JPH0368863A - Ultrasonic flaw detector - Google Patents

Abstract

PURPOSE:To make it possible to detect the flaws in a body under test having the curved surface accurately by making the central axis of an ultrasonic beam agree with the normal direction to the surface of the body under test based on the detected signals of the normal-line components in the scanning direction and in the direction perpendicular to the scanning direction and the distance signal between a probe and the body under test. CONSTITUTION:A body under test 5 is assumed to have a flat surface. A control device 15 operates commands Xo, Yo and Zo for X, Y and Z axes for performing the main scanning in the X direction and the secondary scanning in the Y direction with an ultrasonic probe 1 from time to time. When the body under test 5 has the complicated shape, deviations DELTA1 and DELTA2 around shafts alpha and beta are on the outside of 0. Therefore, driving devices 6 and 7 for the shafts alpha and beta are driven so that the difference in strengths of the received waves of probes 2b and 2c and 4b and 4c becomes 0 all the time. In this way, the central axis of the ultrasonic wave beam from the probe 1 agrees with the normal direction to the surface of the body undert test 5. The deviation of the ultrasonic wave beam from the directions X, Y and Z is operated based on angle alpha and beta of the shafts alpha and beta, and the deviation is corrected. The defect distribution of the body under test 5 is recorded by using the position command signal based on the operations.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to an ultrasonic flaw detection device, and particularly to an ultrasonic flaw detection device suitable for automatic ultrasonic flaw detection of a specimen with a complex surface shape. It is.

[Conventional technology]

As one method of ultrasonic flaw detection for the purpose of detailed flaw detection, there is an automatic water immersion flaw detection method in which a test object is submerged in water and the surface of the test object is scanned with an ultrasonic probe underwater for flaw detection.

In automatic water immersion flaw detection, in order to accurately determine the size and location of flaws (defects), the distance between the ultrasonic probe and the object to be inspected must be kept constant, and the direction of the central axis of the ultrasonic beam must be kept constant. It is necessary to match the normal direction to the surface of the object.

Incidentally, related devices include, for example,
Technology described in Journal of Japan Society of Mechanical Engineers vol. 12.90.4826゜p5-9, JP-A-61-240158, JP-A-Sho. 5
The techniques described in Japanese Patent No. 5-18376 and Jikai n (+58-34781) are known.

[Problems to be Solved by the Invention] The above-mentioned first conventional technique (Journal of the Japan Society of Mechanical Engineers) is capable of detecting flaws on a specimen whose surface is flat, but it is difficult to detect defects on specimens whose surfaces are curved. Flaw detection was impossible because it was difficult to align the central axis of the ultrasonic beam transmitted by the ultrasonic probe with the normal direction of the surface of the object.

Further, in the normal direction control of the second prior art (Japanese Patent Laid-Open No. 61-240158), control is performed only to align the probe with the normal direction of the surface of the object. Therefore, when the probe is swung to control the normal direction, the position of the ultrasonic beam is shifted, and there is a problem in that the ultrasonic beam cannot be accurately applied to the position to be detected.

In this second conventional technique, the same probe is used as the ultrasonic transmission probe for normal direction control and the flaw detection probe. Generally, there are many types of probes.

Each has different characteristics. Therefore, if a probe suitable for flaw detection is used, it is necessary to select four ultrasonic receiving probes for normal direction control according to this probe, resulting in an expensive device. There was also the problem.

Furthermore, in the third prior art (Japanese Unexamined Patent Publication No. 55-18376), the work execution mechanism is rotated while operating each axis of the automatic working machine based on the detected normal direction value, and the same work is performed. The work execution mechanism is controlled to a predetermined posture while maintaining the same position.

There is no problem like the second prior art. However, since the normal direction is detected from the relative position of the work execution mechanism and the workpiece around the work point, there is a problem in that the accurate normal direction at one work point cannot be detected.

In the fourth conventional technology (Japanese Patent Application Laid-Open No. 55-34781), the normal direction is calculated from the relative position information between the workpiece and the sensor attached to the tip of the wrist, and an accurate method at the target point of the sensor is calculated. There was a problem that the line direction could not be detected.

An object of the present invention is to provide an ultrasonic flaw detection bag yt that allows accurate flaw detection of a curved object with an inexpensive device configuration.

