JPH01172570A - Differential-pressure sealer for inner and outer differential-pressure chamber of continuous vacuum treating device - Google Patents

Abstract

PURPOSE:To form the subject highly efficient sealer by using a seal piece and a touch roll for the guide roll of a band steel in the differential-pressure chambers before and behind a continuous vacuum treating chamber at the time of introducing a long- sized band steel into the treating chamber. CONSTITUTION:A long-sized band steel 13 is continuously supplied into the vacuum treating chamber through the differential-pressure chambers 1 and 2, and vacuum deposition, etc., are applied to the steel. In this case, the band steel 13 is brought into contact with guide rolls 11 and 11 in the chambers 1 and 2, and passed through the chambers 1 and 2 which are stepwise depressurized respectively to P1 and P2. The differential-pressure seals 7 and 8 each consisting of the guide roll 11, the seal piece 12, and the touch roll 18 are fixed to the openings 4 and 6 formed at the inlet- side end walls 3 and 5 of the chambers 1 and 2. The seal piece 12 has a roll surface sealing plane 15 sharing a tiny gap delta1 with the roll 11 and a concave circular sealing plane 16 sharing a tiny gap delta2 with the surface of a steel sheet 13a. The touch roll 18 is used to press the band steel 13 on the surface 11a of the guide roll 11, and exhibits excellent differential-pressure sealing.

Description

Detailed Description of the Invention (Industrial Application Field) The present invention provides a method for applying metals and ceramics to the surface of a long thin strip such as a cold-rolled or hot-rolled steel strip by a so-called dry brating method such as vacuum evaporation or ion brating. Boundaries between multiple spatial regions with pressure differences (abbreviated as differential pressure chambers) provided on the inlet and outlet sides of an air-to-air continuous vacuum processing device for coating such thin films. The present invention relates to a differential pressure sealing device installed in a differential pressure space for continuously passing a long ribbon while maintaining a pressure difference in a differential pressure space.

(Prior Art) Many sealing devices between pressure differential chambers of this type have been proposed in the past, including those disclosed in U.S. Patent No. 2,384,500, U.S. Pat. No. 2,972,330, and U.S. Pat. No. 2,996,410; News Vol, 21. (1984)
No. 6P, 1 to 7 are known.

In particular, the last cited document states that a pair of rolls are arranged with their axes slightly shifted in the sheet-threading direction, and the long material that is passed by being pressed between the pair of rolls is placed on the circumferential surface of the rolls. It has been proposed to expand the sealing area by partially following the seal. In addition, recently released Japanese Patent Application Publication No. 62-13
Japanese Patent No. 572 proposes an attempt to maintain a differential pressure inside the enclosure by combining a pair of sheet passing rolls with a seal bar and an adapter that surround a long material.

(Problems to be Solved by the Invention) However, in all of the above-mentioned conventional techniques, the long material is passed between a pair of rolls while being pressed, so the workpiece is subjected to bending stress and compression on its front and back surfaces. Stress works. Furthermore, in the seal portion close to the atmosphere side, leakage air causes vibrations in the long material. The generation of such stress and vibration has a negative effect on product quality, and for example, when an air-to-air method is applied to a unidirectional silicon mouth plate, there is a problem that magnetic properties are deteriorated.

The purpose of the present invention is to solve the above-mentioned problems that occur when processing a long ribbon using the air-to-air method, and to generate local surface pressure and vibration in the ribbon that cause deterioration of product quality. The purpose of the present invention is to provide a sealing device that can reliably seal without any problems.

(Means for Solving the Problems) According to the present invention, the pressure difference is maintained for continuously passing the long ribbon while maintaining the pressure difference between the plurality of input and output side differential pressure chambers of the continuous vacuum processing apparatus. In the sealing device, as shown in Figure 1,
A single guide roll 11 is provided at a position adjacent to the boundary opening 4 in each differential pressure chamber 1 so as to wrap the long thin ribbon 13 around a part of its outer periphery and guide it. A cylindrical seal piece 12 that surrounds the entire circumference has its outer end airtightly attached to the boundary opening 4 , and the inner end of the seal piece 12 that protrudes from the boundary opening into the differential pressure chamber 1 is connected to the guide roll 11 . The seal piece is placed close to the surface 11a of the seal piece and the surface of the ribbon portion 13a wound around the guide roll, and is placed close to the guide roll surface where the long ribbon is not wound around the inner end of the seal piece at a minute interval δ. A roll surface sealing surface 15 having a concave arc shape along the ribbon portion 13a and a ribbon surface sealing surface 16 having a concave arc shape closely following the surface of the ribbon portion 13a with a minute gap δ2 are provided. The present invention is characterized in that a touch roll 18 is provided that presses the long thin ribbon 13 against the guide roll surface 11a at the point where it separates.

(for production) According to the above configuration, the long ribbon 13 is at atmospheric pressure p.

to the pressure p1 in the first differential pressure chamber 1 under a particularly high differential pressure, at which time the concave arc-shaped sealing surface 15.1
6, an extremely small gap δ1. Since only δ2 is separated, an effective differential pressure seal is not only achieved, but also the long thin ribbon 13 is wound around the guide roll 11 at a deep winding angle θ, and the touch roll 18 has a deep winding angle θ. By pressing the thin ribbon portion 13, vibration generation of the long thin ribbon 13 due to leak gas is suppressed.

Micro gap δ1. By setting δ2 to about 0.1 to 0.5 mm, the differential pressure seal device, for example, width 300 to 120
When passing a long ribbon of 0 mm and thickness of 0.1 to 1.2 mm,
1.5 as a multiplier for the pressure in the adjacent lower differential pressure chamber
It was possible to maintain a pressure difference of about 20 times. Furthermore, at this time, no vibration was observed in the long ribbon, and as shown in Figure 3, as a result of analyzing the behavior of leak air, it was found that the touch roll 18 was blocking the flow of leak air. did.

