JPH0339473A - Band plate differential vacuum sealing device - Google Patents

Abstract

PURPOSE:To use the device at high temps. and to secure the differential vacuum sealing effect by thinning the cylindrical shells of the upper and lower metallic pinch rolls to reduce the air leakage area between both rolls. CONSTITUTION:A couple of upper and lower pinch rolls 4 between which a band plate P can be passed are provided in the roll-type differential vacuum sealing device. The cylindrical shell 10 of the upper pinch roll 4A is thinned. The center of the shell 10 is supported by the roll shaft, and a gap is formed between the shell extending from the center to the end and the roll shaft. Plural bending rollers 13 to be rotated in contact with the roll 4A are provided on the roll 4A, and the roll 4A is pressed.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention is directed to the use of strip materials such as steel strips (hereinafter simply referred to as "strip plates").
That's what it means. ) is continuously passed through the strip and subjected to various surface treatments in the vacuum processing chamber in the center. The present invention relates to a plurality of vacuum differential pressure sealing devices installed before and after a vacuum processing chamber to lower the degree of vacuum step by step from the vacuum level to the atmospheric pressure.

[Conventional technology]

Conventionally, as this type of vacuum differential pressure sealing device, a roll-type vacuum sealing device in which a strip is pinched between rolls to create a differential pressure before and after the strip is often used.

This roll-type vacuum differential pressure sealing device uses only pinch rolls made of rubber-lined rolls, or metal seals that are rotated by contacting the pinch rolls with rubber-lined rolls. A roll and a partition-like seal wall that covers the seal roll with a small gap (see Japanese Patent Application Laid-Open No. 62-4865, Japanese Utility Model Application No. 62-54911); It is known to use only pinch rolls.

In such a roll-type vacuum differential pressure sealing device, the space area S of the gap between the upper and lower pinch rolls on both ends of the strip is
is expressed by the following formula.

5=(A-W)xt However, A: Roll face W: # Width of the plate L: Thickness of the strip [Problem to be solved by the invention] However, the roll of the above (■) using a pinch roll made of a rubber-lined roll In the type vacuum differential pressure sealing device, due to the elasticity of the rubber coating the roll surface of the pinch roll,
Even if the width of the strip is small, the differential pressure sealing effect can be maintained by bringing the spatial area S of the gap between the upper and lower pinch rolls close to zero, but there is a limit to the heat resistance of rubber, and the strip temperature may exceed 250°. There was an inconvenience that it could not be used if it was C or higher.

In addition, the roll-type vacuum differential pressure sealing device (2) using metal pinch rolls can be used even when the strip is at a high temperature, but the space area of the gap between the upper and lower pinch rolls is S.
is large (especially when passing through a narrow strip with a large thickness), and the differential pressure sealing effect is impaired. When the width of the strip is narrow, the space area S of the gap between the upper and lower pinch rolls occupies more than half of the total leakage area of the seal. In order to maintain a predetermined degree of vacuum in the vacuum processing chamber, it is necessary to increase the number of stages of the vacuum differential pressure sealing device compared to the vacuum differential pressure sealing device described in (2) above, and it is necessary to increase the capacity of the vacuum pump.

[Purpose of the invention]

This invention was made to solve the above problems, and aims to enable use even when the strip plate is at high temperature, and to reduce the space area of the gap between the upper and lower pinch rolls.

[Means to solve the problem]

As shown in FIGS. 1 to 3, the strip vacuum differential pressure sealing device of the present invention is a roll-type vacuum sealing device equipped with a pair of upper and lower pinch rolls 4A and 4B that can sandwich and pass the strip P. , the cylindrical shell 1 of the upper pinch roll 4A
0 is formed to have a thin wall, the central part of this cylindrical shell 10 is supported by a roll shaft 12, and a gap S is formed between the center part of the cylindrical shell 10 and the roll shaft 12 from the vicinity of the central part to the end part, and an upper pinch A plurality of pending rollers 14 which are rotated in contact with the upper pinch roll 4A are arranged above the roll 4A along the roll axis direction so that they can be pressed onto the upper pinch roll 4A independently of each other. This configuration achieves the above object.

