JPH01306562A - Sealing device for vacuum chamber - Google Patents

Abstract

PURPOSE:To hold the inside of a vacuum chamber at high vacuum by arranging a couple of the elastic belts traveling along with a metallic sheet at the outlet and inlet of the chamber, and preventing inflow of the external air along the conveying passage of the sheet. CONSTITUTION:The sealing device 5 for a vacuum chamber is composed of elastic belts 21 and 22, the seal rolls 23 and 24 over which the belts are laid, rolls 25 and 26, and press rolls 40 and 41. The elastic belts 21 and 22 are provided at the outlet and inlet of the vacuum chamber 3 wherein the metallic sheet 1 is continuously traveled and treated, and brought into contact with the upper and lower sides of the sheet 1. The press rolls 40 and 41 are arranged between the seal rolls 23 and 24 and the rolls 25 and 26 to press both ends of the belts 21 and 22 on each other.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention provides a method for processing metal sheets continuously in a vacuum chamber, such as plating copper strips, etc., on the exit and entry sides of the metal sheet. The present invention relates to a sealing device to be arranged.

[Conventional technology]

A metal sheet is continuously fed into a vacuum chamber,
G. After performing treatments such as vapor deposition, PVD, and CVD, when transporting the vacuum chamber from the vacuum chamber, a sealing device as shown in Figure 5 is installed in the vacuum chamber to prevent outside air from entering the vacuum chamber. It is installed at the entrance/exit.

That is, the metal sheet 1 to be processed is unwound from the coil 2 and fed into the vacuum chamber 3. and,
After being processed in a vacuum chamber 3, the metal sheet 1 is sent out and wound up as a coil 4. Sealing devices 5 are arranged in series along the conveyance path of the metal sheet 1 before and after the vacuum chamber 3. Each seal group @5 is evacuated by a vacuum pump 6 in order to bring the internal space of the vacuum chamber 3 to a predetermined degree of vacuum.

FIG. 6 shows an example in which a seal roll having an elastic body wrapped around the circumferential surface is used as a seal device (Japanese Patent Laid-Open No. 57-730
Publication No. 26). This seal roll 7 faces a counter roll 8 with the metal sheet 1 to be processed in between, and is pressed against the metal sheet 1 by a backup roll 9. A holder 10 with a seal member 11 attached to the tip is attached to the casing 12, and the gap between the backup roll 9 and the casing 12 is used as a seal roll.

In this sealing device, the gas flows flowing into the vacuum chamber 3 from the outside aS atmosphere include a flow Fl passing between the seal roll 7 and the backup roll 9, and a flow Fl passing between the backup roll 9 and the sealing material 11. There is a flow F2 and a flow F passing between the end faces of the seal roll 7 and backup roll 9 and the side wall of the goose sink 12. These gas flows Fl, F2 . F3 passes through a certain gap when the device is initially designed, but as the sliding member deteriorates, the gap widens and gradually becomes a larger flow.

On the other hand, gas flows that change depending on the size and properties of the metal sheet 1 to be processed include a flow Fl passing between the metal sheet 1 and the seal roll 7, and a flow Fl passing between the end of the metal sheet 1 and the metal sheet 1. There is a flow F passing through the gap surrounded by the rotating roll 7.8 and the casing 12. These gas flows F,.

F is the flow F1 described above. F2. It is usually thicker than F3.

In this regard, in order to reduce the gas flows Fl and FS, as shown in FIGS. The one housed in No. 19 is used (see Japanese Patent Laid-Open No. 57-92140). These covers 16-1
9 is pressed against the circumferential surface of the rolls 14 and 15 to eliminate gaps that may cause gas leakage. According to this sealing structure, since the outer peripheral surfaces of the rolls 14 and 15 are formed of the elastic body I3, they come into surface contact with the metal sheet 1, and both ends of the metal sheet 1 are closed with the elastic body 13. Therefore, the gas flow Fl,
FS becomes a small value. Also, since the rolls 14.15 are pressed against the covers 16-19, the gas flow Fl,
F2. Fs also becomes a small value.

However, the fact that the rolls 14.15 are in pressure contact with the covers 16-19 means that the elastic body 13 formed on the circumferential surface of the rolls 14.15 rubs against the covers 16-19 over a wide area. Therefore, the deterioration of the elastic body 13 due to friction is large. Further, the edges of the metal sheet 1 bite into the elastic bodies 13 on the circumferential surfaces of the rolls 14 and 15, and are damaged due to repeated elastic deformation in proportion to the number of rotations of the rolls 14 and 15. As a result, stable sealing performance cannot be maintained over a long period of time.

