JPH037963Y2 - - Google Patents
Info
- Publication number
- JPH037963Y2 JPH037963Y2 JP1987017838U JP1783887U JPH037963Y2 JP H037963 Y2 JPH037963 Y2 JP H037963Y2 JP 1987017838 U JP1987017838 U JP 1987017838U JP 1783887 U JP1783887 U JP 1783887U JP H037963 Y2 JPH037963 Y2 JP H037963Y2
- Authority
- JP
- Japan
- Prior art keywords
- conductive layer
- line
- layer
- insulating layer
- word line
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 21
- 239000000758 substrate Substances 0.000 claims description 13
- 230000003068 static effect Effects 0.000 claims description 11
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 18
- 229920005591 polysilicon Polymers 0.000 description 18
- 238000009792 diffusion process Methods 0.000 description 16
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 10
- 229910052782 aluminium Inorganic materials 0.000 description 10
- 230000010354 integration Effects 0.000 description 8
- 239000004020 conductor Substances 0.000 description 6
- 239000012535 impurity Substances 0.000 description 6
- 238000002955 isolation Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000005360 phosphosilicate glass Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Landscapes
- Semiconductor Memories (AREA)
- Static Random-Access Memory (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987017838U JPH037963Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-02-12 | 1987-02-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987017838U JPH037963Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-02-12 | 1987-02-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62151761U JPS62151761U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-09-26 |
| JPH037963Y2 true JPH037963Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-02-27 |
Family
ID=30810962
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987017838U Expired JPH037963Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-02-12 | 1987-02-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH037963Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1987
- 1987-02-12 JP JP1987017838U patent/JPH037963Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62151761U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-09-26 |