JPH0379988A - Sealing roll supporting device for differential pressure sealing apparatus - Google Patents

Abstract

PURPOSE:To prevent deflection of a component material of a differential pressure chamber from transmitting to a sealing roll due to the inner and outer pressure difference of the pressure chamber by incorporating the bearing of the roll of a differential pressure sealing apparatus in a housing on a supporting base outside the pressure chamber, and covering the periphery of the shaft of the rotary sealing roll extending from the pressure chamber into the housing with a hollow member having flexibility and sealability. CONSTITUTION:A differential pressure chamber 1 is evacuated in vacuum, and a sealing roll 3 is rotated by a chain wheel 14 to continuously convey a long material 4. The periphery of the material 4 is sealed by a differential pressure sealing apparatus composed of the roll 3 and a sealing piece 5, and the pressure of the chamber 1 can be maintained in vacuum pressure. The component member of the chamber 1 is deflected by the inner and outer differential pressures, but the roll 3 is provided in a housing 10 a supporting base 9 independently separated from the chamber 1 and the shaft 3a of the roll 3 extending from the chamber 1 to the housing 10 is covered with a hollow member 11 having flexibility and sealability. Accordingly, the deflection of the chamber 1 is not transmitted to a bearing 8, the roll 3 is smoothly rotated to prevent the material 4 to be conveyed from moving in a zigzag manner.

Description

Detailed Description of the Invention (Industrial Application Field) The present invention is provided for maintaining a pressure difference between spaces when a long object such as a strip steel plate is conveyed through a space where there is a pressure difference. The present invention relates to a device for supporting a seal roll of a differential pressure seal device.

(Prior Art) Conventionally, when a long object such as a strip steel plate is subjected to continuous vacuum processing in a vacuum processing chamber, a space called a differential pressure chamber is created in order to maintain the vacuum in the vacuum processing chamber as shown in Fig. 1. As shown in the figure, it is installed in the conveyance path of long objects leading to the vacuum processing chamber.
Each differential pressure chamber a is provided with a differential pressure seal device d consisting of a rotatable seal roll b and a seal piece C close to the seal roll b, and the seal roll b is wound and sent to the vacuum processing chamber. The periphery of the long object e being transported is sealed. Each differential pressure chamber a is provided with an exhaust hole f connected to a vacuum pump, and the pressure in each differential pressure chamber a is controlled to be lower as it approaches the vacuum processing chamber. Both ends of the seal roll b are supported by bearings in an airtight casing g bolted to the side wall of the differential pressure chamber a, as shown in the second diagram, and one end thereof is led out to the outside via a seal mechanism i. Then, chain wheel j is installed. k is a blind plate.

(Problems to be Solved by the Invention) In the conventional differential pressure seal device described above, the bearing of the seal roll b is attached to the housing g that is integrated with the side wall of the differential pressure chamber a, so that the structure of the differential pressure chamber a is When the member is bent due to the pressure difference between the inside and outside, the bearing of the seal roll b is tilted and the axis is misaligned, resulting in the disadvantage that the rotation of the seal roll b becomes heavy or stops rotating. Ta. In addition, although a plurality of seal rolls b are normally provided, if the parallelism between the seal rolls 6 deviates due to the inclination of the bearing due to the above-mentioned cause, the long object e being conveyed becomes meandering and becomes continuous. There was an inconvenience that transportation could not be carried out.

The object of the present invention is to eliminate the above-mentioned drawbacks and inconveniences of the differential pressure seal device.

(Means for Solving the Problems) In the present invention, a rotatable seal roll and a seal piece close to the rotatable seal roll are provided in a differential pressure chamber, and the periphery of a long object to be conveyed is wrapped around the seal roll. In the seal roll and seal piece, the bearing of the seal roll is housed in an airtight housing provided on a support stand outside of the differential pressure chamber and separate from the differential pressure chamber. By covering the periphery of the shaft portion of the seal roll extending from the chamber into the housing with a flexible and airtight hollow body such as a bellows having both ends fixed to the differential pressure chamber and the housing, I tried to achieve my goal.

(Function) When the differential pressure chamber is evacuated and the seal roll inside is rotated, a long object is conveyed, and the pressure difference between the inside and outside causes the seal roll and seal piece to seal around the long object. It is maintained by At this time, the constituent members of the differential pressure chamber bend due to the pressure difference between the inside and outside, but the bearing of the seal roll is housed in an airtight housing provided on a support stand separated from the differential pressure chamber. The periphery of the shaft of the seal roll extending from the chamber into the housing is covered with a flexible and airtight hollow body such as a bellows attached to the differential pressure chamber and the housing. The differential pressure can be maintained, and even if deflection occurs in the differential pressure chamber, it will not be transmitted to the bearing, and the axial center of the seal roll will not be misaligned. Therefore, abnormal rotation of the seal rolls and deviations in axis parallelism between the seal rolls are eliminated, and long objects can be transported smoothly.

