JPH0379989A - Differential pressure sealing apparatus - Google Patents
Differential pressure sealing apparatusInfo
- Publication number
- JPH0379989A JPH0379989A JP21500789A JP21500789A JPH0379989A JP H0379989 A JPH0379989 A JP H0379989A JP 21500789 A JP21500789 A JP 21500789A JP 21500789 A JP21500789 A JP 21500789A JP H0379989 A JPH0379989 A JP H0379989A
- Authority
- JP
- Japan
- Prior art keywords
- differential pressure
- seal
- roll
- piece
- pressure chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007789 sealing Methods 0.000 title claims abstract description 35
- 238000012856 packing Methods 0.000 claims description 13
- 238000004804 winding Methods 0.000 claims 1
- 238000006073 displacement reaction Methods 0.000 abstract description 3
- 238000007599 discharging Methods 0.000 abstract 2
- 238000012545 processing Methods 0.000 description 7
- 229910000831 Steel Inorganic materials 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 238000013459 approach Methods 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Furnace Details (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、圧力差のある空間を介して帯状鋼板等の長尺
物を搬送する場合に各空間間の差圧を維持するために設
けられる差圧シール装置に関する。Detailed Description of the Invention (Industrial Field of Application) The present invention is designed to maintain the differential pressure between each space when conveying a long object such as a strip steel plate through spaces with pressure differences. The present invention relates to a differential pressure sealing device.
（従来の技術）
従来、例えば帯状鋼板等の長尺物を真空処理室内に於い
て連続的に真空処理する場合、真空処理室内の真空を維
持するために差圧室と称する幾つかの空間が第１図及び
第２図に見られるように真空処理室へ連なる長尺物の搬
送経路に設けられ、各差圧室ａには回転自在のシールロ
ールｂと、該シールロールｂに接近したシールピースＣ
とで構成される差圧シール装置ｄを設け、該シールロー
ルｂを捲回して真空処理室へと搬送される長尺物ｅの周
囲をシールすることが行なわれている。(Prior Art) Conventionally, when a long object such as a strip steel plate is subjected to continuous vacuum processing in a vacuum processing chamber, several spaces called differential pressure chambers are required to maintain the vacuum inside the vacuum processing chamber. As shown in Figures 1 and 2, each differential pressure chamber a is provided with a rotatable seal roll b and a seal close to the seal roll b, which is provided in the conveyance path of a long object leading to the vacuum processing chamber. Peace C
A differential pressure sealing device d is provided, and the sealing roll b is wound to seal the periphery of a long object e to be transported to a vacuum processing chamber.
これを更に説明すると、各差圧室ａ、ａには真空ポンプ
に連なる排気孔ｆが夫々設けられ、各差圧室ａの圧力を
真空処理室ａに近づく程低い圧力に制御し、長尺物ｅは
差圧室ａの室壁ｋに形成した入口開口ｇから該差圧室ａ
内へ導入され、シールピースＣの通過孔りを通り、更に
シールロールｂを捲回して次の差圧室ａへと搬送される
。この場合、差圧室８％８間は長尺物ｅの通過のために
連通しているが、該長尺物ｅはシールロールｂとこれに
沿って延びるシール面２を備えたシールピースＣとで形
成されるスリットｉを介して差圧室ａ内へ導入されるの
で、各差圧室ａＳａ間に圧力差があっても各室間の気体
の流通が制限され、各差圧室ａの圧力が設定圧力に維持
出来る。To explain this further, each differential pressure chamber a is provided with an exhaust hole f connected to a vacuum pump, and the pressure in each differential pressure chamber a is controlled to a lower pressure as it approaches the vacuum processing chamber a. The object e enters the differential pressure chamber a from the inlet opening g formed in the chamber wall k of the differential pressure chamber a.
It passes through the passage hole of the seal piece C, is further wound around the seal roll b, and is conveyed to the next differential pressure chamber a. In this case, the differential pressure chambers 8% and 8 communicate with each other for passage of the elongated object e, and the elongated object e is connected to a seal piece C having a sealing roll b and a sealing surface 2 extending along the sealing roll b. Since the gas is introduced into the differential pressure chamber a through the slit i formed by the pressure can be maintained at the set pressure.
