JPH037766Y2 - - Google Patents
Info
- Publication number
- JPH037766Y2 JPH037766Y2 JP17482683U JP17482683U JPH037766Y2 JP H037766 Y2 JPH037766 Y2 JP H037766Y2 JP 17482683 U JP17482683 U JP 17482683U JP 17482683 U JP17482683 U JP 17482683U JP H037766 Y2 JPH037766 Y2 JP H037766Y2
- Authority
- JP
- Japan
- Prior art keywords
- measured
- light
- light source
- detection means
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 23
- 230000003287 optical effect Effects 0.000 claims description 13
- 230000010287 polarization Effects 0.000 description 9
- 239000010409 thin film Substances 0.000 description 7
- 229910004298 SiO 2 Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 238000005259 measurement Methods 0.000 description 4
- 238000000926 separation method Methods 0.000 description 4
- 238000003384 imaging method Methods 0.000 description 3
- 238000005219 brazing Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000003491 array Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17482683U JPS6082208U (ja) | 1983-11-14 | 1983-11-14 | 被測定面の位置測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17482683U JPS6082208U (ja) | 1983-11-14 | 1983-11-14 | 被測定面の位置測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6082208U JPS6082208U (ja) | 1985-06-07 |
| JPH037766Y2 true JPH037766Y2 (enrdf_load_html_response) | 1991-02-26 |
Family
ID=30380508
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17482683U Granted JPS6082208U (ja) | 1983-11-14 | 1983-11-14 | 被測定面の位置測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6082208U (enrdf_load_html_response) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0726648Y2 (ja) * | 1988-03-30 | 1995-06-14 | アンリツ株式会社 | 変位測定装置 |
| JP2818597B2 (ja) * | 1988-07-15 | 1998-10-30 | 株式会社日立製作所 | パターン検査方法 |
-
1983
- 1983-11-14 JP JP17482683U patent/JPS6082208U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6082208U (ja) | 1985-06-07 |
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