JPH0369853U - - Google Patents

Info

Publication number
JPH0369853U
JPH0369853U JP13118189U JP13118189U JPH0369853U JP H0369853 U JPH0369853 U JP H0369853U JP 13118189 U JP13118189 U JP 13118189U JP 13118189 U JP13118189 U JP 13118189U JP H0369853 U JPH0369853 U JP H0369853U
Authority
JP
Japan
Prior art keywords
sample
electron microscope
scanning electron
electron detector
secondary electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13118189U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13118189U priority Critical patent/JPH0369853U/ja
Publication of JPH0369853U publication Critical patent/JPH0369853U/ja
Pending legal-status Critical Current

Links

JP13118189U 1989-11-10 1989-11-10 Pending JPH0369853U (US20030199744A1-20031023-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13118189U JPH0369853U (US20030199744A1-20031023-C00003.png) 1989-11-10 1989-11-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13118189U JPH0369853U (US20030199744A1-20031023-C00003.png) 1989-11-10 1989-11-10

Publications (1)

Publication Number Publication Date
JPH0369853U true JPH0369853U (US20030199744A1-20031023-C00003.png) 1991-07-11

Family

ID=31678704

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13118189U Pending JPH0369853U (US20030199744A1-20031023-C00003.png) 1989-11-10 1989-11-10

Country Status (1)

Country Link
JP (1) JPH0369853U (US20030199744A1-20031023-C00003.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009026750A (ja) * 2007-06-18 2009-02-05 Fei Co チャンバ内電子検出器
KR101406834B1 (ko) * 2011-10-21 2014-06-18 (주)블루이엔지 스큐를 조절할 수 있는 번인 테스트 장치 및 그 제어 방법

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009026750A (ja) * 2007-06-18 2009-02-05 Fei Co チャンバ内電子検出器
KR101406834B1 (ko) * 2011-10-21 2014-06-18 (주)블루이엔지 스큐를 조절할 수 있는 번인 테스트 장치 및 그 제어 방법

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