（発明が解決しようとする課題）
前記従来の差圧シール装置のシールピースＣは、取付フ
ランジｊにより差圧室ａの室壁ｋにパッキングｍを介し
て取付けられ、シールロールｂとは別個に独立した存在
で取付けられているので、組立が困難であり、また差圧
室ａの室９ｋが圧力差により不同変形したり、温度差に
よる熱変形が生じたりすると、スリットｉを所定の値に
維持することが非常に困難になり、更にスリットｉの値
を各差圧室ａの前後の圧力差で定まる値以下に狭めると
、室壁にの変形等によりシールロールｂとシールピース
Ｃが使用中に接触してシールロールｂが回転不能に陥る
不都合があった。そのため、スリットｉの値を必要以上
大きく設定し、これに伴ない増大するスリットｌを介し
ての気体の移動量を真空ポンプの排気量を増大させて排
除しているが、真空ポンプが高価になり運転経費も増大
する欠点があった。(Problem to be Solved by the Invention) The seal piece C of the conventional differential pressure sealing device is attached to the chamber wall k of the differential pressure chamber a by the mounting flange j via the packing m, and is separated from the seal roll b. Since they are attached as independent entities, assembly is difficult, and if the chamber 9k of differential pressure chamber a is unevenly deformed due to a pressure difference or thermal deformation occurs due to a temperature difference, it is necessary to set the slit i to a predetermined value. If the value of slit i is further narrowed below the value determined by the pressure difference before and after each differential pressure chamber a, seal roll b and seal piece C will be used due to deformation of the chamber wall, etc. There was an inconvenience that the seal roll b would become unable to rotate due to contact with the inside. Therefore, the value of slit i is set larger than necessary, and the amount of gas moving through slit l, which increases accordingly, is eliminated by increasing the displacement of the vacuum pump, but the vacuum pump becomes expensive. This has the disadvantage of increasing operating costs.
本発明は、上記した従来の差圧シール装置の不都合、欠
点を解決することを目的とするものである。The present invention aims to solve the above-mentioned disadvantages and drawbacks of the conventional differential pressure seal device.
（課題を解決するための手段）
本発明では、差圧室内に、回転自在のシールロールを設
けると共に該差圧室の室壁の入口開口に連なる長尺物の
通過孔を備えたシールピースを該シールロールに接近し
て設け、該通過孔から該シールロールを捲回して該差圧
室内を通過搬送される長尺物の周囲を、該シールロール
とシールピースによりシールするようにしたものに於い
て、該シールピースをシールロールの軸部に支持アーム
により支承させ、更に該シールピースと差圧室の室壁を
可動性且つ気密性を備えたシール手段により互に連結し
て該入口開口と通過孔を連通させることにより、前記目
的を連成するようにした。(Means for Solving the Problems) In the present invention, a rotatable seal roll is provided in a differential pressure chamber, and a seal piece is provided with a passage hole for a long object connected to an inlet opening in a wall of the differential pressure chamber. The seal roll is provided close to the seal roll, and the seal roll is wound through the passage hole so that the seal roll and the seal piece seal the circumference of a long object that is conveyed through the differential pressure chamber. The seal piece is supported by a support arm on the shaft of the seal roll, and the seal piece and the wall of the differential pressure chamber are interconnected by a movable and airtight sealing means to close the inlet opening. The above objective is achieved by communicating the passage hole with the passage hole.
（作 用）
差圧室内を予定の真空に排気しながらシールロールを回
転すると、長尺物が該差圧室内を通過搬送され、例えば
真空処理室へと送られる。(Function) When the seal roll is rotated while evacuating the differential pressure chamber to a predetermined vacuum, a long object is conveyed through the differential pressure chamber, and is sent to, for example, a vacuum processing chamber.
各差圧室内へ導入される長尺物の周囲は、シールロール
とシールピースによりシールされ、各差圧室内の圧力が
設定圧に維持されるが、該シールピースは支持アームに
よりシールロールに支承されており、しかも差圧室の室
壁と可動性及び気密性を有するシール手段により入口開
口と通過孔とを連通させて連結されているので、室壁が
変形してもシールピースとシールロールの相対的関係は
不変となり、シールピースとシールロール間のスリット
の値を予定の値に設定してもシールピースがシールロー
ルに接触して回転不能になる不都合もなく、該スリット
の値はシールロールに支持アームでシールピースを組付
けたときに設定されるので、組立作業が簡単になる。The circumference of the long object introduced into each differential pressure chamber is sealed by a seal roll and a seal piece, and the pressure inside each differential pressure chamber is maintained at the set pressure, but the seal piece is supported by the seal roll by a support arm. Moreover, since the inlet opening and the passage hole are connected to the chamber wall of the differential pressure chamber by a movable and airtight sealing means, even if the chamber wall is deformed, the seal piece and seal roll will remain intact. The relative relationship between the seal piece and the seal roll remains unchanged, and even if the value of the slit between the seal piece and the seal roll is set to the expected value, there will be no inconvenience that the seal piece will come into contact with the seal roll and be unable to rotate. This is set when the seal piece is assembled to the roll using the support arm, making the assembly process easier.
