JPS6217471Y2 - - Google Patents

Description

[Detailed Description of the Invention] The present invention relates to an improvement of a bridle roll type sealing device used for vacuum deposition plating, continuous annealing, etc. of metal strips, etc.

When continuously applying surface treatments such as vacuum plating or annealing to metal strips, etc., conditions such as pressure, temperature, and composition of the atmospheric gas in each chamber of each device must be adjusted according to the purpose. A sealing device is provided to seal the flow of gas to the outside air or to an adjacent chamber.

One of the sealing devices used for this purpose is a bridle (restriction) roll type sealing device, and its structure is as shown in Figure 1a and b.
Two roll mounting holes 02 are formed in the roll mounting hole 1, which are located above and below, and whose upper and lower ends communicate with each other and which extend in the horizontal direction. Device body 0
It is rotatably attached to the side plate 05 of 1.
The band plate 03 is wound around the pair of seal rolls 04 in a Z-shape. This strip plate 03 is the seal roll 0
4, a seal gap δ 1 between the device main body 01 and the upper end of the seal roll 04 and a seal gap δ ₂ between the device main body 01 and the band plate ₀₃ are formed at the inlet portion of the band plate 03, and A seal gap δ 3 is formed between both ends of the seal roll 04 and the side plate 05, and a seal gap δ ₄ is formed between the strip plate 03 on the outer periphery of the seal roll 04 and the roll mounting hole ₀₂ . A seal gap δ ₅ is formed between the roll mounting hole 02 and the portion of the roll mounting hole 02 that is not in contact with the strip plate 03 of the roll plate 04 .

However, these seal gaps δ ₁ to δ ₅ are approximately
Since the seal gap is set to be large (1.2 to 5.0 mm), there is a large amount of gas flowing through it, and especially when the pressure difference between the outside air or the adjacent room is large, a large amount of atmospheric gas will flow through the seal gap δ ₁ to δ ₅ . atmospheric gas pressure,
It becomes difficult to maintain constant conditions such as temperature and composition, which leads to an increase in the size of gas processing equipment required for gas replenishment and exhaust replacement, and gas conditions that belong to the low to medium vacuum pressure range (viscous flow of 5 Torr or more). I couldn't use it. In addition, because of the bridle type, the distance between the roll centers of the seal roll 04 cannot be adjusted, so the seal gap through which gas flows changes in accordance with changes in the plate thickness of the band plate 03, which cannot be adjusted.

The object of the present invention is to eliminate such conventional drawbacks and provide a bridle roll type sealing device that can reduce the seal gap, reduce the gas flow rate, and cope with variations in plate thickness. The configuration of the present invention to achieve such an object is that a pair of seal rolls whose rotational axes are parallel to each other are attached to a pair of roll attachment holes formed in the main body of the apparatus through a gap that allows the band plate to pass through, and a band is attached to the outer periphery of the seal roll. In a bridle roll type sealing device in which a plate is wrapped around a plane crossing a plane connecting the rotation axes of the seal roll, the plate is slidable so as to come into contact with the outer periphery of the seal roll or the band plate on both sides of the plane connecting the rotation axes of the seal roll, and The present invention is characterized in that a seal gap adjustment roll having the same overall length and width as the seal roll is provided.

Hereinafter, one embodiment of the present invention will be described in detail based on the drawings.

Figures 2a and 2b are cross-sectional views and A-
It is a sectional view taken along arrow A.

Two roll mounting holes 2 are formed in the apparatus main body 1, and the upper and lower ends thereof communicate with each other and extend in the horizontal direction. is inserted, and its rotating shaft 4a is rotatably attached to the side plate 5 of the device main body 1 via a bearing and a bearing frame.It is formed by the device main body 1 and the side plate 5, and only the feeding portion of the band plate 3 is open. A nearly sealed body is created. Then, the band plate 3 is wound around the pair of seal rolls 4 in a Z-shape so as to intersect the plane connecting the rotating shafts 4a.
With this band plate 3 wrapped around it, five seal gaps δ ₁ to δ ₅ are formed as in the conventional case. Among these seal gaps δ ₁ to _{δ 5} , the seal gap δ ₃ between both ends of the seal roll 4 and the side plate 5 is the minimum gap due to the rotation of the seal roll 4, but the other four seal gaps In order to reduce δ ₁ , δ ₂ , δ ₄ , and δ ₅ , based on the fact that a series of gaps are formed along the respective surfaces of the strip plate 3 on both sides of the plane connecting the rotating shaft 4a, An adjustment roll 6 for adjusting the seal gap is provided. In this embodiment, three are provided on each side, two of which reduce the sealing gap δ4 between the roll mounting hole 2 of the device body 1 and the strip plate 3, and the other one which reduces the sealing gap _δ4 between the roll mounting hole 2 of the device body 1 and the strip plate 3. An adjusting roll mounting groove ₇ is formed that is parallel to the roll mounting hole 2 of the device main body 1 and opens toward the center of the seal roll 4, and the sealing roll 4 is The total length and width of are equal,
Furthermore, an adjustment roll 6 having a smaller diameter than the seal roll 4 is inserted, and its rotating shaft is supported on the outside of the side plate 5 so as to be slidable in the radial direction of the seal roll 4. The support structure for the adjustment roll 6 may be a cylinder type in which a bearing frame for the rotating shaft is attached to the rod end of a fluid pressure cylinder operated by compressed air or pressure oil, or a bearing frame may be slid through an electromagnetic type solenoid. What is necessary is to use a device that moves the bearing frame, or a spring method that always biases the bearing frame toward the rotating shaft 4a of the seal roll 4.

