JPH0414355U - - Google Patents

Info

Publication number
JPH0414355U
JPH0414355U JP5490890U JP5490890U JPH0414355U JP H0414355 U JPH0414355 U JP H0414355U JP 5490890 U JP5490890 U JP 5490890U JP 5490890 U JP5490890 U JP 5490890U JP H0414355 U JPH0414355 U JP H0414355U
Authority
JP
Japan
Prior art keywords
support member
rod
exchange rod
tip
convex portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5490890U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5490890U priority Critical patent/JPH0414355U/ja
Publication of JPH0414355U publication Critical patent/JPH0414355U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP5490890U 1990-05-25 1990-05-25 Pending JPH0414355U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5490890U JPH0414355U (enrdf_load_stackoverflow) 1990-05-25 1990-05-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5490890U JPH0414355U (enrdf_load_stackoverflow) 1990-05-25 1990-05-25

Publications (1)

Publication Number Publication Date
JPH0414355U true JPH0414355U (enrdf_load_stackoverflow) 1992-02-05

Family

ID=31577390

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5490890U Pending JPH0414355U (enrdf_load_stackoverflow) 1990-05-25 1990-05-25

Country Status (1)

Country Link
JP (1) JPH0414355U (enrdf_load_stackoverflow)

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