（実施例）
本発明の実施例を別紙図面の第３図乃至第５図に基づき
説明すると、第３図に於いて符号（１〉は真空排気孔（
２）を備えた差圧室、（３）は該差圧室（１）内に回転
自在に設けたシールロール、（４）は該差圧室（１〉の
室壁（ｌａ）に形成した横長の入口開口、（５）は該入
口開口（４）に連なる通過孔（６）を備えたシ−ルビー
スを示し、該シールピース（５）はシールロール〈３）
の周面に接近するシール曲面（７） （７）を備え、シ
ールロール（３）の回転によって入口開口（４〉及びシ
ールピース〈５〉の通過孔（６）を介して該差圧室（１
〉内に導入される帯状鋼板等の長尺物（８）の周囲をシ
ールし、気体が人口開口（４）を介して該差圧室（１）
内へ移動する量を制限して内部の圧力を設定圧に維持す
る。(Embodiment) An embodiment of the present invention will be explained based on FIGS. 3 to 5 of the attached drawings. In FIG.
2), (3) a seal roll rotatably provided in the differential pressure chamber (1), and (4) formed on the chamber wall (la) of the differential pressure chamber (1). A horizontally elongated inlet opening, (5) indicates a sealing piece with a passage hole (6) connected to the inlet opening (4), and the sealing piece (5) is connected to the sealing roll (3).
The sealing curved surface (7) (7) approaches the peripheral surface of the differential pressure chamber (7) through the inlet opening (4> and the passage hole (6) of the seal piece <5>) by the rotation of the sealing roll (3). 1
〉 The circumference of the elongated object (8) such as a strip steel plate introduced into the chamber is sealed, and the gas passes through the artificial opening (4) into the differential pressure chamber (1).
The internal pressure is maintained at the set pressure by limiting the amount of movement inside.
こうした構成は従来の差圧シール装置も備えるところで
あるが、本発明に於いては該シールピース（５）を支持
アーム（９） （９）によりシールロール（３）の軸部
（３ａ） （３ａ）へ支承させ、該シールピース（５）
と差圧室（１）の室壁（ｌａ）を可動性且つ気密性を備
えたシール手段（１０により互に連結して入口開口（４
〉と通過孔（６〉を連通させ、該室壁（ｌａ）が変形し
てもシールロール（３〉とシールピース（５）との間に
形成されるスリット（１ツの値が変化しないようにした
。Such a configuration also includes a conventional differential pressure sealing device, but in the present invention, the seal piece (5) is supported by the support arm (9) (9) on the shaft portion (3a) (3a) of the seal roll (3). ), and the seal piece (5)
and the chamber wall (la) of the differential pressure chamber (1) are connected to each other by a movable and airtight sealing means (10) to form an inlet opening (4).
) and the passage hole (6), and the value of the slit (1) formed between the seal roll (3) and the seal piece (5) does not change even if the chamber wall (la) is deformed. I made it.
該支持アーム（９）は、第４図示の例では板状体で構成
し、シールピース（５）の幅をシールロール（３）の長
さよりも多少長く形成してシールピース（５）の両端に
ねじ止めすると共に軸受（＋３を介して軸部（３ａ）
（３ａ）へ取付けするようにした。また、シール手段（
ＩＯは、入口開口（４〉の周縁にシートパッキング（１
＠を介して取付けたパッキングハウジングａ９、パッキ
ング抑え（′ＩＯからなるパッキング固定装置（＋７）
と、パッキングハウジング（１５１に保持されたパッキ
ングａδとで構成され、該パッキングＩｉδをシールピ
ース（５）の外周に摺動自在に当接させることにより、
シールピース〈５）を気密に室壁（１ａ）に連結し、該
室壁（１ａ）がシールピース（５）に対して可動し得る
ようにした。第５図は該シール手段（ＩＱの変形例を示
し、これに於いてはベローズ（＋！Ｉ１１を室壁（１ａ
）とシールピース（５〉の外周との間に設けて、気密性
と可動性のあるシールを行なうようにした。In the example shown in the fourth figure, the support arm (9) is formed of a plate-shaped body, and the width of the seal piece (5) is formed to be slightly longer than the length of the seal roll (3), so that both ends of the seal piece (5) are formed. At the same time, attach the shaft part (3a) through the bearing (+3).
(3a) was installed. In addition, sealing means (
IO has sheet packing (1) around the inlet opening (4).