On the other hand, in the sealing device shown in FIG.
An elastic body 13 wrapped around the horse's surface serves as a sole, and a seal material 11 serves as a seal roll between the backup roll 9 and the casing 12. Therefore, the elastic body 13 on the circumferential surface of the seal roll 7 does not rub against the casing 12, and deterioration of the elastic body 13 can be prevented.

However, deterioration of the seal member 11 poses a problem. Furthermore, the degree of damage to the elastic body 13 formed on the surface of the seal roll 7 from the edges of the metal sheet 1 is similar to that of the seal device having the structure shown in FIG. unable to maintain.

[Problem to be solved by the invention]

The amount of gas movement caused by the gas flow shown in Fig. 6 is calculated by the following conductance C, assuming that the width of the gap is a and the length is L, and the pressure condition is constant.
It is expressed by the size of

In the case of low vacuum region CvocaIb3/L In the case of high vacuum region CM” a + b”/ L X ffn (L/
b) That is, in any region, the sealing performance is dominated by the gap b, and it is more effective to make the gap length as long as possible from the equipment standpoint.

On the other hand, in the structure shown in FIGS. 6 and 7, the degree of damage to the elastic body due to repeated elastic deformation of the portion in contact with the metal sheet increases with the gap length L.

Therefore, the present invention suppresses damage to the elastic body even though the gap length is increased by arranging a pair of elastic belts that run together with the metal sheet on the exit side and the inlet side of the vacuum chamber. The purpose is to provide a sealing device with excellent sealing performance.

[Means to solve the problem]

In order to achieve the purpose, the sealing device for a vacuum chamber of the present invention is provided at the outlet and inlet sides of a vacuum chamber in which a metal sheet is continuously passed through and subjected to vacuum processing, and is applied to both upper and lower surfaces of the metal sheet. an elastic belt in contact with the elastic belt, a seal roll and a roll around which the elastic belt is wound, and a seal roll and a roll disposed between the seal roll and the roll;
The pressing member for pressing both ends of the elastic belt against each other includes a roll.

[Effect]

In the present invention, a metal sheet to be vacuum-treated is fed into a vacuum chamber while being wrapped in an elastic belt that is in close contact with each other on the entrance side of the vacuum chamber. Furthermore, when being sent out from the vacuum chamber, it is similarly wrapped in an elastic belt. These elastic belts run in synchronization with the metal sheet. As a result, wear of the elastic belt and scratches on the metal sheet due to sliding friction between the elastic belt and the metal sheet are eliminated, and repeated elastic deformation of the portion where the elastic belt contacts the edge of the metal sheet is eliminated. Damage caused by this is also reduced. Therefore, the degree of vacuum in the vacuum chamber can be maintained for a long period of time, and the metal sheet can be run without deteriorating its surface properties. Furthermore, since the amount of gas flowing into the vacuum chamber from the outside can be kept low, it is also possible to increase the degree of vacuum in the vacuum chamber.

〔Example〕

Hereinafter, the features of the present invention will be specifically explained using examples with reference to the drawings.

FIG. 1 shows a sealing device provided on the inlet side of the vacuum chamber. The metal sheet 1 is sent into a vacuum chamber through this sealing device. This sealing device includes an elastic bell) 21.22, whose rigid body or peripheral surface is wound between a sealing roll 23.24 formed of an elastic body and a roll 25.26 formed of a rigid body. ing. As a result, the elastic belts 21, 22 rotate with the metal sheet 1 sandwiched therebetween. In order to reduce the contact between the elastic belts 21 and 22 against the rolls 23 and 24, the rolls 2
The flexible material 23a, 24a may be wrapped around the circumferential surface of 3.24.

Further, an auxiliary roll 30.31 is provided to the casing 27 of the vacuum chamber via a seal metal fitting 28.29. These auxiliary rolls 30,31 are I in FIG.
As shown in FIG. 2, which is a cross-sectional view along the line -I, each sealing roll 23 is
．． 24 (elastic bell) 21.22
There is no gap between the seal roll 23 and the seal roll 23, 24. Note that the seal hardware 28, 29 is also pressed against the auxiliary roll 30, 31 without any gap.

At both ends of the elastic bell (21.22), edge portions 32.33 are formed which are thicker than the center portion. these edges 3
2.33 is a fixed side metal fitting 34.35 and a movable side metal fitting 36 provided at both ends of the seal roll 23.24 in the axial direction;
It fits into the groove provided in 37. Therefore, elastic body bell)
The driving route of 21.22 is stable. Then, in response to the deformation of the elastic belt 21.22 due to heat or the like, the movable hardware 36.37 is moved in the axial direction of the seal roll 23.24 by means such as a spring (not shown), thereby increasing the width. The elastic bells (21, 22) can be run while maintaining a flat state without meandering, wrinkles, gaps, etc. in the direction.