(Embodiment) FIG. 1 shows an embodiment of a differential pressure sealing device according to the present invention.

In FIG. 1, 1.2------ is a plurality of first . 2nd--1-- shows a differential pressure chamber. The first differential pressure chamber 1 has a differential pressure chamber inlet opening 4 provided in an end wall 3 on the inlet side thereof.
is opened to the outside air at atmospheric pressure p0, and the inside of the first differential pressure chamber 1 is reduced to an internal pressure p of, for example, 150 m/m Hg. It opens to the first differential pressure chamber 1 through the differential pressure chamber inlet opening 6, and the inside thereof is reduced to an internal pressure p2 of, for example, 30 m/mHg. The following sequential differential pressure chambers are also communicated in the same manner through their respective inlet openings, and a detailed explanation thereof will be omitted.

As shown in the figure, there is a differential pressure inside the first differential pressure chamber 1 and the second differential pressure chamber 2 at their respective boundaries, that is, at positions adjacent to the differential pressure chamber inlet openings 4 and 6 of the inlet side end walls 3 and 5. Seal devices 7 and 8 are provided, respectively. Since these differential pressure sealing devices 7 and 8 have substantially the same structure, only one of them will be described below.

The differential pressure sealing device 7 includes a guide roll 11 and a seal piece 12, which are rotatably supported on the side wall of the casing 9 of the differential pressure chamber 1 by a rotating shaft 10, and a part of the outer circumference of the guide roll 11 is treated. A long thin ribbon 13 like a steel strip is wound around it.

The seal piece 12 has a short rectangular cylinder shape or an annular shape that surrounds the entire circumference of the long thin ribbon 13, defines a passage 13 for the long thin ribbon 1 inside thereof, and has a protrusion on the outer periphery of the outer end. It is airtightly attached to the inlet opening 4 of the end wall 3 by a mounting flange 14 provided, and protrudes into the differential pressure chamber 1 through the inlet opening 4, and its inner end is connected to the surface 11a of the guide roll 11 and the surface 11a of the guide roll 11. Long ribbon portion 1 wrapped around guide roll 11
It is configured to cooperate with the surface of 3a to seal the inlet opening 4.

That is, the inner end of the seal piece 12 has a 0.1
As shown in FIG. 2, the roll surface sealing surface 15 has a concave arc shape that closely follows a minute gap δ1 of about 0.5 mm, and the wrapping that is wrapped around the guide roll 11 is a thin strip portion. It has a concave arc-shaped ribbon surface sealing surface 16 that closely follows the surface of the ribbon 13a with a minute gap δ2 of about 0.1 to 0.5 mm, and from this ribbon surface sealing surface 16, it extends in the tangential direction of the guide roll 11. It has a slit-shaped ribbon passageway 17 that opens much larger than the cross-sectional dimension of the long ribbon 13 that extends to .

Furthermore, at a point where the long thin ribbon 13 separates from the guide roll 11 at a distance l from the inner end 12a of the seal piece 12, the long thin ribbon 13 is lightly pushed against the guide roll 11. A touch roll 18 is arranged to prevent vibrations caused by leaked air.

(Effects of the Invention) The differential pressure sealing device according to the present invention uses only a single guide roll in combination with a seal piece and a touch roll, and can achieve high differential pressure without generating local stress or vibration in the long ribbon. A seal is achieved.

Therefore, it is possible to eliminate the risk of product quality deterioration, and it is not only suitable for use when forming a drive rating film on ultra-low core loss unidirectional silicon steel sheets, but also reduces local stress and vibration. The effect can be obtained that it can be suitably used even for mild steel, which easily affects the quality of the product.

[Brief explanation of the drawing]

FIG. 1 is a schematic diagram of a differential pressure sealing device according to the present invention, FIG. 2 is an end view of the first circle viewed in the direction of the arrow on line 1--2, and FIG. 3 is a diffraction diagram of a leak gas flow. 1.2... Differential pressure chamber 3,5... End wall 4.6.
...Opening 7.8...Differential pressure sealing device 11.
・Guide roll 12 ・Seal piece 13 ・
...Long ribbon 13a... Wrap around the thin strip part 15... Roll surface sealing surface 16... Thin strip surface sealing surface

Claims (1)

[Claims] 1. In a differential pressure sealing device for continuously passing a long ribbon while maintaining a pressure difference between a plurality of inlet and outlet differential pressure chambers in a continuous vacuum processing device, a sealing device adjacent to the boundary opening in each differential pressure chamber A single guide roll is provided to guide the long ribbon by wrapping it around a part of its outer circumference, and a cylindrical seal piece that surrounds the entire circumference of the long ribbon defines its outer end. The inner end of the seal piece, which is airtightly attached to the boundary opening and protrudes from the boundary opening into the differential pressure chamber, is brought close to the surface of the guide roll and the surface of the thin ribbon portion wound around the guide roll, and this seal piece A concave arc-shaped roll surface sealing surface that runs close to the guide roll surface on which the long ribbon is not wound around the inner end at a minute interval, and a concave surface that runs close to and close to the surface of the ribbon portion with a minute gap. A continuous vacuum processing apparatus characterized by being provided with an arc-shaped ribbon surface sealing surface and a touch roll that presses the long ribbon against the guide roll surface at the point where the long ribbon separates from the guide roll. Differential pressure sealing device for the inlet and outlet differential pressure chambers.