JPH0380189A - ウエハ上の多結晶膜形成時における反り発生抑制方法 - Google Patents
ウエハ上の多結晶膜形成時における反り発生抑制方法Info
- Publication number
- JPH0380189A JPH0380189A JP21697789A JP21697789A JPH0380189A JP H0380189 A JPH0380189 A JP H0380189A JP 21697789 A JP21697789 A JP 21697789A JP 21697789 A JP21697789 A JP 21697789A JP H0380189 A JPH0380189 A JP H0380189A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- elastic body
- polycrystalline film
- annular
- during formation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 26
- 230000015572 biosynthetic process Effects 0.000 title claims description 4
- 230000002401 inhibitory effect Effects 0.000 title 1
- 239000011261 inert gas Substances 0.000 claims abstract description 7
- 238000003825 pressing Methods 0.000 claims abstract description 5
- 239000007921 spray Substances 0.000 claims description 16
- 238000005229 chemical vapour deposition Methods 0.000 claims description 5
- 230000002093 peripheral effect Effects 0.000 claims description 4
- 239000002245 particle Substances 0.000 abstract description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 7
- 229910052710 silicon Inorganic materials 0.000 abstract description 7
- 239000010703 silicon Substances 0.000 abstract description 7
- 238000010438 heat treatment Methods 0.000 abstract description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 7
- 229910052799 carbon Inorganic materials 0.000 description 7
- 239000000758 substrate Substances 0.000 description 7
- 239000013078 crystal Substances 0.000 description 6
- 238000007796 conventional method Methods 0.000 description 4
- 230000007547 defect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 241000257465 Echinoidea Species 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 235000009508 confectionery Nutrition 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21697789A JPH0380189A (ja) | 1989-08-23 | 1989-08-23 | ウエハ上の多結晶膜形成時における反り発生抑制方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21697789A JPH0380189A (ja) | 1989-08-23 | 1989-08-23 | ウエハ上の多結晶膜形成時における反り発生抑制方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0380189A true JPH0380189A (ja) | 1991-04-04 |
| JPH0513912B2 JPH0513912B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-02-23 |
Family
ID=16696882
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21697789A Granted JPH0380189A (ja) | 1989-08-23 | 1989-08-23 | ウエハ上の多結晶膜形成時における反り発生抑制方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0380189A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102828169A (zh) * | 2011-06-13 | 2012-12-19 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 一种载片托盘、托盘装置和结晶膜生长设备 |
| CN104726932A (zh) * | 2015-04-09 | 2015-06-24 | 江苏盎华光伏工程技术研究中心有限公司 | 采用籽晶引导的硅片制作设备及其控制方法 |
| CN108048903A (zh) * | 2016-02-03 | 2018-05-18 | 陈鸽 | 一种改变载气流向的引流装置 |
| CN110923427A (zh) * | 2019-10-29 | 2020-03-27 | 张家港宏昌钢板有限公司 | 一种方坯高温防脱碳装置 |
-
1989
- 1989-08-23 JP JP21697789A patent/JPH0380189A/ja active Granted
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102828169A (zh) * | 2011-06-13 | 2012-12-19 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 一种载片托盘、托盘装置和结晶膜生长设备 |
| CN104726932A (zh) * | 2015-04-09 | 2015-06-24 | 江苏盎华光伏工程技术研究中心有限公司 | 采用籽晶引导的硅片制作设备及其控制方法 |
| CN104726932B (zh) * | 2015-04-09 | 2017-06-06 | 江苏盎华光伏工程技术研究中心有限公司 | 采用籽晶引导的硅片制作设备及其控制方法 |
| CN108048903A (zh) * | 2016-02-03 | 2018-05-18 | 陈鸽 | 一种改变载气流向的引流装置 |
| CN110923427A (zh) * | 2019-10-29 | 2020-03-27 | 张家港宏昌钢板有限公司 | 一种方坯高温防脱碳装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0513912B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-02-23 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |