JP2677422B2 - Strip vacuum differential pressure seal device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to a vacuum processing chamber in the central portion of a strip-shaped material such as strip steel (hereinafter, referred to as a "strip plate") while continuously passing the strip. Vacuum treatment equipment for strips that perform various surface treatments in
In particular, a plurality of vacuum differential pressures are installed before and after the vacuum processing chamber to gradually increase the vacuum degree from atmospheric pressure to the vacuum processing chamber and to gradually reduce the vacuum degree from the vacuum processing chamber to atmospheric pressure. The present invention relates to a sealing device.

[Conventional technology]

2. Description of the Related Art Conventionally, as this type of vacuum differential pressure sealing device, a roll type vacuum sealing device that pinches a strip with a roll to generate a differential pressure before and after the strip is often used.

In this roll type vacuum differential pressure sealing device, only a pinch roll made of a rubber lining roll is used, or a pinch roll made of a rubber lining roll is made of a metal seal roll which is rotated by contacting each of the pinch rolls. And a combination of a partition wall-shaped seal wall that covers the seal roll with a minute gap (see JP-A-62-4865 and JP-A-62-54911), and a metal pinch roll It is known to use only.

In such a roll type vacuum differential pressure seal device, the space area S of the gap between the upper and lower pinch rolls on both end sides of the strip plate is expressed by the following equation.

S = (A−W) × t where A: roll face W: width of strip t: thickness of strip [Problems to be solved by the invention] However, the roll using a pinch roll made of a rubber lining roll is used. With the vacuum differential pressure seal device,
Due to the elasticity of the rubber coating the roll surface of the pinch roll, even if the width of the strip is small, the space area S of the gap between the upper and lower pinch rolls can be brought close to zero to maintain the differential pressure sealing effect. There is a limitation in heat resistance, and there is an inconvenience that it cannot be used when the strip plate temperature exceeds 250 ° C.

Further, in the above-mentioned roll type vacuum differential pressure seal device using the metal pinch roll, it can be used even when the strip plate is at a high temperature, but the space area S of the gap between the upper and lower pinch rolls is large (especially with a narrow width and a large thickness). When passing a large strip), the differential pressure sealing effect is impaired. When the width of the strip is narrow, the space area S of the gap between the upper and lower pinch rolls occupies more than half of the total leak area of the seal. In order to maintain a predetermined degree of vacuum in the vacuum processing chamber, it is necessary to increase the number of stages of the vacuum differential pressure sealing device as compared with the vacuum differential pressure sealing device and to increase the capacity of the vacuum pump.

[Object of the invention]

The present invention has been made to solve the above problems,
An object of the present invention is to enable the strip plate to be used even at a high temperature and to reduce the space area of the gap between the upper and lower pinch rolls.

[Means for solving the problem]

The strip vacuum differential pressure seal device of the present invention is shown in FIGS.
As shown in the figure, in a roll-type vacuum seal device provided with a pair of upper and lower pinch rolls 4A and 4B that sandwich the strip P and can be passed through, in the upper pinch roll 4A, a bendable cylindrical shell 10 and A roll shaft 12 supporting the central portion of the cylindrical shell 10 forms a gap S between the central portion of the cylindrical shell 10 and the end portion between the roll shaft 12 and the upper pinch roll 4A. Along the roll axis
A plurality of bending rollers 13 that are rotated in contact with the upper pinch roll 4A are arranged such that they can be pressed against the upper pinch roll 4A independently of each other. is there.

(Operation)

When the bending cylinder 13 is pressed onto the upper pinch roll 4A by the pressing cylinder 14, the cylindrical shell 10 bends downward within the gap S between the roll shaft 12 and the upper and lower pinch rolls 4A and 4B. The pressing cylinders 14 are individually controlled so that the pressing force of the bending roller 14 of the pressing cylinder 14 becomes a predetermined value depending on the thickness and width of the strip plate P that is formed and the position of the vertical pinch rolls 4A and 4B arranged in the roll axial direction. Then, the cylindrical shell 10 of the upper pinch roll 4A is deformed into a bent shape corresponding to the strip P in the passing plate in cooperation with the lower pinch roll 4B.

〔Example〕

An embodiment of the present invention will be described below with reference to FIGS.

In the figure, 1 is a vacuum processing chamber, 2 is a plurality of vacuum differential pressure seals arranged in front of and behind the vacuum processing chamber 1, and they are continuously provided in the housing 3 in the strip plate passing direction (the arrow direction in the drawing). There is.

Reference numeral 4A denotes a metal upper pinch roll, and 4B denotes a metal lower pinch roll, which are installed so as to face the entrances and exits of the respective chambers in the housing 3 with the strip passage line L interposed therebetween.

The cylindrical shell 5 of the lower pinch roll 4B is formed thick so as not to be bent and deformed by an external force, and support discs 6 are fixed to both ends of the cylindrical shell 5, and a roll shaft 7 is formed on each of the support discs 6 in a cylindrical shape. The shell 5 and the shell 5 are concentric with each other.

The roll shaft 7 is mounted on a bearing 8B provided on the side wall 3a of the housing 3 and rotatably supported via the bearing 8B, and is also connected to a drive unit via a universal spindle 9.

The cylindrical shell 10 of the upper pinch roll 4A is formed into a thin wall that can be bent and deformed by an external force, and a pair of supporting discs 11 are fixed in the central portion of the cylindrical shell 10 with a space therebetween. The roll shaft 12 and the cylindrical shell 10 are respectively provided so as to project coaxially.

The roll shaft 12 is mounted on a bearing 8A provided on the side wall 3a of the housing 3 and is rotatably supported via the bearing 8A.

A gap S is formed between the central portion of the cylindrical shell 10 and the end portion between the cylindrical shell 10 and the roll shaft 12.
By pressing 10 downward, it is possible to bend downward with the central portion as the fulcrum.

13 is a plurality of bending rollers (8 in the embodiment)
The four strips are arranged on both sides of the strip passing line L along the roll axial direction above the upper pinch roll 4A, and come into contact with the upper pinch roll 4A to rotate. ing.

Reference numeral 14 denotes a plurality of pressing cylinders (hydraulic cylinders in the embodiment), which are installed on the top wall 3b of the housing 3 at intervals at right angles to the strip plate passing direction, and the piston rods are installed on the top wall 3b.
The bending roller 13 is rotatably attached to the tip of the O-ring 15 which is inserted into the housing 3.

The pressing cylinder 14 can be separately controlled so that the force (roller pressing force) for pressing the bending roller 13 against the upper pinch roll 4A has a predetermined set value.

16A and 16B are metal seal rolls that also serve as backup rolls, and are rotatably supported through bearings provided on the side wall 3a of the housing 3 and are on the strip plate passage direction side of the upper and lower pinch rolls 4A and 4B or on the opposite strip plate passage plate. The pinch rolls 4A and 4B are respectively arranged on the respective direction sides so as to be rotated by contacting the pinch rolls 4A and 4B.

17A and 17B are seal walls, which are the side wall 3a and the top wall of the housing 3.
3b, the side wall 3a and the bottom wall 3c are fixed to the seal roll 16
They are arranged on the side of the anti-pinch rolls 4A, 4B of A, 16B with a minute gap so as to be in sliding contact with the roll peripheral surface, respectively.

18A, 18B, and 18C are ring-shaped roll side sealing devices, and upper and lower pinch rolls 4A and 4B and seal rolls 16A and 16B.
The housing 3 is mounted on the inner surface of the side wall 3a of the housing 3 so as to be always in sliding contact with the end side surface of the housing.

19 is a vacuum pump, which is a vacuum processing chamber 1 and a vacuum differential pressure seal 2
Are independently connected to each other via a pipe 20.

In this embodiment, an example in which the lower pinch roll 4B is fixedly provided on the side wall 3a of the housing 3 via the bearing 8B has been described, but the lower pinch roll 4B is rotated around it while contacting the seal roll 16B. Between the rolls 4A and 4B are openable and closable, and when the width of the strip P changes between the upper and lower pinch rolls 4A and 4B while passing through the plate, it is lowered depending on the position of the plate width change position with respect to the pinch rolls 4A and 4B positions. It is preferable to be able to change the side pinch pressure.