[For production]

When the pending roller 13 is pressed onto the upper pinch roll 4A by the pressing cylinder 14, the cylindrical shell 10 bends downward within the range of the gap S with the roll shaft 12.
Strip plate P passing between upper and lower pinch rolls 4A and 4B
If the pressing cylinders 14 are individually controlled so that the pressing force of the pending rollers of the pressing cylinders 14 becomes a predetermined value depending on the thickness and width of the upper and lower pinch rolls 4A and 4B, and the arrangement position in the axial direction of the rolls between the upper and lower pinch rolls 4A and 4B, the upper pinch The cylindrical shell 10 of the roll 4A is deformed into a bent shape corresponding to the strip P being threaded in cooperation with the lower pinch roll 4B.

〔Example〕

An embodiment of the present invention will be described below with reference to FIGS. 1 to 3.

In the figure, 1 is a vacuum processing chamber, and 2 is a plurality of vacuum differential pressure seals placed before and after the vacuum processing chamber l, which are successively installed in the strip passing direction in the housing 3 (in the direction of the arrow in the figure). There is.

4A is a metal upper pinch roll, and 4B is a metal lower pinch roll, which are installed at the entrance/exit portion of each chamber in the housing 3 so as to face each other across the strip passing line L.

The cylindrical shell 5 of the lower pinch roll 4B is formed within the thickness,
Support disks 6 are fixed to both ends of the cylindrical shell 5, and roll shafts 7 are protruded from each support disk 6 coaxially with the cylindrical shell 5.

The roll shaft 7 is rotatably supported by a bearing 8B provided on the side wall 3a of the housing 3, and is connected to a drive device via a universal spindle 9.

The cylindrical shell 10 of the upper pinch roll 4A is formed thin, and a pair of support disks 11 are fixed at intervals in the center of the cylindrical shell 10, and a roll shaft 12 is attached to each of the support disks 11. It protrudes coaxially with the shell 10.

The roll shaft 12 is mounted on a bearing 8A provided on the side wall 3a of the housing 3, and is rotatably supported via the bearing 8A.

A gap S is formed between the cylindrical shell 10 and the roll shaft 12 from the vicinity of the center to the end, and by pressing the cylindrical shell 10 downward, it can be bent downward using the center as a fulcrum. ing.

13 is a plurality of pending rollers (eight in the example)
Four pieces are placed on each side of the strip threading line L along the roll axis direction above the upper pinch roll 4A, and are rotated by contacting the upper pinch roll 4A. ing.

Reference numeral 14 designates a plurality of pressing cylinders (hydraulic cylinders in the embodiment), which are installed on the top wall 3b of the housing 3 at intervals in a direction perpendicular to the strip passing direction, and the piston rod is attached to the top wall 3b.
The roller 13 is inserted into the housing 3 through an O-ring 15 provided at the end thereof, and the pending roller 13 is rotatably attached to the tip thereof.

The pressing cylinders 14 can be controlled separately so that the force (roller pressing force) pressing the pending roller 13 against the upper pinch roll 4A becomes a predetermined set value.

16A and 16B are metal seal rolls that also serve as backup rolls, and are rotatably supported via bearings provided on the side wall 3a of the housing 3, and are connected to the upper and lower pinch rolls 4A, 4.
They are respectively disposed on the strip passing direction side or on the opposite strip passing direction side of B, and are rotated by coming into contact with the pinch rolls 4A, 4B.

17A and 17B are sealing walls, which are the side walls 3a of the housing 3.
They are fixed to the top wall 3b, side wall 3a, and bottom wall 3C, respectively, and are disposed on the strip passing direction side with a minute gap therebetween so as to be in sliding contact with the circumferential surfaces of the seal rolls 16A and 16B.

18A, 18B, 18C are ring-shaped roll side sealing devices, and upper and lower pinch rolls 4A, 4B.

It is attached to the inner surface of the side wall 3a of the housing 3 so as to be in constant sliding contact with the end side surfaces of the seal rolls 16A, 16B.

19 is a vacuum pump, which connects the vacuum processing chamber 1 and the vacuum differential pressure seal 2.
are connected to each other independently via piping 20.

In this embodiment, the lower pinch roll 4B is fixedly provided on the side wall 3a of the housing 3 via the bearing 8B, but as shown in FIG.
is provided so that it can open and close between the rolls 4A and 4B by rotating around the seal roll 16B while contacting it, and when the width of the strip P changes between the upper and lower pinch rolls 4A and 4B during sheet passing, the pinch roll It is preferable that the lower pinch pressure can be changed depending on the position of the plate width change point relative to the 4A and 4B positions.

