JP3272801B2 - Manufacturing method of substrate for liquid crystal panel - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a liquid crystal panel substrate used for a liquid crystal panel used for a liquid crystal display device or an optical shutter.

[0002]

2. Description of the Related Art A conventional method of manufacturing a substrate for a liquid crystal panel is as follows.
As shown in FIG. 2, after forming a transparent electrode on a glass substrate, an alignment film such as polyimide or polyvinyl alcohol is applied.
After hardening, the orientation is imparted by rubbing (rubbing) the surface of the alignment film using a cloth such as nylon or rayon.

Then, as a cleaning method after rubbing, foreign substances on the substrate surface are cleaned by wet cleaning the substrate with pure water or isopropyl alcohol, or by blowing the substrate with nitrogen gas or the like as dry cleaning. Remove.

Then, in order to make a liquid crystal panel ,
As shown in FIG. 2, the spacers are scattered and printed with a seal, the two substrates kept at a constant interval are bonded together, the seal is hardened, and after vacuum degassing, the liquid crystal is sealed between them, and the injection port is filled. Was sealed and a polarizing plate was attached.

[0005]

However, the conventional dry cleaning has a problem that foreign substances and dirt on the substrate surface adhered during rubbing cannot be sufficiently removed.

[0006] In the wet cleaning, there is a problem that the pressure is applied when water or a cleaning agent first comes into contact with the substrate, so that the orientation is disturbed or spots are generated in that portion.

The present invention provides a method for manufacturing a substrate for a liquid crystal panel having good display quality, free from dust and foreign matter, and free from alignment disturbance and spots, in consideration of the problems of the conventional cleaning process as described above. The purpose is to:

[0008]

Means for Solving the Problems The present invention is subjected to rubbing treatment before Symbol alignment film of the substrate on which the alignment film for liquid crystal panels are formed, after followed by the substrate kept in the steam bath, continued
And performing a single-wafer wet cleaning.

[0009]

According to the present invention, as cleaning after rubbing, the substrate is first held in a steam bath so that alignment disorder and spots do not occur, and a single wafer wet cleaning is performed next. As a result, dust and foreign matter can be removed, and a liquid crystal panel with good display quality can be obtained using the substrate.

[0010]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 shows an embodiment of the present invention. A transparent electrode film (ITO film) 2 on two transparent glass substrates 1 and 8;
7 was formed. After the glass substrates 1 and 8 are washed, polyimide is applied thereon as alignment films 3 and 6, and then heat treatment is performed to cure the polyimide film, and then rubbing treatment is performed using a rubbing cloth made of rayon. Was given.

After holding this substrate in steam for 5 minutes,
As a wet cleaning, using a single wafer type pure water cleaning machine, shower cleaning, ultrasonic cleaning, and shower cleaning are sequentially performed, and then 110 ° C.
The substrate was dried by passing through a drying furnace.

Thereafter, SiO ₂ particles having a diameter of 6 μm are sprayed as a spacer 9 on the surface of the glass substrate 1 on which the alignment film 3 is provided, and the edge of the surface of the other glass substrate 8 on which the alignment film 6 is provided is provided. A sealing resin 4 was applied to the substrate, and both of the substrates 1 and 8 were bonded together so that the alignment films 3 and 6 faced each other, and heated to cure the sealing resin 4.

Thereafter, vacuum degassing was performed, a liquid crystal 5 was injected between the two glass substrates 1 and 8, the polarizing plates 10 and 11 were attached, a voltage was applied, and the alignment state and the like were examined.

As comparative examples, a panel was prepared by performing only wet cleaning without holding in steam after rubbing (Comparative Example 1), and a panel was performed by performing dry cleaning (blowing with nitrogen gas) (Comparative Example 2). The results are shown in (Table 1).

[0016]

[Table 1]

As is clear from Table 1, the panel subjected to the steam treatment before the single-wafer wet cleaning had no dust such as foreign matter and had good orientation, but the panel was subjected to only the wet cleaning. The orientation of the panel was poor, and foreign matter such as dust was confirmed on the dry-cleaned panel.

[0019] Incidentally, in the wet cleaning of the single wafer of Example water is used, such as surfactants and organic solvents may be used.

Further, the above embodiment is applied to the present invention have One in the case of two substrates, the present invention may be applied for only one of the substrates.

[0021]

As is apparent from the above description,
According to the present invention, it is possible to obtain a liquid crystal panel with good display quality, free from dust and foreign matter, and free from alignment disorder and spots.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view illustrating a configuration of a liquid crystal panel using a liquid crystal panel substrate according to a manufacturing method of the present invention.

FIG. 2 is a process chart showing a conventional method for manufacturing a liquid crystal panel including a liquid crystal panel substrate.

[Explanation of symbols]

 1,8 Glass substrate 2,7 Electrode 3,6 Alignment film 4 Seal resin 5 Liquid crystal 9 Spacer 10,11 Polarizer

────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Koshiro Mori 1006 Kazuma Kadoma, Osaka Prefecture Matsushita Electric Industrial Co., Ltd. (56) References JP-A-5-34652 (JP, A) JP-A-5- 13398 (JP, A) JP-A-4-204915 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) G02F 1/13 101

Claims (1)

(57) [Claims] 1. A substrate on which an alignment film for a liquid crystal panel is formed.
Subjected to a rubbing treatment of before Symbol alignment film, then the substrate
A method for manufacturing a substrate for a liquid crystal panel, comprising performing a single-wafer wet cleaning after holding the substrate in a steam bath.