In the above configuration, the cylindrical shell of the upper pinch roll 4A
10 is made of metal and has a thin wall.
Since a gap S is formed between the roll shell 12 and the central portion of the cylindrical shell 10 from the vicinity of the center portion to the end portion, when the pressing roller 14 presses the bending roller 13 onto the upper pinch roll 4A, Since the cylindrical shell 10 bends downward within the range of the gap S and can contact the lower pinch rolls 4B, depending on the thickness and width of the strip P passing between the upper and lower pinch rolls 4A and 4B, Upper and lower pinch rolls
If the pressing cylinders 14 are individually controlled by a proportional solenoid valve or the like so that the bending roller pressing force of the pressing cylinder 14 becomes a predetermined value depending on the roll axis position between 4A and 4B, as shown in FIG. The cylindrical shell 10 of the upper pinch roll 4A is deformed into a bent shape corresponding to the strip P in the threaded plate in cooperation with the lower pinch roll 4B, and the gap between the upper and lower pinch rolls 4A and 4B on both end sides of the strip P is reduced. The space area S decreases, and the gas passage amount between the upper and lower pinch rolls 4A and 4B decreases.

Further, the pinch roll 4A and the seal roll 16A that is rotated by contacting the pinch roll 4A and the pinch roll 4B and the seal roll 16B that is rotated by contacting the pinch roll 4B are contact-sealed. The pinch rolls 4A, 4B and the seal rolls 16A, 16B and the side wall 3a of the housing 3 are sealed by roll side seal devices 18A, 18B, 18C, respectively. Seal roll 16A
And the amount of gas passing between the side wall 3a of the housing 3 and the seal wall 17A fixed to the top wall 3b and between the seal roll 16B and the side wall 3a of the housing 3 and the seal wall 17B fixed to the bottom wall 3c. Is reduced by the gas inflow resistance due to the minute gap.

The vacuum differential pressure sealing device as described above suppresses gas movement between the chambers at the inlet and outlet of the vacuum processing chamber 1 and the vacuum differential pressure seal 2, and the gas flowing into each chamber is converted into an internal gas by the vacuum pump 19. Is discharged to the outside.

Therefore, the vacuum degree can be increased stepwise from the atmospheric pressure to the vacuum processing chamber 1, and a predetermined vacuum degree can be reliably obtained.

〔The invention's effect〕

As described above, since the present invention uses the metal rolls for the upper and lower pinch rolls, it can be used even if the strip plate temperature is high. Further, the cylindrical shell of the upper pinch roll cooperates with the lower pinch roll by pressing downward by a plurality of bending rollers arranged above the upper pinch roll along the roll axial direction and capable of independently setting the pressing force. Since it can be deformed into a predetermined bending shape, the air leakage area between the upper and lower pinch rolls can be reliably reduced. Therefore, since the differential pressure sealing effect is secured, it is necessary to increase the number of stages of the vacuum differential pressure sealing device and increase the capacity of the vacuum pump as in the conventional case in order to maintain a predetermined degree of vacuum in the vacuum processing chamber. There is no.

[Brief description of the drawings]

FIG. 1 is a schematic vertical sectional view showing an embodiment of the present invention,
2 is an enlarged view of a main part of FIG. 1, FIG. 3 is a cross-sectional view taken along the line X-- of FIG. 2, and FIG. 1 ... vacuum processing chamber, 2 ... vacuum preliminary chamber, 3 ... housing, 4A ... upper pinch roll, 4B ... lower pinch roll, 5,10
…… Cylindrical shell, 6, 11 …… Supporting disk, 7,12 …… Roll shaft, 8A, 8B ……
Bearings, 13 ... Bending rollers, 14 ... Pressing cylinders, 16A, 16B ... Seal rolls, 17A, 17B ... Seal walls, 18A, 18B, 18C ... Side sealing devices.

Claims (1)

(57) [Claims] 1. A roll-type vacuum differential pressure seal device provided with a pair of upper and lower pinch rolls capable of passing a strip sandwiching a strip plate, wherein the upper pinch roll is a bendable cylindrical shell and a center of the cylindrical shell. It is configured by a roll shaft that supports the portion, forms a gap between the roll shaft from the vicinity of the center of the cylindrical shell to the end, and along the roll axial direction above the upper pinch roll, to the upper pinch roll. A strip-plate vacuum differential pressure seal device, wherein a plurality of bending rollers abutting against each other and rotating are arranged so that they can be pressed against an upper pinch roll independently of each other.