[Means to solve the problem]

In order to achieve the above object, the present invention provides an ultrasonic probe that transmits ultrasonic waves to a subject whose surface is not necessarily flat and receives reflected waves from the subject, and a means for positioning the ultrasonic probe. an ultrasonic flaw detection device comprising: a first normal direction detection device for detecting a component in a direction normal to the surface of the object to be inspected with respect to the scanning direction of the ultrasonic probe; a second normal direction detection device that detects a component in the normal direction of the surface of the subject with respect to a direction; a distance detection device that detects the distance between the ultrasound probe and the subject; and the ultrasound probe a plurality of axis drive devices that change the position and orientation of the plurality of axis drive devices based on detection signals from the first normal direction control device, the second normal direction control device, and the distance detection device; The present invention proposes an ultrasonic flaw detection apparatus that includes a control device that aligns the central axis of an ultrasonic beam of an ultrasonic probe with the normal direction of the surface of an object to be inspected.

[Effect]

In the ultrasonic flaw detection apparatus of the present invention having the above means, the distance detection device calculates the distance between the ultrasonic probe and the surface of the object based on the signal from the distance detection sensor.

Output to control device. Based on the conditions given from the input device, the control device first assumes that there is no change in the normal direction of the object surface and that the arm direction is the same as the Z-axis, which is the vertical movement axis, and starts the probe. x, y among multiple axes so that the child passes through a predetermined movement path.

Calculate the Z-axis command value every moment. Then, the first normal direction detection device detects the deviation between the center axis of the ultrasound probe in the scanning direction and the normal direction of the surface of the subject, and selects one of the multiple axes so that the amount of deviation becomes O. Operate the α-axis.

In addition, the amount of deviation between the central axis of the ultrasound probe and the normal to the surface of the specimen in the direction perpendicular to the scanning direction is detected based on information from the surface of the specimen that is hit by the ultrasound beam of the ultrasound probe. , one of the plural axes, the β-axis, is operated so that the amount of deviation becomes O.

Then, the previously calculated command values for the x, y, and z axes are corrected so that the ultrasonic beam of the ultrasonic probe hits the same position on the surface of the object even if the α and β axes operate.

Furthermore, regarding the Z axis, the set 31'! The difference between the distance and the output value of the distance detection device is taken to correct the Z-axis command value. Then, the drive devices for the x, y, and z axes are controlled so that the corrected command values for the x, y, and z axes are met.

Since the apparatus of the present invention operates as described above, it is possible to accurately detect defects on a test object having a complex curved surface, and it is also inexpensive.

〔Example〕

Next, each embodiment of the present invention will be described with reference to the drawings.

FIG. 1 is a block diagram showing the overall configuration of a first embodiment of an ultrasonic flaw detection device according to the present invention, and FIGS.
Figure 4 is a diagram showing the details of the wrist part of the device, Figure 1 is a diagram showing the arrangement of each probe etc. of the device, Figure 5 is a block diagram showing an example of the configuration of the distance detection device, and Figure 6 is a diagram showing details of the wrist part of the device. is a diagram showing the intensity characteristics of the received wave of the first normal direction detection device in the device shown in FIG.
FIG. 7 is a diagram showing an example of the movement path of the ultrasound probe assumed by the control device, and FIG. 8 is a diagram showing the positional relationship of the ultrasound probe budget at the time of distance detection. In addition, in FIGS. 1 to 4, the directions of the X, Y, and Z axes are as indicated by solid arrows, and FIG. 2 is a side view in the X-axis direction.

FIG. 3 is a side view in the Y-axis direction.

1 to 4, 1 is an ultrasonic probe for flaw detection, and 2 is an ultrasonic probe for detecting the normal direction of the surface of the object 5 with respect to the scanning direction (X direction) of the ultrasonic probe 1. It is a normal direction control device. The first normal direction control device v12 is at an angle δ with respect to the ultrasound probe l.

The ultrasonic transmitting probe 2a is tilted and connected by the first bracket 3, and the angle δ2 is set with respect to the ultrasonic transmitting probe 2a.
It consists of ultrasonic receiving probes 2b and 2c which are tilted and connected by a first bracket 3.

