JPH0379559B2 - - Google Patents
Info
- Publication number
- JPH0379559B2 JPH0379559B2 JP19429184A JP19429184A JPH0379559B2 JP H0379559 B2 JPH0379559 B2 JP H0379559B2 JP 19429184 A JP19429184 A JP 19429184A JP 19429184 A JP19429184 A JP 19429184A JP H0379559 B2 JPH0379559 B2 JP H0379559B2
- Authority
- JP
- Japan
- Prior art keywords
- pump
- rotor
- vacuum
- rotating
- speed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 12
- 239000012530 fluid Substances 0.000 claims description 2
- 238000005086 pumping Methods 0.000 description 13
- 239000002131 composite material Substances 0.000 description 12
- YZCKVEUIGOORGS-NJFSPNSNSA-N Tritium Chemical compound [3H] YZCKVEUIGOORGS-NJFSPNSNSA-N 0.000 description 7
- 239000001307 helium Substances 0.000 description 7
- 229910052734 helium Inorganic materials 0.000 description 7
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 7
- 229910052722 tritium Inorganic materials 0.000 description 7
- 230000004927 fusion Effects 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
- 229910001873 dinitrogen Inorganic materials 0.000 description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000010687 lubricating oil Substances 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 230000000717 retained effect Effects 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- YZCKVEUIGOORGS-OUBTZVSYSA-N Deuterium Chemical compound [2H] YZCKVEUIGOORGS-OUBTZVSYSA-N 0.000 description 1
- 230000005255 beta decay Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 229910052805 deuterium Inorganic materials 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 239000002737 fuel gas Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003472 neutralizing effect Effects 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000000941 radioactive substance Substances 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 230000005469 synchrotron radiation Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19429184A JPS6172896A (ja) | 1984-09-17 | 1984-09-17 | 高速回転ポンプ |
| DE19853531942 DE3531942A1 (de) | 1984-09-17 | 1985-09-07 | Rotationspumpe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19429184A JPS6172896A (ja) | 1984-09-17 | 1984-09-17 | 高速回転ポンプ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6172896A JPS6172896A (ja) | 1986-04-14 |
| JPH0379559B2 true JPH0379559B2 (enrdf_load_stackoverflow) | 1991-12-19 |
Family
ID=16322150
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19429184A Granted JPS6172896A (ja) | 1984-09-17 | 1984-09-17 | 高速回転ポンプ |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPS6172896A (enrdf_load_stackoverflow) |
| DE (1) | DE3531942A1 (enrdf_load_stackoverflow) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62184192U (enrdf_load_stackoverflow) * | 1986-05-16 | 1987-11-21 | ||
| JPS62184190U (enrdf_load_stackoverflow) * | 1986-05-16 | 1987-11-21 | ||
| JPS6375387A (ja) * | 1986-09-18 | 1988-04-05 | Mitsubishi Heavy Ind Ltd | セラミツクス製オイルフリ−・ハイブリツド真空ポンプ |
| JP2556320B2 (ja) * | 1987-03-18 | 1996-11-20 | セイコ−精機株式会社 | 真空ポンプ |
| JPS63200697U (enrdf_load_stackoverflow) * | 1987-06-16 | 1988-12-23 | ||
| JPH0214496U (enrdf_load_stackoverflow) * | 1988-07-13 | 1990-01-30 | ||
| DE3919529C2 (de) * | 1988-07-13 | 1994-09-29 | Osaka Vacuum Ltd | Vakuumpumpe |
| DE3926577A1 (de) * | 1989-08-11 | 1991-02-14 | Leybold Ag | Vakuumpumpe mit einem rotor und mit unter vakuum betriebenen rotorlagerungen |
| GB9125850D0 (en) * | 1991-12-04 | 1992-02-05 | Boc Group Plc | Improvements in vacuum pumps |
| DE4314419A1 (de) * | 1993-05-03 | 1994-11-10 | Leybold Ag | Reibungsvakuumpumpe mit Lagerabstützung |
| DE19632874A1 (de) * | 1996-08-16 | 1998-02-19 | Leybold Vakuum Gmbh | Reibungsvakuumpumpe |
| GB0409139D0 (en) | 2003-09-30 | 2004-05-26 | Boc Group Plc | Vacuum pump |
| JP2006144783A (ja) | 2004-11-24 | 2006-06-08 | Pfeiffer Vacuum Gmbh | 高速回転ロータを有する真空ポンプのフランジと結合可能な破損防止装置 |
| DE102005052792B4 (de) * | 2004-11-24 | 2017-12-14 | Pfeiffer Vacuum Gmbh | Splitterschutz für Vakuumpumpe mit schnelldrehendem Rotor |
| DE202011002809U1 (de) * | 2011-02-17 | 2012-06-12 | Oerlikon Leybold Vacuum Gmbh | Statorelement sowie Hochvakuumpumpe |
| JP6079052B2 (ja) * | 2012-08-24 | 2017-02-15 | 株式会社島津製作所 | 真空ポンプ |
| WO2017035657A1 (en) * | 2015-09-04 | 2017-03-09 | Terrestrial Energy Inc. | Pneumatic motor assembly, flow induction system using same and method of operating a pneumatic motor assembly |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2224009A5 (enrdf_load_stackoverflow) * | 1973-03-30 | 1974-10-25 | Cit Alcatel | |
| DE2512828C3 (de) * | 1975-03-22 | 1978-11-16 | Kernforschungsanlage Juelich Gmbh, 5170 Juelich | Turbomolekularpumpe |
-
1984
- 1984-09-17 JP JP19429184A patent/JPS6172896A/ja active Granted
-
1985
- 1985-09-07 DE DE19853531942 patent/DE3531942A1/de active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6172896A (ja) | 1986-04-14 |
| DE3531942C2 (enrdf_load_stackoverflow) | 1989-04-06 |
| DE3531942A1 (de) | 1986-04-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |