JPH0459965A - Differential-pressure sealing device - Google Patents

Abstract

PURPOSE:To easily generate a differential pressure and to reduce the capacity of a vacuum pump in the differential-pressure sealing device for introducing a long-sized thin strip from the atmosphere into vacuum and vice versa by integrating a guide roll for winding a long-sized sheet and a sealing attachment through a bearing. CONSTITUTION:Plural guide rolls 12 are vertically and staggeringly arranged, and a long-sized thin strip 11 is strung on the rolls. Each roll 12 is housed in the upper and lower sealing attachments 13 and 14 or 13' and 14', the attachments are connected by connecting ducts 21 and 21' having a rectangular cross section, and an exhaust pipe 22 is fixed to the duct. Bearings 17 and 17' are engaged with both ends of the roll 12 and covered by side-face housings 16 and 16'. A guide roll driving shaft pierces the housing 16, an airtight sealing device 18 is inserted between the housing 16 and the outer face of the driving shaft, the assembly is combined with the attachments 13 and 14, hence a differential-pressure sealing chamber excellent in airtightness is formed, and the capacity of the vacuum pump is also reduced.

Description

[Detailed Description of the Invention] <Industrial Application Field> Long ribbon, for example cold rolled or hot rolled steel 41! When surface treatment is applied to a long material such as ``dry brating method such as vacuum welding, ion blating, or sputtering while continuously feeding it, multiple spatial regions with different pressures are applied to each other. An air-to-air method is used in which the degree of vacuum is sequentially increased and then lowered while reaching the drive rating region.

The present invention relates to a differential pressure sealing device suitable for guiding the passage of a long ribbon while maintaining the pressure difference between the differential pressure chambers.

<Prior art> A differential pressure seal using an air-to-air method is used as a means to continuously introduce long, thin (long and thin) pieces from the atmosphere into a vacuum chamber, process them, and then bring them out into the atmosphere again. Various proposals have been made regarding the device.

The present applicant has developed a differential pressure device using a sealing attachment (Japanese Patent Application Laid-Open No. 2-54-1999), which uses a sealing attachment to wrap a long ribbon around a single guide roll and guide it while leaving a small gap to cover it.
767 Publication) and a belt-type differential pressure sealing device (
JP-A-301861).

By the way, the smaller the gap in the vacuum differential pressure sealing device τ, the better. Needless to say, the conductance between the differential pressure chambers (devices) also depends on the shape of the gap's entrance, but in the viscous flow region, the gap In the case of molecular flow head-on, it is proportional to the square of the gap and inversely proportional to the length of the gap. Therefore, the smaller the gap, the more economical a high degree of vacuum can be achieved with a small-capacity pump.

As a result of repeated experiments using the actual machine according to the invention, the inventors found that the gap between the guide roll and the sealing attachment where the long ribbon passes is 0.1 to 0 at the maximum thickness of the long ribbon 'E14jF. The gap between the guide roll and the sealing attachment in the part where the long ribbon on the opposite side does not pass is about O61 to 0.3 mm, which is the difference in thermal expansion.
It has been determined that this is the minimum practical limit in terms of machining accuracy, etc. If the temperature is lower than this, the guide roll and the sealing attachment will come into contact with each other, making it impossible for the guide roll to rotate, making it impossible to thread the long ribbon, or causing the sealing attachment to come into contact with the guide roll, making it impossible to thread the long ribbon.
Group 9 entered the line, causing the ribbon to break.

As shown in Figures 5 and 6, this is a structure in which the guide 1' roller 2, which is the center of rotation, and the sealing attachment 3 are each supported independently, that is, the guide roll 2 is fixed to the 8 surfaces of the fixed base. The sealing attachment 1-3 is supported on a base 8 separately from the bearing 6.
The structure is such that it is supported on the partition wall 9 of the differential pressure chamber 5 fixed to the surface, and the shape of the sealing attachment 3 is ? J[jf
fl, it was very difficult to set a uniform gap over the entire length of the guide roll 3 in the axial direction.

Moreover, the differential pressure chamber 5 itself has a box-shaped structure with a partition wall 9 provided therein, resulting in a large amount of unnecessary exhaust space.