Packing housing a9 attached via @, packing fixing device (+7) consisting of packing retainer ('IO)
and a packing aδ held by a packing housing (151), and by bringing the packing Iiδ into slidable contact with the outer periphery of the seal piece (5),
The seal piece (5) was airtightly connected to the chamber wall (1a) so that the chamber wall (1a) could move relative to the seal piece (5). FIG. 5 shows a modification of the sealing means (IQ), in which the bellows (+!I11) is connected to the chamber wall (1a
) and the outer periphery of the seal piece (5>) to provide an airtight and movable seal.
その作動を説明するに、該差圧室（１）内を真空排気孔
（２〉から排気し、シールロール〈３〉を回転すると、
長尺物（８〉はその周囲をシールロール（３）とシール
ピース（５）によりシールされ乍ら差圧室（１）内を搬
送されるので、該差圧室内の圧力が維持されるが、該シ
ールピース〈５）は支持アーム（９） （９）によりシ
ールロール（３）に支承されており、該シールピース（
５）は可動性と可撓性を有するシール手段（１０により
室壁（ｌａ）に取付けられ、人口開口−（４）と通過孔
（６〉とを連通させるので、該室壁（１ａ）とシールロ
ール〈３〉の相対的な位置関係が変っても、シールロー
ル（３〉とシールピース（５）との間のスリット（１２
１の値が変わることがない。従ってシールロール（３〉
の回転異常が生ずることがなく、連続して長尺物（８）
を搬送出来、スリットミツの値は差圧室（１）のもつ差
圧に応じた最小値に設定することが可能になり、差圧室
（１〉へ流入する気体の量が少なくなるので排気孔（２
）に接続される真空ポンプは排気量の小さいものを使用
することが出来、排気動力も小さく出来る。To explain its operation, when the inside of the differential pressure chamber (1) is evacuated from the vacuum exhaust hole (2>) and the seal roll <3> is rotated,
The long object (8>) is conveyed inside the differential pressure chamber (1) while its periphery is sealed by the seal roll (3) and the seal piece (5), so the pressure inside the differential pressure chamber is maintained. , the seal piece (5) is supported on the seal roll (3) by a support arm (9) (9), and the seal piece (5) is supported on the seal roll (3) by a support arm (9) (9).
5) is attached to the chamber wall (la) by a movable and flexible sealing means (10), and communicates the artificial opening (4) with the passage hole (6), so that the chamber wall (1a) and Even if the relative positional relationship of the seal roll <3> changes, the slit (12) between the seal roll (3> and the seal piece (5)
The value of 1 never changes. Therefore, the seal roll (3)
Continuous long objects (8) without any abnormal rotation.
The slit value can be set to the minimum value according to the differential pressure of the differential pressure chamber (1), and the amount of gas flowing into the differential pressure chamber (1) is reduced, so the exhaust hole (2
) can be connected to a vacuum pump with a small displacement, and the exhaust power can also be reduced.
（発明の効果）
以上のように本発明によるときは、差圧シール装置のシ
ールピースを支持アームを介してシールロールに支持さ
せると共にシールピースを可動性と気密性を備えたシー
ル手段により差圧室の室壁に取付けたので、室壁の変形
や室壁とシールロールの相対的関係の変化でシールロー
ルとシールピース間のスリットの値が変わることがなく
、シールロールの円滑な回転が得られ、該スリットの値
も小さく設定出来るので差圧室からの排気量を少なく出
来、装置及び運転コストを安価となし得、その組立も簡
単になる等の効果がある。(Effects of the Invention) As described above, according to the present invention, the seal piece of the differential pressure sealing device is supported by the seal roll via the support arm, and the seal piece is moved by the sealing means having movability and airtightness. Since it is attached to the chamber wall of the chamber, the slit value between the seal roll and the seal piece does not change due to deformation of the chamber wall or changes in the relative relationship between the chamber wall and the seal roll, allowing smooth rotation of the seal roll. Since the value of the slit can be set small, the amount of exhaust gas from the differential pressure chamber can be reduced, the device and operating costs can be reduced, and the assembly thereof can be simplified.
