JPH04147973A - Differential-pressure sealing device in continuous vacuum treating device for strip - Google Patents

Abstract

PURPOSE:To reduce the fluttering of a strip produced in a differential-pressure chamber by providing an sealing cylinder enclosing the strip inside the sealing bar and adapter and approaching the tip of the cylinder to the periphery of a roll. CONSTITUTION:A sealing cylinder 13 enclosing a strip 1 with a space in between is provided inside the sealing bar 12 and adapter 8. The tips 13a and 13b of the cylinder 13 are approached to the periphery of a roll 2 and stretched over the roll 2. The length of the cylinder 13 on the low-pressure chamber 4 side is made greater than that of the tip of the bar 12 on the low-pressure chamber 4 side. A gas flowing in an outer clearance 18 is passed only through a clearance 16. The gas flowing in an inner clearance 19 is passed through the clearance 17 and subjected to the resistance of two times greater. As a result, the gas hardly flows through the clearance 19, and most of the gas flows through the clearance 18. Accordingly, the strip 1 is not fluttered.

Description

DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to a roll sealing device used in an apparatus that continuously performs vacuum deposition or the like on a strip.

<Prior art> This type of device requires a sealing device at the boundary in order to minimize the intrusion of outside air or the movement of gas between adjacent rooms, and there is a demand for the development of a better sealing device. It had been.

JP-A No. 62-13572 discloses a casing in which a pair of seal rolls is provided to partition a high-pressure chamber side and a low-pressure chamber side, and a strip is passed between the pair of rolls, in which the rolls are housed. , the strip is arranged so as to sandwich the upper and lower parts of the strip with a space in between, the tip is close to the circumferential surface of the roll, the tip is formed in a shape along the roll, and is airtightly supported by the casing. Seal par,
A roll seal device has been proposed which is characterized by having a tip formed in a shape along the roll and comprising adapters installed on both side surfaces of the sealer with a small gap between the inner surface of the casing and the inner surface of the casing.

This device will be explained with reference to the drawings. In Figs. 5 to 7, 1 indicates a strip, and 2 indicates a pair of rolls sandwiching the strip 1. Note that since the width of the plate can be changed arbitrarily, there is a space between the strip 1 and the casing 5 that houses the roll 2.2. There is a gap. In order to minimize the movement of gas between chambers 3 and 4, the sealing device was arranged to sandwich the top and bottom of the strip 1 with a space in between, and the tip was close to the circumferential surface of the roll 2 in the longitudinal direction. A seal bar 9 and adapters 8 disposed on both side surfaces of the sealer 9 are provided. In the examples shown in the fifth to FIG. 7, the sealer 9 and the adapter 8 are integrated, and the shape of the sealer 9 is such that the tip 9a follows the roll 2. Also, the tip 8a of the adapter 8 is connected to the roll 2.
The end of the adapter 8 has a structure that allows a small gap 11 to be maintained on the inner surface of the casing 5.

Note that the roll 2 is driven by a shaft 7, and the roll 2 is also driven by a shaft 7.
It is supported by a bearing 6 via. In addition, in this example, in order to enable the roll to move up and down in order to accommodate changes in the thickness of the strip l, a structure in which the roll bearing 7 and the roll bearing 6 are integrated is connected to the casing 5 via the bellows 10. There is.

Then, when driving the pair of rolls 2.2 and passing the strip 1 sandwiched between them between the high-pressure side and low-pressure side chambers 3.4, the sealer 9 is attached to the longitudinal circumferential surface of the rolls 2.2. The adapter 8 has a tip shaped along the same roll 2.2 and is airtightly supported by the casing 5. Since it is arranged on the surface part and is installed with a small gap from the inner surface of the casing 5, the two chambers 3.4
The movement of gas between the two can be minimized. Therefore, the sealing performance in the gap between the casing 5 and both end faces of the roll 2.2 is improved, and the amount of leakage from the gap can be reduced as much as possible.

In addition to the non-contact seals mentioned above, Japanese Patent Application Laid-Open No. 117257
A fixed seal system, such as that disclosed in Japanese Patent No. 0, has also been proposed in which a strip is passed between a roll and a fixed seal.

<The invention is trying to solve! However, although the sealing method disclosed in JP-A-62-13572 has excellent sheet passing properties, it does cause the flag to vibrate, so-called fluttering, due to the airflow flowing parallel to the strip. This phenomenon occurred, and this vibration had a negative effect on the thickness accuracy of vapor deposition and the conveyance speed.