4 refers to the scanning direction of the ultrasonic probe 1 as "a second direction that detects the normal direction of the surface of the object 5 with respect to the angular direction (Y direction).
It is a normal direction detection device, and includes an ultrasonic transmitting/receiving probe 4a connected by a first bracket 3 at an angle δ3 (not shown) with respect to the ultrasonic probe 1, and the ultrasonic transmitting/receiving probe 4
It consists of ultrasonic receiving probes 4b and 4c connected by a first bracket 3 at an angle δ4 with respect to a.

Reference numeral 5 represents an object to be examined having a complicated surface shape, and reference numeral 6 represents an α-axis drive device. The drive device 6 is, for example, an electric motor, and when the drive device is operated, the ultrasound probe 1 and the first . A first bracket 3 with a second normal direction detection device 2 and 4 attached thereto.
rotates around the α axis. 7 is a drive device for the β axis, and when the drive device 7 is operated, the first bracket 3 is F@
rotate around. 8 is the second bracket to which the drive device [6 is attached; 9 is the drive device for the Z axis element -11, 10 is the drive device for ZSt+; and the drive device S'? When operating lO, Z
The shaft arm 9 moves in the Z-axis direction, that is, in the vertical direction.

11 is the third bracket. X the third bracket 11
It is also equipped with a drive device that moves it in the , Y, and Z axis directions.
Not shown here.

2 is an input device for specifying the scanning range of the ultrasound probe 1;
13 is a recording device; 14 is a distance detection device that detects the distance between the ultrasound probe 1 and the subject 5; 15 is a control device; 16-
Reference numeral 20 designates amplifiers 9, such as servo amplifiers, for driving devices for each of a plurality of axes.

Reference numerals 21 to 25 indicate signals from the angle detector 2, such as a potentiometer, built into each drive device. 26
30 is a command value from the control device 115, 31 is an ultrasonic signal from the ultrasonic probe 1, and 32 is a signal from the first normal direction detection device 2, and the embodiments shown in FIGS. 2 and 3 , ultrasonic signals from the receiving probes 2b to 2C are shown. Note that the transmitter for the transmitting probe 2a is not shown, and 33 is the second transmitter.
It is a signal from the normal direction detection device 14, and in the embodiments shown in FIGS. A signal from the sonic wave emitting/receiving probe 4a is input to a distance detecting device 14.

FIG. 5 is a block diagram showing an example of the configuration of the distance detection device ]-4.

The distance detection device 14 includes a transmitter 34 that transmits an ultrasonic signal to the ultrasonic transmitter/receiver probe 4a, a receiver 35 that receives the ultrasonic signal reflected from the subject 5, and a timing circuit 36. Become. The clock circuit 36 determines 41 time intervals between the transmission signal from the transmitter 34 and the ultrasound reflected signal from the surface of the subject S, and outputs the time interval to the control device 15. Note that if this time interval is t and the speed of sound in water is V, then the distance m between the transmitting/receiving probe 4a and the surface of the subject 5 is vt, /2
・・・・・・ It is obtained by (1).

FIG. 6 shows an example of the intensity characteristics of the received wave of the first normal direction detection device 2. In FIG. The horizontal axis is the deviation Δ1 around the α axis between the central axis of the ultrasound beam of the ultrasound probe 1 and the normal to the subject 5, the vertical axis is the intensity of the received wave, and A is the ultrasound receiving probe. 2b, and the characteristics of the B ultrasonic receiving probe 2c. Note that regarding the second normal direction device 4 as well, β between the central axis of the ultrasound beam of the ultrasound probe 1 and the normal direction of the subject 5 is
For the deviation Δ2 around the axis, the ultrasonic receiving probe 4b,
The intensity of 4c shows the same characteristics as in FIG.

Next, the control contents of the control device 15 will be explained. First, the control device! In step 115, as shown in FIG. 7, assuming that the object 5 is a flat object with a constant normal direction,
X, so that the ultrasound probe 1 passes through the path shown in FIG.
The command values x, yo, z for the Y and Z axes (distance) are calculated moment by moment. If the actual object 5 is a flat object perpendicular to the Z-axis as shown in FIG. 7, the center axis of the ultrasound beam of the ultrasound probe 1 and the normal direction of the object α
The deviation Δ1 around the axis and the deviation Δ2 around the β axis are O.

On the other hand, if the subject 5 is a complex-shaped object with an intended normal direction, the deviations Δ and Δ2 are other than O. Therefore, the α-axis drive device 6
to drive. Further, the β-axis drive device 7 is driven so that the difference in intensity between the received waves of the ultrasonic receiving probes 4b and 4c is always O.

