JPH0369078B2 - - Google Patents

Info

Publication number
JPH0369078B2
JPH0369078B2 JP17419983A JP17419983A JPH0369078B2 JP H0369078 B2 JPH0369078 B2 JP H0369078B2 JP 17419983 A JP17419983 A JP 17419983A JP 17419983 A JP17419983 A JP 17419983A JP H0369078 B2 JPH0369078 B2 JP H0369078B2
Authority
JP
Japan
Prior art keywords
sample
positioning
rollers
roller
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP17419983A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6067884A (ja
Inventor
Tooru Takamura
Iwao Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinkawa Ltd
Original Assignee
Shinkawa Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinkawa Ltd filed Critical Shinkawa Ltd
Priority to JP17419983A priority Critical patent/JPS6067884A/ja
Publication of JPS6067884A publication Critical patent/JPS6067884A/ja
Publication of JPH0369078B2 publication Critical patent/JPH0369078B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
JP17419983A 1983-09-22 1983-09-22 板状試料の位置決め機構 Granted JPS6067884A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17419983A JPS6067884A (ja) 1983-09-22 1983-09-22 板状試料の位置決め機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17419983A JPS6067884A (ja) 1983-09-22 1983-09-22 板状試料の位置決め機構

Publications (2)

Publication Number Publication Date
JPS6067884A JPS6067884A (ja) 1985-04-18
JPH0369078B2 true JPH0369078B2 (OSRAM) 1991-10-30

Family

ID=15974455

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17419983A Granted JPS6067884A (ja) 1983-09-22 1983-09-22 板状試料の位置決め機構

Country Status (1)

Country Link
JP (1) JPS6067884A (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6231130A (ja) * 1985-08-02 1987-02-10 Matsushita Electric Ind Co Ltd チツプボンデイング装置

Also Published As

Publication number Publication date
JPS6067884A (ja) 1985-04-18

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