Further, the outer thin wall portion of the movable side hardware 36.37 is fitted into the shaft end sealing hardware 38.39. In addition, the gap δ between the casing 27 and the seal roll 23, 24,
are sealed with shaft end seal hardware 38, 39, and the gap δ2 between the auxiliary roll 30, 31 and the casing 27 is also sealed with a seal hardware (not shown).

In addition, as the seal metal parts 28 and 29, those equipped with an ultrasonic vibration device can be used. Due to this ultrasonic vibration, the seal hardware 28.
The sliding friction of No. 29 can be made smaller than when an elastic body is used, and deterioration of sealing performance can be suppressed.

Between the sealing rolls 23.24 and 25.26, there are a plurality of pressing rolls 40.41 (elastic bells) 21.
They are arranged at both ends of 22. These presses are performed by roll 4
0,41, as shown in FIG.
The ends of 21 and 22 are pressed together.

Since the side of the casing 27 connected to the vacuum chamber is under negative pressure, the elastic bells 1-21, 22 are in close contact with each other, and airtightness can be ensured even though the distance iL is increased. Note that a support roll 4 is provided at the center of the elastic belt 22 located below to prevent it from sagging.
2 is provided.

FIG. 4 shows a state in which the sole device 5 described above is placed on the inlet and outlet sides of the vacuum chamber 3. The metal sheet 1 unwound from the coil 2 passes through a sealing device 5 on the entry side, passes through a path where the pressure is reduced in multiple stages by a vacuum pump 6, and after exiting the vacuum chamber 3, is depressurized in multiple stages in the same way. After passing through a path where the pressure is reduced by a vacuum pump 6, it is wound around a coil 4.

When configuring the sealing device 5 in this way, the elastic bell)
21 and 22 always stably wrap around the metal sheet 1 and are in close contact with the metal sheet 1. Therefore, the gap in the passage of the metal sheet 1 becomes smaller, and the distance between the metal sheets 1 and 1 can be increased, resulting in excellent airtightness. For example, in a case where the gap length of the metal sheet 1 passage section is set to 40 cm, when the gap, width, and pressure conditions are constant, the conductance ratio is 0.0 cm compared to the conventional sealing device.
It dropped to 075. In addition, in the sealing device of this embodiment, the sealing roll 23.24 and the auxiliary roll 30.3
1 in total, there are more gaps than in the case of FIG. 7. However, since the elastic bells 21 and 22 travel in close contact over a long distance, the gas flow rate of the entire device is not increased.

〔Effect of the invention〕

As explained above, in the present invention, the metal sheet is wrapped between the elastic belts that run in synchronization with the metal sheet, and the metal sheet is fed into or out of the vacuum chamber, so that the metal sheet is transported along the conveyance path. There is no gap along the line for outside air to flow into the vacuum chamber. Therefore, it is possible to maintain a high degree of vacuum inside the vacuum chamber. Furthermore, since no sliding friction occurs between the elastic belt and the metal sheet, the elastic belt is less likely to be damaged by wear, making it possible to maintain excellent sealing performance over a long period of time.

[Brief explanation of the drawing]

FIG. 1 is a side view showing a sealing device according to an embodiment of the present invention, and FIG. FIG. 3 is a sectional view taken along the line ■--■ in FIG. 1, and FIG. 4 shows a conveyance path for a metal sheet in a vacuum processing apparatus incorporating the sealing device. On the other hand,
5 to 7 are diagrams for explaining a conventional sealing device. 1: Metal sheet 2: Inlet coil 3: Vacuum chamber 4: Outlet coil 5: 7-le device
6: Vacuum pump 21.22: Elastic belt 23.2
4: Seal rolls 23a, 24a: Flexible material 2
5.26: Roll 27: Casing 2B, 29
: Seal hardware 30.31: Auxiliary roll 32.33
+Edge 34.35: Fixed side hardware 36.37: Movable side hardware 38.39: Shaft end sealing hardware 40.41: Pressing is roll patent applicant Nippon Steel Corporation (1 other person) Agent Small Masu Hori (and 2 others) Figure 1 Figure 3 Figure 2 Figure 4 Figure 5 Figure 6 Figure 7 (a)

Claims (1)

[Claims] 1. An elastic belt is provided on the outlet and inlet sides of a vacuum chamber in which a metal sheet is continuously passed through and subjected to vacuum processing, and is brought into contact with both the upper and lower surfaces of the metal sheet, and the elastic belt is wrapped around the 1. A sealing device for a vacuum chamber, comprising: a sealing roll and a roll; and a pressing roll disposed between the sealing roll and the roll and pressing both ends of the elastic belt against each other.