By controlling in this way, the central axis of the ultrasound beam of the ultrasound probe 1 and the normal direction of the surface of the subject 5 will match.

However, if this continues, the trajectory of the ultrasonic beam hitting the surface of the subject 5 will no longer be a straight line. Therefore, the drive device 6,
Based on the angles α and β of the α and β axes driven by 7, α
, the position of the ultrasonic beam hitting the surface of the subject 5 due to the rotation of the β axis] where t is X, Y.

The amount of deviation in the X-axis direction is calculated. If the amount of deviation is ΔX, ΔY, Δz1, then ΔX=f (α, β)...(2) ΔY=
f, (α, β) ... (3) ΔZ1
=f3 (α, β)... Since the relationship shown in (4) exists, calculation is possible. Regarding the Z-axis, vertical deviation of the subject 5 from the assumed position in FIG. 7 is also taken into consideration.

The amount of deviation is determined as follows. FIG. 8 shows the ultrasonic probe 1 and the ultrasonic transmitter/receiver probe 4a during distance detection,
It shows the positional relationship with the subject 5. Point P is the point between the ultrasonic beam of the ultrasonic probe 1 and the ultrasonic transmitting/receiving probe 4a.
The distance between the ultrasound probe 1 and the subject 5 is controlled so that the point P is located on the surface of the subject. The output value of the distance detection device 14 (distance till between the ultrasonic transmitting/receiving probe 4a and the subject 5) is Ql.
Then, the distance Q between the ultrasound probe 1 and the subject 5 is calculated as follows.

Q = Q, cos δ, +Qa ”'
(s) Therefore, the amount of vertical deviation of the ultrasound probe 1 is determined by the set distance Q ref between the ultrasound probe 1 and the surface of the object 5, and the value a calculated by equation (5). , and let the value of the difference be ΔZ2.

and.

X=X, +ΔX ... (6) Y=
Y, +ΔY...(7)2=2.
+Δz, +Δz2 (8) is calculated, and each axis is servo controlled using the obtained values X, Y, and Z as command values.

A recording device 13 records the received waves of the ultrasound probe 1 and X.

Y-axis position command signal X. , Yo are used to record the defect distribution of the object 5.

In this embodiment, the ultrasonic beam of the ultrasonic probe 1 also hits the first normal direction detection device 2 that detects the normal direction of the surface of the subject with respect to the scanning direction of the ultrasonic probe. Although information from the surface of the object 5 is used, the main axes of the ultrasound probe 1 and the probes 4a to 4c are parallel to each other (δ3=
O) is also good.

Next, a second embodiment of the present invention will be described with reference to FIGS. 9 to 11.

FIG. 9 is a side view in the X-axis direction of the wrist of the ultrasonic flaw detection device according to the second embodiment of the present invention, FIG. 10 is a side view in the Y@force direction, and FIG. It is a figure showing arrangement of each exploration budget of an apparatus. Items with the same numbers as in Figures 2 to 4 are
Since it is the same part as the first embodiment, the explanation thereof will be omitted. Further, the configuration of the ultrasonic flaw detection device other than those shown in the drawings is the same as that of the first one.

In FIGS. 9 and 10, 40 is a normal direction detection device, and a first normal direction detects the normal direction of the surface of the subject 5 with respect to the scanning direction (X direction) of the ultrasound probe 1. It consists of a detection device 40a and second normal direction detection devices 40b and 40c that detect the normal direction of the surface of the subject 5 with respect to the direction (Y direction) perpendicular to the scanning direction of the ultrasound probe. Note that 40a also serves as a part of the rain detection device. The first normal direction detection device 40a is an ultrasonic transmitting/receiving probe, and is tilted at an angle δ with respect to the ultrasonic probe 1.
It is connected by A. Also.

The signal of the ultrasonic transducer probe 40a is guided to the distance detection device 14, which measures the distance between the ultrasonic transducer probe 40a and the subject 5, and is sent to the control device 15, where the received wave A signal is also output to control device 11715.

Furthermore, the second normal direction detection devices [40b, 40c are ultrasonic receiving probes, and are coupled by the first bracket 3A at an angle δ6 with respect to the ultrasonic transmitting/receiving probe 40a.

Next, a method for detecting the normal direction of the surface of the subject 5 with respect to the scanning direction (X direction) of the ultrasound probe 1 using the first normal direction detection device 40a will be described.

