JPH0374362B2 - - Google Patents

Info

Publication number
JPH0374362B2
JPH0374362B2 JP58116140A JP11614083A JPH0374362B2 JP H0374362 B2 JPH0374362 B2 JP H0374362B2 JP 58116140 A JP58116140 A JP 58116140A JP 11614083 A JP11614083 A JP 11614083A JP H0374362 B2 JPH0374362 B2 JP H0374362B2
Authority
JP
Japan
Prior art keywords
electron beam
photoresist
beam resist
ion
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58116140A
Other languages
English (en)
Japanese (ja)
Other versions
JPS608802A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11614083A priority Critical patent/JPS608802A/ja
Publication of JPS608802A publication Critical patent/JPS608802A/ja
Publication of JPH0374362B2 publication Critical patent/JPH0374362B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
JP11614083A 1983-06-29 1983-06-29 ブレ−ズド格子の製造方法 Granted JPS608802A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11614083A JPS608802A (ja) 1983-06-29 1983-06-29 ブレ−ズド格子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11614083A JPS608802A (ja) 1983-06-29 1983-06-29 ブレ−ズド格子の製造方法

Publications (2)

Publication Number Publication Date
JPS608802A JPS608802A (ja) 1985-01-17
JPH0374362B2 true JPH0374362B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-11-26

Family

ID=14679726

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11614083A Granted JPS608802A (ja) 1983-06-29 1983-06-29 ブレ−ズド格子の製造方法

Country Status (1)

Country Link
JP (1) JPS608802A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0333304Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1985-10-14 1991-07-15
JPS62179404A (ja) * 1986-02-01 1987-08-06 雪ケ谷化学工業株式会社 化粧用塗布具
AUPR483301A0 (en) * 2001-05-08 2001-05-31 Commonwealth Scientific And Industrial Research Organisation An optical device and methods of manufacture
DE102010047250A1 (de) 2009-12-04 2011-06-09 Giesecke & Devrient Gmbh Sicherheitselement, Wertdokument mit einem solchen Sicherheitselement sowie Herstellungsverfahren eines Sicherheitselementes
DE102009056934A1 (de) 2009-12-04 2011-06-09 Giesecke & Devrient Gmbh Sicherheitselement, Wertdokument mit einem solchen Sicherheitselement sowie Herstellungsverfahren eines Sicherheitselementes
DE102011108242A1 (de) 2011-07-21 2013-01-24 Giesecke & Devrient Gmbh Optisch variables Element, insbesondere Sicherheitselement

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55157705A (en) * 1979-05-29 1980-12-08 Nec Corp Production of blazed grating
JPS5643620A (en) * 1979-09-17 1981-04-22 Mitsubishi Electric Corp Production of blazed grating
JPS5947282B2 (ja) * 1980-02-12 1984-11-17 理化学研究所 エシエレツト格子の製造方法

Also Published As

Publication number Publication date
JPS608802A (ja) 1985-01-17

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