereafter subjected to water draining by the clean air from a blow nozzle 20 and is dried by a heater 21. The substrate is subjected to the thorough cleaning and dust removal after the rubbing treatment in such a manner and, therefore, the orientation of the liquid crystal is not disturbed and the static electricity in the substrate is removed. The intrusion of the foreign matter into the cell is thus prevented and the generation of the defect by the foreign matter is prevented.