JPH0374658U - - Google Patents

Info

Publication number
JPH0374658U
JPH0374658U JP13556389U JP13556389U JPH0374658U JP H0374658 U JPH0374658 U JP H0374658U JP 13556389 U JP13556389 U JP 13556389U JP 13556389 U JP13556389 U JP 13556389U JP H0374658 U JPH0374658 U JP H0374658U
Authority
JP
Japan
Prior art keywords
buttful
exhaust passage
cryopump
hook
spring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13556389U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13556389U priority Critical patent/JPH0374658U/ja
Publication of JPH0374658U publication Critical patent/JPH0374658U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP13556389U 1989-11-22 1989-11-22 Pending JPH0374658U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13556389U JPH0374658U (enrdf_load_stackoverflow) 1989-11-22 1989-11-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13556389U JPH0374658U (enrdf_load_stackoverflow) 1989-11-22 1989-11-22

Publications (1)

Publication Number Publication Date
JPH0374658U true JPH0374658U (enrdf_load_stackoverflow) 1991-07-26

Family

ID=31682825

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13556389U Pending JPH0374658U (enrdf_load_stackoverflow) 1989-11-22 1989-11-22

Country Status (1)

Country Link
JP (1) JPH0374658U (enrdf_load_stackoverflow)

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