JPH0377618B2 - - Google Patents
Info
- Publication number
- JPH0377618B2 JPH0377618B2 JP18611687A JP18611687A JPH0377618B2 JP H0377618 B2 JPH0377618 B2 JP H0377618B2 JP 18611687 A JP18611687 A JP 18611687A JP 18611687 A JP18611687 A JP 18611687A JP H0377618 B2 JPH0377618 B2 JP H0377618B2
- Authority
- JP
- Japan
- Prior art keywords
- rotating
- space
- electron beam
- groove
- anode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 claims description 20
- 238000009423 ventilation Methods 0.000 claims 3
- 230000000694 effects Effects 0.000 description 8
- 238000001015 X-ray lithography Methods 0.000 description 4
- 238000001816 cooling Methods 0.000 description 4
- 238000007639 printing Methods 0.000 description 4
- 230000020169 heat generation Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000004846 x-ray emission Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000001393 microlithography Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18611687A JPS6430152A (en) | 1987-07-24 | 1987-07-24 | Rotary groove type anode x-ray generator |
| US07/220,087 US4873709A (en) | 1987-07-24 | 1988-07-18 | X-ray generator with grooved rotary anode |
| EP88306736A EP0300805A3 (de) | 1987-07-24 | 1988-07-22 | Röntgenstrahlgenerator mit genuteter Drehanode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18611687A JPS6430152A (en) | 1987-07-24 | 1987-07-24 | Rotary groove type anode x-ray generator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6430152A JPS6430152A (en) | 1989-02-01 |
| JPH0377618B2 true JPH0377618B2 (de) | 1991-12-11 |
Family
ID=16182642
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18611687A Granted JPS6430152A (en) | 1987-07-24 | 1987-07-24 | Rotary groove type anode x-ray generator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6430152A (de) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6555173B1 (en) | 2000-11-08 | 2003-04-29 | Honeywell International Inc. | Carbon barrier controlled metal infiltration layer for enhanced oxidation protection |
| JP6558908B2 (ja) * | 2015-02-09 | 2019-08-14 | 株式会社大阪真空機器製作所 | Ｘ線発生装置用ターゲットマウントおよびこれを備えたｘ線発生装置 |
-
1987
- 1987-07-24 JP JP18611687A patent/JPS6430152A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6430152A (en) | 1989-02-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4788705A (en) | High-intensity X-ray source | |
| US5274690A (en) | Rotating housing and anode/stationary cathode x-ray tube with magnetic susceptor for holding the cathode stationary | |
| US6181765B1 (en) | X-ray tube assembly | |
| JP4176799B2 (ja) | Ｘ線発生装置における熱移動方法 | |
| US4993055A (en) | Rotating X-ray tube with external bearings | |
| US7903788B2 (en) | Thermionic emitter designed to provide uniform loading and thermal compensation | |
| JP2020014283A (ja) | 回転電機のステータ構造及びこれを備えた車両 | |
| JP4298826B2 (ja) | ストラドルベアリングアセンブリー | |
| JP4808387B2 (ja) | 軸方向磁束型電動機で駆動されるｘ線管用アノードターゲット | |
| US6041100A (en) | Cooling device for x-ray tube bearing assembly | |
| KR20070073605A (ko) | 초 고광도의 ｘ선 빔을 위한 콤팩트 광원 | |
| JP2000040479A (ja) | Ｘ線管及びその軸受体を冷却する方法 | |
| JPH04315752A (ja) | 高出力回転陽極ｘ線管 | |
| WO1999050882A1 (en) | Multiple wavelength x-ray tube | |
| US20030136923A1 (en) | Method and apparatus for cooling power supply wires used to drive stages in electron beam lithography machines | |
| JPH0377618B2 (de) | ||
| WO2015186409A1 (ja) | 回転陽極型ｘ線管 | |
| JPH09115469A (ja) | 磁気的に支持されるカソードｘ線源 | |
| JP3030069B2 (ja) | Ｘ線管 | |
| US4873709A (en) | X-ray generator with grooved rotary anode | |
| JPWO2004006307A1 (ja) | 電子ビーム露光方法及びその装置 | |
| WO2024122614A1 (ja) | 回転陽極型ｘ線管 | |
| CN215739034U (zh) | 冷却装置及ct设备 | |
| JPS62296735A (ja) | 電動機の冷却装置 | |
| JP4388816B2 (ja) | キャリア及び軸受部材の一体構成部を有するｘ線生成装置 |