(Embodiment) An embodiment of the present invention will be explained based on FIGS. 3 and 4. In the drawings, reference numerals (1) (1) are
), (3) is a seal roll provided in the differential pressure chamber (1), and (4) is a seal roll (4) that passes from the outside through the opening (la) of each differential pressure chamber (1). 3) is rolled up and transported to a vacuum processing chamber (not shown), such as a long object such as a strip steel plate, (5) is a seal piece attached to the opening (La), and the seal roll (3) and seal piece (5
) constitutes a differential pressure sealing device.

The seal piece (5) has a passage opening (6) for the long object (4).
a) and a sealing curved surface (7) (7) forming a slit (8b) close to the circumferential surface of the sealing roll (3) and allowing conveyance of the elongated object (4).

The above configuration is the same as the conventional one, and each differential pressure chamber (1)
It is also the same as in the conventional system that the pressure is maintained by the differential pressure sealing device, but in the present invention, the bearing (8) of the seal roll (3) is connected to the differential pressure chamber (8). An airtight casing (IQ (10) installed on a support stand (9) which is separate and independent from this outside of 1), and further from the differential pressure chamber (1) into the casing (IO). Extending seal roll <3)
The periphery of the shaft portion (3a) (aa) is covered with a flexible and airtight hollow body (11) C11 such as a bellows whose both ends are fixed to the differential pressure chamber (1) and the housing (IO). I did it like that.

In the illustrated example, a blind plate 0 is attached to one casing (IQ) to make the inside airtight, and the other casing (inside 10 is a shaft part (3a) provided with a sealing mechanism I'I3 and further extending to the outside). The surrounding area was airtightly sealed.

(!Φ is the chain wheel driven by the seal roll (3).

In addition, each support stand (9) (9) is integrally connected with a connecting member (l) as shown in FIG. In this case, each support stand (9) (9) can be moved in a horizontal plane, and the parallelism of each seal roll (3) (3) can be easily adjusted.

To explain its operation, after evacuating the inside of the differential pressure chamber (1), the chain wheel (I@
The continuous conveyance of the long object (4) is performed by giving rotation to the periphery of the long object (4). Since the pressure in each differential pressure chamber (1) is sealed, the pressure in each differential pressure chamber (1) can be maintained at vacuum pressure.The constituent members of the differential pressure chamber (1) bend due to the force exerted by the differential pressure inside and outside, but the seal The bearing (8) of the roll (3) is provided in the housing (10) of the support stand (9) that is separate and independent from the differential pressure chamber (1), and is connected to the housing (IG) from the differential pressure chamber (1). Extending seal roll (
3) The shaft part <3a> is a flexible and airtight hollow body (
11), the deflection of the differential pressure chamber (1) will not be transmitted to the bearing (8), which will prevent the seal roll (3) from rotating abnormally or cause damage between each seal roll (3). There is no deviation in parallelism, the seal roll (3) rotates smoothly, and the long object (4) being conveyed is prevented from meandering.

(Effects of the Invention) As described above, according to the present invention, the bearing of the seal roll of the differential pressure sealing device is housed in a housing on a support stand outside the differential pressure chamber and separated from the differential pressure chamber. Since the periphery of the shaft of the seal roll extending from the differential pressure chamber to the housing is covered with a flexible and airtight hollow body, the deflection due to the pressure difference between the inside and outside of the differential pressure chamber is prevented through the bearing. It is possible to prevent this from being transmitted to the seal roll, which has the effect of preventing abnormal rotation of the seal roll and meandering of long objects being conveyed.

[Brief explanation of drawings]

Fig. 1 is a cutaway side view of a conventional differential pressure sealing device, Fig. 2 is a detailed cross-sectional view of the differential pressure sealing device corresponding to the cross section taken along the line ■-■ in Fig. 1, and Fig. 3 is an embodiment of the present invention. FIG. 4 is a detailed cross-sectional view corresponding to the section taken along the line ■--■ in FIG. 3, and FIG. 5 is a cross-sectional view of a modified example of the present invention. <1>...Differential pressure chamber (3)...Seal roll (
3a) (3a)...Shaft part (4)...Long object <5)...Seal piece (8) (8)...Bearing (9) (9)...
Support stand (IG (IO-... housing I'Ivl'I
v...Hollow body license application: Nippon Vacuum Technology Co., Ltd.

Claims (1)

[Claims] A rotatable seal roll and a seal piece close to the rotatable seal roll are installed in the differential pressure chamber, and the seal roll and seal piece seal the circumference of a long object that is being transported by winding the seal roll. The bearing of the seal roll is housed in an airtight housing provided on a support stand separate from the differential pressure chamber, and the shaft portion of the seal roll extends from the differential pressure chamber into the housing. A supporting device for a seal roll of a differential pressure sealing device, characterized in that the periphery of the seal roll is covered with a flexible and airtight hollow body such as a bellows having both ends fixed to the differential pressure chamber and the housing.