By providing the adjusting rolls 6 in this manner, a series of seal gaps along each surface of the strip plate 3 is reduced by three adjusting rolls 6, and by providing the adjusting rolls 6, the sealing gap between the conventional sealing rolls 4 can be reduced by three adjusting rolls 6.
This also has the effect of eliminating the problem where the strip plate 3 did not come into complete contact with each other, causing one-sided slippage. Therefore, the cross-sectional area of the gas flow passage can be reduced, the flow rate of gas flowing from the high pressure side to the low pressure side can be reduced, and it can be used in low to medium vacuum (5 Torr or more) sealing devices.

Next, the sealing performance of the bridle roll sealing device of the present invention is specifically calculated using the ease of gas flow in the pressure range of the molecular flow region, that is, the conductance C/sec.

Gas flow rate Q flowing through the gap in the case of molecular flow
can be calculated theoretically and is given by the following equation (1).

Q=C・(P ₁ − P ₂ ) ...(1) However, Here, P ₁ - P ₂ is the pressure difference, α is the gas constant (9.70 for room temperature air), K _S is the correction coefficient, A is the cross-sectional area of the passage, S is 1/2 of the total circumference length of the passage, and L is The length of the passage, T is the absolute temperature of the gas, and M is the molecular weight of the gas (28.96 for air).

Further, the thickness t of the strip plate 3 is 2 mm, the width is 300 mm, the total length of the seal roll 4 is 500 mm, and the seal gaps are δ ₁ = 5, δ ₂ = 3, δ ₃ = 0.2,
Assuming that δ ₄ =3 and δ ₅ =1.2 mm, in the conventional structure shown in FIGS. 1a and 1b, the conductance C for each seal gap is as follows.

δ ₁ :C ₁ =0.47/sec δ ₂ :C ₂ =1.94 δ ₃ :C ₃ =0.20 ∴C ₁ +C ₂ +C ₃ =2.61/sec On the other hand, the structure of the present invention shown in Fig. 2 a and b Since the seal gaps δ ₄ and δ ₅ can be completely sealed in the middle of the outer circumference of the seal roll 4,
C′ ₂ with respect to the seal gap δ ₂ is 0, and considering the gap of the bearing portion of the adjustment roll 6, the result is as follows.

δ ₁ :C′ ₁ =0.47/sec δ ₂ :C′ ₂ =0 δ ₃ :C′ ₃ =0.3 ∴C′ ₁ +C′ ₂ +C′ ₃ =0.77/sec As is clear from the above results, the present invention The device can reduce the gas flow rate to about 1/3 of the conventional rate.
Therefore, it is possible to reduce the capacity of the vacuum pump and suction gas processing equipment to about 1/3. Furthermore, due to the improved sealing performance, it can be used under atmospheric gas conditions in the viscous flow region, which has a higher pressure than the molecular flow region (atmospheric gas flow of several Torr or less).

FIG. 3 is a cross-sectional view of a main part according to another embodiment of the present invention, in which the length of the adjusting roll 6 is equal to the total length of the sealing roll 4, but the adjustment roll 6 is made to have a length equal to the total length of the sealing roll 4. It is composed of divided rolls 6a, 6b, 6c, 6d, and 6e so that the sealing gap _δ1 can be adjusted, and each of the divided rolls 6a to 6e can be slid from the outside of the device main body 1 toward the center of the sealing roll 4. It is supported by an independent gate-shaped mounting frame.

In each of the above embodiments, three adjustment rolls 6 were provided on each side of the plane connecting the rotation axes of the seal rolls, but it is better to have at least one each, and the more the adjustment rolls 6, the more perfect the sealing performance will be. Further, the sliding direction of the adjustment roll is not limited to the direction toward the center of the seal roll, but may be in the tangential direction of the seal roll.

As described above in detail with the embodiments, according to the present invention, even in a bridle roll sealing device, the seal gap can be reduced and the amount of gas flowing can be reduced. Furthermore, since the adjusting roll is made slidable toward the sealing roll, variations in plate thickness can be easily coped with.

[Brief explanation of the drawing]

Fig. 1 a, b is a cross-sectional view and longitudinal sectional view of a conventional bridle roll sealing device, Fig. 2 a, b
are a cross-sectional view and a cross-sectional view taken along the line A-A of an embodiment of the bridle roll sealing device of the present invention,
FIG. 3 shows the second main part of another embodiment of the present invention.
This is a diagram corresponding to Figure b. In the drawing, 1 is the main body of the device, 2 is the roll mounting hole, and 3 is the main body of the device.
4 is a band plate, 4 is a seal roll, 4a is a rotating shaft, 5 is a side plate, 6 is an adjustment roll, 6a to 6e are divided rolls, 7 is an adjustment roll mounting groove, and δ ₁ to δ ₅ are seal gaps.

Claims (1)

[Scope of utility model registration request] A pair of seal rolls whose rotating axes are parallel are attached to a pair of roll mounting holes formed in the device body through a gap that allows the band plates to pass through, and the band plates intersect the plane connecting the rotating axes around the outer periphery of the seal rolls. In a bridle roll type sealing device that is wrapped around the seal roll, the seal gap is adjusted to be slidable so as to come into contact with the outer periphery of the seal roll or the band plate on both sides of a plane connecting the rotational axes of the seal roll, and to have a width equal to the overall length of the seal roll. A bridle roll type sealing device characterized by having a roll for use.