On the other hand, in the method shown in JP-A-1-172570, in which the strip is passed between a roll and a fixed seal, vibration of the strip can be prevented because the running direction of the strip is not parallel to the direction of the air flow, but the fixed seal Since the strip passes through a narrow gap between the base and the base, a strip with a poor shape may cause scratches or get caught and break.

In an actual production line, breakage and scratches must be avoided at all costs, so the latter type of fixed sealing method cannot be adopted.

SUMMARY OF THE INVENTION An object of the present invention is to provide a device capable of stopping vibration of a strip in the sealing method disclosed in Japanese Patent Application Laid-Open No. 62-13572.

<Means for solving tx, n> The first invention provides a pair of rolls separating a high pressure chamber and a low pressure chamber, a strip is passed between the pair of rolls, and a casing houses the rolls. , the strip is disposed so as to sandwich the upper and lower parts of the strip with a space in between, the tip is close to the circumferential surface of the roll, the tip is formed in a shape along the roll, and is airtightly supported by the casing. A differential pressure sealing device comprising a seal bar having a tip formed in a shape along the roll, and an adapter installed on both side surfaces of the seal bar with a small gap between the inner surface of the casing and the inner surface of the casing. A sealing tube is arranged inside the adapter so as to surround the strip with a space, the tip of the sealing tube is brought close to the circumferential surface of the roll, and the tip is formed in a shape that follows the roll. In addition, there is provided a differential pressure sealing device for a continuous strip vacuum processing apparatus, characterized in that the length of the seal cylinder on the low pressure chamber side is longer than the end of the seal bar on the low pressure chamber side.

Further, a second invention provides a pair of rolls that partition a high pressure chamber and a low pressure chamber, and a strip is passed between the pair of rolls, and a casing housing the rolls is provided with a space above and below the strip. a seal bar, which is arranged to sandwich the bar, has a tip close to the circumferential surface of the roll, the tip is formed in a shape that follows the roll, and is airtightly supported by the casing; In the differential pressure sealing device, the adapter is formed in a shape of An inner seal bar is disposed on the inside so as to sandwich the top and bottom of the strip with a space in between, the tip of which is close to the circumferential surface of the roll, and the tip of which is formed in a shape along the roll; This differential pressure sealing device for a continuous strip vacuum processing apparatus is characterized in that the length of the inner seal bar on the low pressure chamber side is longer than the tip of the outer seal bar on the low pressure chamber side.

<Function> The present inventors discovered that the parallel flow flowing along the strip caused automatic vibration in the strip, and after intensively studying ways to prevent the vibration, completed the present invention.

FIG. 4 shows the state of airflow in the device of the present invention. Since the pressure P1 in the high pressure chamber 3 is greater than the pressure P in the low pressure chamber 4, the airflow flows in the direction of the arrow.The clearances 16 and 17 are narrow gaps, and when the airflow passes through these parts at high speed, the pressure drops. occurs. The airflow flowing through the outer clearance 18 passes only through the clearance 16, but the airflow flowing through the inner clearance 19 further passes through the clearance 17, and therefore faces twice the resistance. As a result, the inner clearance 1
The airflow flowing through the strip 9 becomes difficult to flow, and most of the airflow flows through the outer clearance 18, so that the strip 1 does not flutter.

When the airflow flowing through the outer clearance 18 flows out into the low pressure chamber 4, the flux expands and loses speed, but when expanding the flux, it is important to expand it in the opposite direction to the strip l. Therefore, the seal cylinder 13 or the inner seal bar 15 is made longer than the seal bar 12 or the outer seal bar 14 so that it expands in the direction away from the strip 1 as shown in the figure.

These improvements have made it possible to create a differential pressure chamber with good root permeability and no vibration.

<Example> Embodiments of the present invention will be described based on the drawings.

FIG. 1 is a sectional view of an embodiment of the first and second inventions, and the numbers in parentheses indicate part numbers of the second invention.

FIG. 2 is a perspective view of the main part of the first invention, and FIG. 3 is a perspective view of the main part of the second invention.

First, the first invention will be explained in detail.

In Fig. 1.2, a pair of rolls 2.2 are provided in the casing 5 to partition the high pressure chamber 3 side and the low pressure chamber 4 side, and the strip 1 is passed between the pair of rolls 2.2. It's Nishide.

12 is arranged so as to sandwich the upper and lower sides of the strip 1 with a space in between, and the tip 12a is close to the circumferential surface of the roll 2.2,
It is a seal bar whose tip 12a is formed in a shape along the roll 2.2 and is airtightly supported by the casing 5.

Reference numeral 8 denotes an adapter whose tip 8a is formed in a shape along the roll 2.2, and which is installed on both side surfaces of the seal bar 12 with a small gap (part number 11 in FIG. 5) from the inner surface of the casing 5.