第１図は従来の差圧シール装置の裁断側面図、第２図は
第１図の■−■線断面の拡大図、第３図は本発明の実施
例の裁断側面図、第４図は第３図のＩＶ−ＩＶ線断面の
拡大図、第５図は本発明の他の実施例の裁断側面図であ
る。
（１〉・・・差圧室 （１ａ）・・・室壁
（３）・・・シールロール （３ａ）・・・軸部
（４）・・・入口開口 （５〉・・・シー
ルピース（６）・・・通過孔 （８）・
・・長尺物（９） （９）・・・支持アーム
（ＩＯ・・・シール手段（３７）・・・パッキング固定
装置
０秒・・・パッキング
ａ９・・・ベローズ
特
許
出
願
人
日本真空技術株式会社
同
上
川崎製鉄株式会社FIG. 1 is a cut side view of a conventional differential pressure sealing device, FIG. 2 is an enlarged cross-sectional view taken along the line ■-■ in FIG. 1, FIG. 3 is a cut side view of an embodiment of the present invention, and FIG. FIG. 3 is an enlarged cross-sectional view taken along the line IV-IV in FIG. 3, and FIG. 5 is a cut side view of another embodiment of the present invention. (1>... Differential pressure chamber (1a)... Chamber wall (3)... Seal roll (3a)... Shaft (4)... Inlet opening (5>... Seal piece ( 6) Passing hole (8)
...Long object (9) (9)...Support arm
(IO... Sealing means (37)... Packing fixing device 0 seconds... Packing a9... Bellows Patent applicant Japan Vacuum Technology Co., Ltd. Same as above Kawasaki Steel Corporation
Claims (1)
に該差圧室の室壁の入口開口に連なる長尺物の通過孔を
備えたシールピースを該シールロールに接近して設け、
該通過孔から該シールロールを捲回して該差圧室内を通
過搬送される長尺物の周囲を、該シールロールとシール
ピースによりシールするようにしたものに於いて、該シ
ールピースをシールロールの軸部に支持アームにより支
承させ、更に該シールピースと差圧室の室壁を可動性且
つ気密性を備えたシール手段により互に連結して該入口
開口と通過孔を連通させたことを特徴とする差圧シール
装置。 ２、前記シール手段を、前記入口開口内へ挿入されたシ
ールピースの外周に摺動自在に接するパッキングと、該
パッキングを差圧室の室壁に固定するパッキング固定装
置とで構成したことを特徴とする請求項１に記載の差圧
シール装置。 ３、前記シール手段を、差圧室の入口開口の周辺に一端
が固定され、他端がシールピースの通過孔の周辺に固定
されたベローズで構成したことを特徴とする請求項１に
記載の差圧シール装置。[Claims] 1. A rotatable seal roll is provided in the differential pressure chamber, and a seal piece having a passage hole for a long object connected to the inlet opening of the wall of the differential pressure chamber is approached to the seal roll. and provide
In the seal roll and the seal piece, the seal roll and the seal piece seal the circumference of the long object that is conveyed through the differential pressure chamber by winding the seal roll through the passage hole. The seal piece is supported by a support arm on the shaft portion of the differential pressure chamber, and the seal piece and the chamber wall of the differential pressure chamber are interconnected by a movable and airtight sealing means to communicate the inlet opening and the passage hole. Characteristic differential pressure seal device. 2. The sealing means is comprised of a packing that is slidably in contact with the outer periphery of the seal piece inserted into the inlet opening, and a packing fixing device that fixes the packing to the wall of the differential pressure chamber. The differential pressure sealing device according to claim 1. 3. The sealing means is constituted by a bellows having one end fixed around the inlet opening of the differential pressure chamber and the other end fixed around the passage hole of the seal piece. Differential pressure sealing device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1215007A JP2568920B2 (en) | 1989-08-23 | 1989-08-23 | Differential pressure sealing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1215007A JP2568920B2 (en) | 1989-08-23 | 1989-08-23 | Differential pressure sealing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0379989A true JPH0379989A (en) | 1991-04-04 |
| JP2568920B2 JP2568920B2 (en) | 1997-01-08 |
Family
ID=16665168
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1215007A Expired - Lifetime JP2568920B2 (en) | 1989-08-23 | 1989-08-23 | Differential pressure sealing device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2568920B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5411345A (en) * | 1992-07-02 | 1995-05-02 | Konishi Co., Ltd. | Felt-tipped pen type adhesive applier |
| CN115584485A (en) * | 2022-10-11 | 2023-01-10 | 拓荆科技股份有限公司 | Sealing structure for thin film deposition equipment and reaction chamber |
-
1989
- 1989-08-23 JP JP1215007A patent/JP2568920B2/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5411345A (en) * | 1992-07-02 | 1995-05-02 | Konishi Co., Ltd. | Felt-tipped pen type adhesive applier |
| CN115584485A (en) * | 2022-10-11 | 2023-01-10 | 拓荆科技股份有限公司 | Sealing structure for thin film deposition equipment and reaction chamber |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2568920B2 (en) | 1997-01-08 |
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