First, from the distance between the ultrasonic transducer 40a, which is the output value of the distance detection device 614, and the surface of the object 5 at a certain point in time, the distance between the ultrasonic probe 1 and the object 5 is calculated using equation (5). Calculate the distance a. However, in equation (5), δ3 is δ
, replace it with

Next, move a certain distance in the X direction, and the distance IQ at that time
Calculate. And last time's distance 1aQ is this time's ilt!
The tangential direction of the surface of the subject 5 is determined from the distance and the deformation or angle values of the x, y, z, α, and β axes. The direction of the perpendicular line to this tangent line is the normal direction.

The detection principle of the second normal direction detection devices 40a to 40c is the first
This is exactly the same as described in the embodiment.

By using the normal direction detection method described above and the control method of x, y, and z axis deviation correction by normal direction control shown in the first embodiment, ultrasonic waves of an object having a complex curved surface can be detected. Flaw detection becomes possible.

In the embodiments shown in FIGS. 9 and 10, the detection accuracy in the normal direction of the object surface to the scanning direction of the ultrasound probe 1 is not high, but the detection accuracy in the normal direction to the direction perpendicular to the scanning direction is not high. Since the detection accuracy is high, good flaw detection results can be obtained.

Next, a third embodiment of the present invention will be described with reference to FIGS. 12 to 14.

FIG. 12 is a side view in the X-axis direction of the wrist part of the ultrasonic flaw detection device according to the third embodiment of the present invention, FIG. 13 is a side view in the Y-axis direction, and FIG. FIG. 3 is an explanatory diagram of the arrangement of each probe.

In FIGS. 12 and 13, the same reference numerals as those in FIGS. 2 to 4 are the same parts as in the previous embodiment, so the explanation thereof will be omitted. Further, the configuration of the ultrasonic flaw detection device other than those shown in the drawings is the same as that shown in FIG.

In FIGS. 12 and 13, 41 indicates the object 5 in the direction (Y direction) perpendicular to the scanning direction of the ultrasound probe l.
a second normal direction detection device for detecting the normal direction of the surface of the
an ultrasonic transmitter/receiver probe 41a and an ultrasonic receiver probe 41b,
41. The ultrasonic transmitting/receiving probe 41a is tilted at an angle δ with respect to the ultrasonic probe l, and the first bracket 3
It is connected by B.

Further, the ultrasonic receiving probes 41b and 41c are coupled by the first bracket 3B at an angle δ8 with respect to the ultrasonic transmitting/receiving probe 41a.

Reference numeral 42 denotes an ultrasonic transmitting/receiving probe, which together with the ultrasonic transmitting/receiving probe 41a constitutes a first normal direction detection device.

The ultrasonic transmitting/receiving probe 42 is connected in parallel to the ultrasonic probe 1 by a first bracket 3B.

Further, the signal of the ultrasonic transducer 42 is guided to the distance detection device 14, which measures the distance between the ultrasonic transducer 42 and the surface of the subject 5, and is output to the control device [15]. Ru.

The signal of the ultrasonic transmitter/receiver probe 41a is guided to the distance detecting device 14, as in the case of 40a of the second embodiment in FIG. The distance to the target is measured and output to the control device 15, and the received wave signal is also output to the control device 15.

Subject 5 in the scanning direction (X direction) of the ultrasound probe 1
A method for detecting and controlling the normal direction of the surface will be explained. Ultrasonic wave transmission/reception 44 which is the output value of the distance detection device 14
From the distance between the probe 41a and the surface of the subject 5, the distance Q between the ultrasound probe 1 and the surface of the subject 5 is calculated using equation (5). however.

In equation (5), δ is replaced with 57. Then, this calculated distance value is compared with the distance between the ultrasonic transducer 42 and the surface of the object 5 obtained from the signal of the ultrasonic transmitter/receiver probe 42, and the distance signal is adjusted so that the values of both distance signals match. The α-axis drive device 6 is driven.

The detection principle of each of the probes 41a to 41c of the second normal detection device is exactly the same as that described in the first embodiment.

X and Y by the normal direction detection method and control method described above and the normal direction control described in the first embodiment.

By using a control method such as Z-axis deviation correction, it becomes possible to perform ultrasonic flaw detection on objects having curved surfaces.

