JPH01135692U - - Google Patents

Info

Publication number
JPH01135692U
JPH01135692U JP3236388U JP3236388U JPH01135692U JP H01135692 U JPH01135692 U JP H01135692U JP 3236388 U JP3236388 U JP 3236388U JP 3236388 U JP3236388 U JP 3236388U JP H01135692 U JPH01135692 U JP H01135692U
Authority
JP
Japan
Prior art keywords
heater
mass flow
flow controller
spring member
clamping means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3236388U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3236388U priority Critical patent/JPH01135692U/ja
Publication of JPH01135692U publication Critical patent/JPH01135692U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Surface Heating Bodies (AREA)
JP3236388U 1988-03-11 1988-03-11 Pending JPH01135692U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3236388U JPH01135692U (enrdf_load_stackoverflow) 1988-03-11 1988-03-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3236388U JPH01135692U (enrdf_load_stackoverflow) 1988-03-11 1988-03-11

Publications (1)

Publication Number Publication Date
JPH01135692U true JPH01135692U (enrdf_load_stackoverflow) 1989-09-18

Family

ID=31258811

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3236388U Pending JPH01135692U (enrdf_load_stackoverflow) 1988-03-11 1988-03-11

Country Status (1)

Country Link
JP (1) JPH01135692U (enrdf_load_stackoverflow)

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