For this reason, the exhaust system also has to be large in size with a high margin for displacement and exhaust time, which is by no means preferable from the standpoint of equipment investment and power consumption.

Furthermore, the threading workability is poor, and when a long thin sheet (12) breaks, the hand hole (U shown in the figure) of the differential pressure chamber 5 must be opened and the sheet threading must be carried out manually, which requires a great deal of effort and time. The same was true for mulberry etc., which required the replacement of 0 parts (the same was true for mulberry etc.), and the device had factors that seriously hindered productivity.

In the figure, ■ is a long ribbon, and 7 is a vacuum bellows.

<Problem to be solved by the invention> As described above, in the differential pressure sealing device, ■ By keeping the gap between the guide roll and the sealing attachment small and uniform, air intrusion is prevented as much as possible, and it is possible to efficiently ) It generates a pressure difference and achieves a predetermined degree of vacuum, and at the same time ■ A long and thin (IF) can be automatically introduced into the vacuum chamber without damaging it, and ■ It also has excellent maintainability. This is a problem, and Kibatsu 191 aims to solve these problems and provide a differential pressure sealing device that is economical, has good threading workability, and is also excellent in maintainability.

<Means for Solving Problem B> The present invention provides a differential pressure seal that maintains the pressure difference and induces continuous passage of fjl[(fF) between spatial regions where there is a pressure difference. At the boundary between the spatial regions, there is a single guide roll that guides the winding of the long ribbon, and a single guide roll that is arranged so as to surround the periphery of the long ribbon (jF), and one of the opposing A part of the surface side is close to the ribbon surface on the single guide roll and is formed in a shape along the thin IP surface, and a part of the opposite side is close to the thin strip surface on the single guide roll. the guide roll is close to the surface, and the tip is formed in a shape that follows the outer circumferential surface of the guide roll, and the guide is formed in a shape that follows the outer surface of the roll, and the tip part is close to the outer surface of the roll, A sealing attachment having a side structure connected to keep both opposing parts substantially airtight, and the sealing attachment!-
a presser roll on the ribbon introduction side that presses the ribbon against the guide roll surface; and an actuator that supports the presser roll so that it can approach and move away from the guide roll surface;
The guide comprises a connecting duct having a long rectangular cross section surrounding the ribbon, which connects the ribbon outlet and the ribbon inlet of the adjacent sealing attachments, and an exhaust pipe provided in the middle of the connecting duct. This is a differential pressure sealing device in which a roll is supported by bearings held at both widthwise ends of the sealing attachment.

Function> In order to solve the above problems, the present invention integrates a bearing of a guide roll for winding and guiding a long ribbon with a sealing attachment. As a result, the gap between the guide roll and the sealing attachment is kept constant in terms of NDi, so a predetermined gap can be obtained with high accuracy. That is, it is easy to obtain a stable differential pressure seal, and it is possible to prevent the guide roll from being unable to rotate, breakage of the long ribbon, and occurrence of scratches.

In addition, the sealing attachment) is provided with a presser roll that is pressed against the guide roll by an actuator, and connecting ducts are provided between each differential pressure chamber 12 to serve as a threading guide that limits the direction of movement of the long ribbon. This enables automatic sheet threading, eliminates extra space in the differential pressure chamber, and shortens the time required to reach vacuum.

Furthermore, because the structure has been simplified, troubleshooting and maintainability have been greatly improved.

<Example> An embodiment of the present invention will be described based on FIGS. 1 to 3.

FIG. 1 is a diagram showing how the differential pressure sealing device of the present invention is used. A plurality of guide rolls 12 are arranged in a staggered manner up and down, and a long thin ribbon 11 is wound around them.

At this time, each guide roll 12 is housed in the upper and lower sealing attachments 3.14 to 13' and 14', and these sealing attachments are connected by a connecting duct 21.21' with a long rectangular cross section. . This connecting duct is provided with an exhaust pipe 22 and is connected to a vacuum pump (not shown). 15.15' is a pedestal.

FIG. 2 is an exploded view of the differential pressure seal device.

