JPH0331474A - Differential pressure sealing device - Google Patents

Abstract

PURPOSE:To provide a high differential pressure seal by forming a microspacing between a sealing roll and a sealing piece and providing plural barrier plates enclosing roll shaft of the sealing roll, thereby providing microspacings. CONSTITUTION:A casing body 2 has an aperture 2a to allow the passage of a long-sized thin strip 1. The sealing piece 4 enclosing the outer periphery of the sealing roll 3 to guide the winding of the long-sized thin strip 1 around the roll over nearly half the periphery to form the microspacing. The sealing piece 4 has a through-hole 4a communicating with the aperture 2a of the casing body 2. A hermetic annular body 5 is connected to the casing body 2. The annular body 5 has the plural barrier plate plates 5a enclosing the roll shaft 3a of the sealing roll 3 over the entire periphery to form the microspacings with the roll shaft 3a. The pressure is gradually reduced toward the casing body 2 from the atmosphere side between the barrier plates 5a to form the spaces a, b, c, d having the pressure differences. The hermetic sealing effect is improved in this way without installing O-rings.

Description

Detailed Description of the Invention (Industrial Application Field) While continuously feeding a long ribbon, such as a cold-rolled wire or a hot-rolled wire, vacuum deposition and ion deposition are applied to the long ribbon. When surface treatment is performed using so-called dry brating methods such as brating and sputtering, the degree of vacuum is sequentially increased and then lowered by using multiple spatial regions with different pressures to reach the dry brating region.
An air-to-air method is used. The present invention relates to a differential pressure sealing device suitable for guiding the passage of a long ribbon while maintaining the pressure difference between the differential pressure chambers.

(Prior art) Regarding the air-to-air one-way system, for example, US Pat. No. 2,384,500, US Pat.
Including Specification No. 410, Mitsubishi Heavy Industries Technical Report Vol. 21
(1984) can already see a number of proposals, such as p1-7 of Nα6.

However, since all of the above-mentioned techniques involve passing a long ribbon under pressure between a pair of rollers, depending on the type of steel used, the material properties may deteriorate due to the surface pressure of the rollers.

In addition, a sealing device has a mechanism in which a seal roll around which a long ribbon is wound and a seal piece that forms a minute gap between the seal roll and the seal piece are arranged inside the casing body (see Figure 2). Some attempts have been made to maintain the pressure difference between the differential pressure spaces in continuous vacuum processing equipment, but in general, the processing section of continuous vacuum processing equipment reaches a high temperature, and the output of the equipment may be affected by the heat of the long ribbon processed there. There was a disadvantage in that the gap between the seal portions of the differential pressure seals disposed on the side changed and the seal roll stopped rotating. In addition, in a sealing device with this type of structure, the roll shaft of the seal roll is supported by a bearing outside the casing body due to reasons such as the relatively high temperature inside the differential pressure chamber. An O-ring is placed between the end of the roll and the casing body as a seal, but since the frictional resistance caused by this is large, it is necessary to rotate the seal roll at high speed, that is, to thread the long ribbon at high speed. This was a major obstacle to increasing productivity.

(Problem to be solved by the invention) A high differential pressure seal can be achieved without subjecting a long ribbon to strong surface pressure that causes quality deterioration or requiring strict adjustment of the gap in the sealing part. It is an object of the present invention to propose an apparatus capable of threading a long ribbon at a high speed.

(Means for Solving the Problems) The present invention provides a differential pressure seal that maintains the pressure difference between spatial regions having a pressure difference and guides the continuous passage of the long ribbon. a casing body having an opening for passage therethrough and serving to form a spatial region with a pressure difference; and at least one seal for guiding the winding of the long ribbon at the boundary between the spatial regions formed by the casing body. The seal piece is provided with a seal piece having a through hole that connects the outer circumferential surface of the moniseal roll to the opening of the casing body, and the seal piece that surrounds the outer circumference of the roll and the seal roll over approximately half the circumference to form a minute gap, and has a seal piece that has a through hole that connects the outer circumference of the moniseal roll to the opening of the casing body, and the seal piece that protrudes from the casing body. A sealed annular structure having a plurality of barrier plates surrounding the entire circumference of the roll shaft and forming a small gap between them and the roll shaft, and forming a space with a pressure difference between the barrier plates along the axial direction. The differential pressure sealing device is characterized in that a sealing annular body is arranged and one end of the sealing annular body is connected to a casing body.

Now, FIGS. 1(a) and 1(b) show an example of the apparatus according to the present invention, in which the number 1 is a long ribbon, and the number 2 is, for example, a space where the pressure is P and a space where the pressure is P. This casing body 2 is useful for
It has an opening 2a through which the long ribbon 1 passes. 3 is a seal roll whose both ends are rotatably supported via bearings j, and serves to guide the winding of the long ribbon l at the boundary between the spatial regions formed by the casing body 2; 4 is a seal piece; This seal piece 4 surrounds the outer periphery of the seal roll 3 over approximately half the circumference and leaves a minute gap δ.
and λ, and has a through hole 4a connected to the opening 2a of the casing body 2. Further, 5 is a sealing annular body connected to the casing body 2, and this annular body 5 surrounds the roll shaft 3a portion of the seal roll 3 protruding from the casing body 2 over its entire circumference, and has a microscopic seal between it and the roll shaft 3a. It is equipped with barrier plates 5a forming a gap σ, and the pressure is gradually reduced from the atmosphere side toward the casing body 2 between the barrier plates 5a, creating spaces a and b with a pressure difference.
, c, d...

Note that the number of spaces in the sealing annular body 5 is not particularly limited and can be increased or decreased as necessary. Further, 5b of the sealing annular body 5 has a pressure difference between the spaces a and b.
, c, . . . , and is connected to a vacuum pump (not shown).

(Function) In the apparatus configured as described above, the long ribbon 1 wound around the seal roll 3 is heated, for example, from a pressure of P to a pressure of P! When the seal roll 3 and the seal piece 4 are transported into a differential pressure chamber maintained at A differential pressure seal will be achieved.

In addition, the roll shaft 3a of the casing body 2 and the seal roll 3
In place of the conventional structure shown in Fig. 2, a sealing annular body 5 forming a plurality of differential pressure spaces is used to prevent air from entering between the O-ring and the 6, the sealing effect can be improved and the rotational speed of the sealing roll 3 can be advantageously increased without the need to install a sealing roll 6.

In addition, each gap δ in the above differential pressure sealing device.

It is desirable that λ and σ be as small as possible so as not to interfere with the rotation of the seal roll 3. In this invention, the above-mentioned gap δ is about plate thickness + 〇, 2a + m, and λ and σ are 0 in either case. It is best to set it to .2mm+ or less. Further, in the present invention, one seal roll 3 is arranged in each differential pressure chamber, but it goes without saying that a plurality of seal rolls 3 can be arranged as required.

(Example) A long thin ribbon 1 was conveyed using a differential pressure sealing device as shown in FIG. 3, in which a plurality of devices having the structures shown in FIGS. The pressure was sequentially introduced into each differential pressure chamber from atmospheric pressure P0 at a rate of 2 strokes/win, and the differential pressure situation at that time was investigated. As a result, (pl) in Figure 3 is 70
++u++ H,0, (h) is l Tart, (p
z) is I Xl0-'Torr, , (P4) is I X
10-'Torr, and inside each space of the sealed annular body 5 in the differential pressure chamber (P4), as shown in FIG. 1(b), a is 70 mm 820, b is l
c is I Xl0-3 TorrSd is I X 10-'T
orr, and it was confirmed that a very high differential pressure could be maintained.

In addition, the roll end surface of the seal roll 3 and the casing body 2
When compared with a device with a conventional structure in which an O-ring is placed between
It can be set to 3 or less.

(Effects of the Invention) According to the present invention, the differential pressure roll can be rotated at high speed, so productivity can be significantly improved.

Furthermore, driving power can be significantly reduced.

[Brief explanation of drawings]

FIGS. 1(a) and (b) are structural explanatory diagrams of a differential pressure seal device according to the present invention. FIG. 2 is a schematic diagram of a conventional differential pressure seal device. FIG. 3 is a schematic diagram of a conventional differential pressure seal device. It is a figure showing an example. 1... Long ribbon 2... Casing body 3
...Seal roll 3a...Roll shaft 4...
Seal piece 4a... Through hole 5... Sealing annular body 5a... Barrier plate 6... 0 ring
7...Flexible cover 8...Deflector
Rolls δ, λ, σ...Small gaps a, b, c, d...Space j...Bearing j...Bearings are the same

Claims (1)

[Claims] 1. In a differential pressure seal that maintains the pressure difference between spatial regions with a pressure difference and guides continuous passage of a long ribbon, the spatial region with a pressure difference has an opening through which the long ribbon passes. a casing body that serves to form a casing body; and at least one seal roll that guides the winding of the long ribbon at the boundary between the spatial regions formed by the casing body; The seal piece is provided with a seal piece having a through hole that forms a minute gap and connects from the outer circumferential surface of the seal roll to the opening of the casing body, and is attached to the roll shaft of the seal roll protruding from the casing body, surrounding it all around and connecting with the roll shaft. A sealing annular body having a plurality of barrier plates forming minute gaps between the barrier plates and forming a space with a pressure difference between the barrier plates along the axial direction is disposed, and one end of the sealing annular body is provided. A differential pressure seal device characterized in that the is connected to the casing body.