JPH0375924B2 - - Google Patents
Info
- Publication number
- JPH0375924B2 JPH0375924B2 JP6111682A JP6111682A JPH0375924B2 JP H0375924 B2 JPH0375924 B2 JP H0375924B2 JP 6111682 A JP6111682 A JP 6111682A JP 6111682 A JP6111682 A JP 6111682A JP H0375924 B2 JPH0375924 B2 JP H0375924B2
- Authority
- JP
- Japan
- Prior art keywords
- conductor
- magnetic head
- film
- electrode
- photoresist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010408 film Substances 0.000 claims description 32
- 239000004020 conductor Substances 0.000 claims description 26
- 238000004519 manufacturing process Methods 0.000 claims description 15
- 239000010409 thin film Substances 0.000 claims description 14
- 230000001681 protective effect Effects 0.000 claims description 13
- 238000005530 etching Methods 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 9
- 238000005323 electroforming Methods 0.000 claims description 8
- 238000005516 engineering process Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims 1
- 229920002120 photoresistant polymer Polymers 0.000 description 15
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 9
- 229910052802 copper Inorganic materials 0.000 description 9
- 239000010949 copper Substances 0.000 description 9
- 230000007797 corrosion Effects 0.000 description 6
- 238000005260 corrosion Methods 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000000059 patterning Methods 0.000 description 3
- 238000001556 precipitation Methods 0.000 description 3
- XTEGARKTQYYJKE-UHFFFAOYSA-M Chlorate Chemical compound [O-]Cl(=O)=O XTEGARKTQYYJKE-UHFFFAOYSA-M 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 229910000365 copper sulfate Inorganic materials 0.000 description 2
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- 230000002378 acidificating effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- JRKICGRDRMAZLK-UHFFFAOYSA-L peroxydisulfate Chemical compound [O-]S(=O)(=O)OOS([O-])(=O)=O JRKICGRDRMAZLK-UHFFFAOYSA-L 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
Landscapes
- Magnetic Heads (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6111682A JPS58179922A (ja) | 1982-04-14 | 1982-04-14 | 薄膜磁気ヘツドの電極製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6111682A JPS58179922A (ja) | 1982-04-14 | 1982-04-14 | 薄膜磁気ヘツドの電極製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58179922A JPS58179922A (ja) | 1983-10-21 |
| JPH0375924B2 true JPH0375924B2 (https=) | 1991-12-03 |
Family
ID=13161779
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6111682A Granted JPS58179922A (ja) | 1982-04-14 | 1982-04-14 | 薄膜磁気ヘツドの電極製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58179922A (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2552189B2 (ja) * | 1989-12-26 | 1996-11-06 | 富士通株式会社 | 薄膜磁気ヘッドの製造方法 |
| JP4047252B2 (ja) | 2003-06-09 | 2008-02-13 | アルプス電気株式会社 | 薄膜構造体の製造方法 |
| US9218831B1 (en) * | 2014-09-17 | 2015-12-22 | HGST Netherlands B.V. | Side-by-side magnetic multi-input multi-output (MIMO) read head |
-
1982
- 1982-04-14 JP JP6111682A patent/JPS58179922A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58179922A (ja) | 1983-10-21 |
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