Bearings 17 and 17' are fitted to both ends of the guide roll 12,
Guide roll 12 covered by side housing 16.16'
An airtight seal device 18 is fitted between the side housing 16 through which the drive shaft passes and the outer surface of the drive shaft. Place the assembly in this state on the lower sealing attachment 14.
Place R. When the upper sealing attachment 3 is placed on this, the differential pressure seal chamber is assembled.

The assembled state is shown in Figure 3.4. It goes without saying that vacuum packing is used for the split surfaces of these parts.

In Figure 3.4, the upper sealing attachment 13
A holding roll 19 is provided on the entrance side of the long ribbon 11 so as to be movable up and down by an actuator 20. This holding roll 19
When pressed against the driven guide rolls 12, they rotate, so the tip of the long ribbon 11 that is held between these rolls is automatically threaded. Note that the length of the holding roll 19 does not need to be the entire length of the guide roll 12, and may be a length that covers the central portion of the guide roll 12.

<Effects of the Invention> As explained above, the apparatus of the present invention has the following effects.

■ The guide roll that wraps around and guides the long ribbon and the sealing attachment installed to cover it are integrated via bearings, so the gap between the guide roll and the sealing attachment is uniform and small, creating a pressure difference. The capacity of the vacuum pump has become smaller. Also,
There is no rotation failure, roll flaws, or breakage of the long ribbon due to contact between the sealing attachment and the guide roll.

■ Automatic threading of long ribbons is possible using a connection duct that matches the shape of the long ribbon and a holding roll installed on the sealing attachment.

■ Due to its simple structure, it is easy to manufacture, easy to deal with when trouble occurs, and has excellent maintainability.

■ By not creating extra space, it takes less time to reach the required degree of vacuum.

[Brief explanation of the drawing]

FIG. 1 is a diagram showing how the differential pressure sealing device of the present invention is used. FIG. 2(a) is an exploded view of the differential pressure sealing device of the present invention, FIG. 2(b) is a view taken along the line A-A in FIG. 2(a), and FIG. 2(C) is a It is a BB arrow view of (a). FIG. 3 is a cross-sectional view of the differential pressure sealing device of the present invention taken perpendicular to the guide roll axis, and FIG. 4 is a cross-sectional view parallel to the guide roll axis. FIG. 5 is a diagram showing how a conventional differential pressure seal device is used, and FIG. 6 is a sectional view of the conventional differential pressure seal device. l...Long ribbon, 2...Guide roll, 4...Guide roll, 5...Differential pressure chamber, 6...Bearing, 7...Vacuum bellows 8.8'... Fixed base, 9... Partition wall, 11... Long ribbon, 12... Guide roll, 13.13'... Upper sealing attachment, 14
．． 14'...lower sealing attachment, 15.
15'... Frame, 16.16'... Side housing, 17.17'... Bearing, 18... Airtight seal device, 19... Presser roll, 20... Actuator, 21.21 '...Connection duct, 22...Exhaust pipe. 3...Ceiling accessories,

Claims (1)

[Claims] In a differential pressure seal that maintains the pressure difference and guides continuous passage of a long ribbon between spatial regions having a pressure difference, the long ribbon is wound at the boundary between the spatial regions. a single guide roll that controls cliff guidance; and a ribbon surface on the single guide roll, which is arranged so as to surround the periphery of the long ribbon, and a part of one opposing surface thereof is a ribbon surface on the single guide roll. and is formed in a shape that is close to and along the ribbon surface, a part of the other opposing side is close to the outer circumferential surface of the guide roll, and the tip has a shape that follows the outer circumferential surface of the guide roll. a sealing attachment having a side structure that is formed in a shape along the outer surface of the guide roll, has a tip end close to the outer surface of the roll, and is connected so as to maintain both opposing parts substantially airtight; , a presser roll that is located on the ribbon introduction side of the sealing attachment and presses the ribbon against the guide roll surface, an actuator that supports the presser roll so that it can approach and move away from the guide roll surface, and the adjacent sealing attachment. The connecting duct, which connects the ribbon outlet and the ribbon inlet, has a long rectangular cross section surrounding the ribbon, and an exhaust pipe provided in the middle of the connecting duct, and the guide roll is connected to the sealing attachment. A differential pressure seal device supported by bearings held at both ends in the width direction.