In the above configuration, the cylindrical shell 10 of the upper pinch roll 4A is made of metal and formed thin, is supported by the roll shaft 12 at the center, and is connected to the roll shaft 12 from the vicinity of the center to the end of the cylindrical shell 10. Since a gap S is formed between them, when the pending roller 13 is pressed onto the upper pinch roll 4A by the pressing cylinder 14, the cylindrical shell 10 bends downward within the range of the gap S and hits the lower pinch roll 4B. Therefore, depending on the thickness and width of the strip P passing between the upper and lower pinch rolls 4A and 4B,
Furthermore, if the pressing cylinders 14 are individually controlled by a proportional solenoid valve or the like so that the pressing force of the pressing cylinder 14 on the pending roller becomes a predetermined value depending on the position in the axial direction of the rolls between the upper and lower pinch rolls 4A and 4B, as shown in FIG. As shown in , the cylindrical shell IO of the upper pinch roll 4A is deformed into a bent shape corresponding to the strip P being threaded in cooperation with the lower pinch roll 4B, and the upper and lower pinch rolls 4A at both ends of the strip P are bent. , 4B decreases, and the amount of gas passing between the upper and lower pinch rolls 4A, 4B decreases.

Furthermore, a contact seal is formed between the pinch roll 4A and the seal roll 16A that rotates while contacting the pinch roll 4A, and between the pinch roll 4B and the seal roll 16B that rotates while contacting the pinch roll 4B. Sealing is performed between the vinyl rolls 4A, 4B and the seal rolls 16A, 16B and the side wall 3a of the housing 3 by roll side seal devices 18A, 18BS and 18C, respectively. Between the seal roll 16A and the seal wall 17A fixed to the side wall 3a and the top wall 3b of the housing 3, and between the seal roll 16B and the seal wall 17B fixed to the side wall 3a and the bottom wall 3C of the housing 3. The amount of gas passing through is reduced by gas inflow resistance due to minute gaps.

The vacuum processing chamber 1 is sealed by the vacuum differential pressure sealing device as described above.
Gas movement between the chambers at the entrance and exit portions of the vacuum differential pressure seal 2 is suppressed, and the gas that has flowed into each chamber is discharged to the outside as internal gas by the vacuum pump 19.

Therefore, it is possible to increase the degree of vacuum stepwise from atmospheric pressure to the vacuum processing chamber 1 to reliably obtain a predetermined degree of vacuum.

〔Effect of the invention〕

As described above, since the present invention uses metal rolls for the upper and lower pinch rolls, it can be used even when the strip temperature is high. In addition, the cylindrical shell of the upper pinch roll is formed with a thin wall, and is pressed downward by a plurality of pending rollers arranged above the upper pinch roll along the roll axis direction and whose pressing force can be set independently of each other. Since the cylindrical shell of the upper pinch roll can be deformed into a predetermined bent shape in cooperation with the lower pinch roll, the air leakage area between the upper and lower pinch rolls can be reliably reduced. Therefore, since the differential pressure sealing effect is ensured, in order to maintain a predetermined degree of vacuum in the vacuum processing chamber, it is necessary to increase the number of stages of the vacuum differential pressure sealing device and increase the capacity of the vacuum pump as in the past. There isn't.

[Brief explanation of drawings]

FIG. 1 is a schematic vertical sectional view showing an embodiment of the present invention;
2 is an enlarged view of the main part of FIG. 1, FIG. 3 is a sectional view taken along the line X-- in FIG. 2, and FIG. 4 is an explanatory diagram of the operation. ■...Vacuum processing chamber, 2...Vacuum preliminary chamber, 3...Housing, 4A...Top pinch roll, 4B...Bottom Pinch roll, 5.10... Cylindrical shell, 6.11...
・Support disc, 7.12...Roll shaft, 8A, 8
B...Bearing, 13...Pending roller, 14...Press cylinder, 16A, 16B...Seal roll, 17A, 1
7B... Seal wall, 18A, 18B, 18C.
...Side seal device. C Figure 41:5

Claims (1)

[Claims] (1). In a roll-type vacuum differential pressure sealing device equipped with a pair of upper and lower pinch rolls that can sandwich and pass a strip,
The cylindrical shell of the upper pinch roll is formed thin, the center part of this cylindrical shell is supported by a roll shaft, and a gap is formed between the center part of the cylindrical shell and the roll shaft from the vicinity of the end to the upper pinch roll. A strip plate characterized in that a plurality of pending rollers that are rotated in contact with the upper pinch roll are arranged above the pinch roll along the roll axis direction so that they can be pressed onto the upper pinch roll independently of each other. Vacuum differential pressure sealing device.