Reference numeral 13 denotes a seal cylinder disposed inside the seal bar 12 and the adapter 8 so as to surround the strip 1 with a space therebetween. The ends 13a and 13b of the seal cylinder 13 are connected to the roll 2.
2, and formed in a shape along the roll 2.2. Further, the length of the seal cylinder 13 on the low pressure chamber 4 side is made longer than the tip of the seal bar 12 on the low pressure chamber 4 side.

Next, the second invention will be explained in detail.

In FIG. 3, 14 is arranged so as to sandwich the upper and lower sides of the strip l with a space in between, and the tip 14 is placed on the circumferential surface of the roll 2.2.
4a is close to the outer seal bar, the tip 14a is formed in a shape along the roll 2.2, and is airtightly supported by the casing 5.

Reference numeral 8 denotes an adapter whose tip 8a is formed in a shape that follows the roll 2.2, and which is installed on both side surfaces of the outer seal bar 14 with a small gap (part number 11 in FIG. 5) from the inner surface of the casing 5. .

15 is disposed inside the outer sealer 14 so as to sandwich the upper and lower sides of the strip 1 with a space in between, and the roll 2
．． The tip 15a is close to the circumferential surface in the longitudinal direction of the tip $1.
5a is an inner seal bar formed in a shape along the roll 2.2. The lengths of the four low-pressure chambers of the inner seal bar 15 are made longer than the ends of the outer sealer 14 on the low-pressure chamber 4 side (see FIG. 1).

<Effects of the Invention> As explained above, with the apparatus of the present invention, it is possible to reduce the vibration of the strip generated in the differential pressure chamber to a level that does not cause any problems, thereby improving the thickness accuracy of vapor deposition and the strip threadability. can be improved.

[Brief explanation of the drawing]

FIG. 1 is a sectional view showing an embodiment of the apparatus of the first and second inventions, FIG. 2 is a perspective view of essential parts of an embodiment of the first invention, and FIG. 3 is an embodiment of the apparatus of the second invention. FIG. 4 is an explanatory diagram showing the state of airflow in the devices of the first and second inventions, FIG. 5 is a side sectional view of the end of the roll in the conventional device, and FIG. 6 is a perspective view of the main parts of the embodiment. FIG. 5 is a sectional view taken along the line 1-1, and FIG. 7 is a perspective view schematically showing the relationship between the seal roll, the seal bar, and the adapter. ...Strip, ...Roll, ...High pressure chamber, ...Low pressure chamber, ...Casing, ...Bearing, ...Roll shaft, ...Adapter, ...Tip of adapter・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・ ・・・Tip of... Outer seal bar... Tip of outer seal bar,... Inner seal bar 15a 16.17... Tip of inner seal bar,... Clearance,... Outer clearance,...・Inner clearance.

Claims (2)

[Claims] (1) A pair of rolls is provided to partition a high-pressure chamber and a low-pressure chamber, and a strip is passed between the pair of rolls, and a casing housing the rolls is arranged so as to sandwich the top and bottom of the strip with a space in between. a seal bar, the tip of which is close to the circumferential surface of the roll, the tip of which is formed in a shape that follows the roll; and the seal bar that is airtightly supported by the casing; and an adapter installed on both sides of the seal bar with a small gap between the inner surface of the casing and the inner surface of the casing, the strip being surrounded by a space inside the seal bar and the adapter. A seal cylinder is arranged as shown in FIG. A differential pressure sealing device for a continuous strip vacuum processing device, characterized in that the end of the sealing bar is longer than the low pressure chamber side. (2) A pair of rolls is provided to partition a high-pressure chamber and a low-pressure chamber, and a strip is passed between the pair of rolls, and a casing housing the rolls is arranged so as to sandwich the strip above and below with a space in between. a seal bar, the tip of which is close to the circumferential surface of the roll, the tip of which is formed in a shape that follows the roll; and the seal bar that is airtightly supported by the casing; In a differential pressure sealing device comprising an adapter installed on both side surfaces of the seal bar with a small gap between the inner surface of the casing and the inner surface of the casing, the seal bar is an outer seal bar, and the seal bar is provided inside the outer seal bar. An inner seal bar is provided so as to sandwich the upper and lower parts of the strip with a space in between, the tip of which is close to the circumferential surface of the roll, and the tip of which is formed in a shape that follows the roll;
A differential pressure sealing device for a continuous strip vacuum processing apparatus, characterized in that the length of the inner seal bar on the low pressure chamber side is longer than the tip of the outer seal bar on the low pressure chamber side.