JPH0238475U - - Google Patents

Info

Publication number
JPH0238475U
JPH0238475U JP11479188U JP11479188U JPH0238475U JP H0238475 U JPH0238475 U JP H0238475U JP 11479188 U JP11479188 U JP 11479188U JP 11479188 U JP11479188 U JP 11479188U JP H0238475 U JPH0238475 U JP H0238475U
Authority
JP
Japan
Prior art keywords
mirror
growth chamber
gate valve
vacuum bellow
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11479188U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11479188U priority Critical patent/JPH0238475U/ja
Publication of JPH0238475U publication Critical patent/JPH0238475U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP11479188U 1988-08-30 1988-08-30 Pending JPH0238475U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11479188U JPH0238475U (enrdf_load_stackoverflow) 1988-08-30 1988-08-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11479188U JPH0238475U (enrdf_load_stackoverflow) 1988-08-30 1988-08-30

Publications (1)

Publication Number Publication Date
JPH0238475U true JPH0238475U (enrdf_load_stackoverflow) 1990-03-14

Family

ID=31355865

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11479188U Pending JPH0238475U (enrdf_load_stackoverflow) 1988-08-30 1988-08-30

Country Status (1)

Country Link
JP (1) JPH0238475U (enrdf_load_stackoverflow)

Similar Documents

Publication Publication Date Title
JPH0238475U (enrdf_load_stackoverflow)
JPH0414355U (enrdf_load_stackoverflow)
JPH03115846U (enrdf_load_stackoverflow)
JPS63166896U (enrdf_load_stackoverflow)
JPS6336029U (enrdf_load_stackoverflow)
JPS6255861U (enrdf_load_stackoverflow)
JPH037458U (enrdf_load_stackoverflow)
JPH0276834U (enrdf_load_stackoverflow)
JPS62124755U (enrdf_load_stackoverflow)
JPH0319568U (enrdf_load_stackoverflow)
JPH01138636U (enrdf_load_stackoverflow)
JPH0186230U (enrdf_load_stackoverflow)
JPS63147704U (enrdf_load_stackoverflow)
JPH03116201U (enrdf_load_stackoverflow)
JPH03128942U (enrdf_load_stackoverflow)
JPS6375678U (enrdf_load_stackoverflow)
JPS61180010U (enrdf_load_stackoverflow)
JPH042590U (enrdf_load_stackoverflow)
JPH03120557U (enrdf_load_stackoverflow)
JPH02138048U (enrdf_load_stackoverflow)
JPH0222364U (enrdf_load_stackoverflow)
JPS6166347U (enrdf_load_stackoverflow)
JPS61138237U (enrdf_load_stackoverflow)
JPH0353566U (enrdf_load_stackoverflow)
JPH03125314U (enrdf_load_stackoverflow)