JPH0353566U - - Google Patents

Info

Publication number
JPH0353566U
JPH0353566U JP11165789U JP11165789U JPH0353566U JP H0353566 U JPH0353566 U JP H0353566U JP 11165789 U JP11165789 U JP 11165789U JP 11165789 U JP11165789 U JP 11165789U JP H0353566 U JPH0353566 U JP H0353566U
Authority
JP
Japan
Prior art keywords
load lock
lock chamber
inlet
molecular beam
moved
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11165789U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11165789U priority Critical patent/JPH0353566U/ja
Publication of JPH0353566U publication Critical patent/JPH0353566U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP11165789U 1989-09-26 1989-09-26 Pending JPH0353566U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11165789U JPH0353566U (enrdf_load_stackoverflow) 1989-09-26 1989-09-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11165789U JPH0353566U (enrdf_load_stackoverflow) 1989-09-26 1989-09-26

Publications (1)

Publication Number Publication Date
JPH0353566U true JPH0353566U (enrdf_load_stackoverflow) 1991-05-23

Family

ID=31660129

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11165789U Pending JPH0353566U (enrdf_load_stackoverflow) 1989-09-26 1989-09-26

Country Status (1)

Country Link
JP (1) JPH0353566U (enrdf_load_stackoverflow)

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