Next, a fourth embodiment of the present invention will be described with reference to FIGS. 15 to 18.

FIG. 15 is a side view in the X-axis direction of the wrist of the ultrasonic flaw detection device according to the fourth embodiment of the present invention, FIG. 16 is a side view in the Y-axis direction, and FIG. 17 is the device shown in FIG. FIG. 18 is a diagram showing the intensity characteristics of the received wave of the second normal direction detection device in the device shown in FIG. 15.

In FIG. 15, parts with the same reference numerals as in FIG. 2 are the same parts as in the previous embodiment, so a description thereof will be omitted. Further, the configuration of the ultrasonic flaw detection device other than those shown in the drawings is the same as that shown in FIG.

15 and 16, 4; 3 is a first normal direction detection device that detects the normal direction of the surface of the subject 5 with respect to the scanning direction (X direction) of the ultrasound probe 1; The ultrasonic transmitting/receiving probe 43a consists of two ultrasonic transmitting/receiving probes 43a and 43b.

43b is parallel to the ultrasound probe 1 and
The first bracket 3c is connected to the first bracket 3c at the same distance n from the first bracket 3c.

Further, the signals of the ultrasonic transmitting and receiving probes 43a and 43b are guided to the distance detecting device 14, which measures the distance between the respective ultrasonic transmitting and receiving probes 43a and 43b and the surface of the subject 5,
It is output to the control device 15.

44 is a second normal detection device that detects the normal direction of the surface of the subject 5 with respect to the direction (X direction) perpendicular to the scanning direction of the ultrasound probe 1; δ is an ultrasonic transmitting/receiving probe which is tilted and connected by the first bracket 3C.

The signal is guided to the distance detection device 14, as in the case of 40a of the second embodiment in FIG.
4 and the surface of the subject 5 is measured and output to the control device 15, and a received wave signal is also output to the control device 15.

Subject 5 in the scanning direction (X direction) of the ultrasound probe 1
A method for detecting and controlling the normal direction of the surface will be explained. The distances between the ultrasonic transmitter/receiver probes 43a, 43b and the surface of the subject 5 are compared, and ylA! for the α-axis is adjusted so that the values of both distance signals match. ! The II device 6 is driven.

Next, a method for detecting the normal direction of the surface of the subject 5 with respect to a direction (X direction) perpendicular to the scanning direction of the ultrasound probe 1 and a control method will be described. FIG. 18 shows the intensity of the received wave by the second normal direction detection device 44. The horizontal axis represents the deviation Δ2 around the β axis between the central axis of the ultrasound beam of the ultrasound probe 1 and the normal to the subject 5, and the vertical axis represents the intensity of the received wave. Therefore.

The intensity of the received wave of the second normal direction detection device 44 is always at the 18th level.
The β-axis drive device 7 is driven as indicated by E in the figure.

By using the normal direction detection method and control method described above and the control method such as correction control of the X, Y, and Z axes generated by the normal direction control described in the first embodiment, it is possible to detect objects with complex curved surfaces. Ultrasonic flaw detection becomes possible.

In addition, in the second embodiment shown in FIGS. 9 to 11, the first
When detecting the normal direction of the surface of the subject 5 with respect to the scanning direction (X direction) of the ultrasound probe 1 using the normal direction detection device 40a, the tangential direction of the surface is determined, and the normal direction to this tangent is determined. I was looking for it as a line direction, but instead of this,
The idea shown in Figure 8 can also be adopted. That is, the first
If we consider that FIG. 8 shows the intensity of the received wave from the first normal direction detection device 40a in FIG. The deviation Δ5 between the α-axis and the linear direction, and the vertical axis is the intensity of the received wave. Therefore, the intensity of the received wave of the first normal direction detection device 40a is always at the 18th
What is necessary is to drive the α-axis drive device 6 so that El in the figure is achieved.

Next, a fifth embodiment of the present invention will be described with reference to FIGS. 19 to 21.

19 is a side view in the X-axis direction of the wrist of the ultrasonic flaw detection device according to the fifth embodiment of the present invention, FIG. The configuration of the ultrasonic flaw detection device other than that shown in Figure 0, which is an explanatory diagram of the arrangement of probes, etc., is shown in the first diagram.
It is equivalent to the figure. In FIGS. 19 and 20, parts with the same reference numerals as in FIG. 2 are the same parts as in the previous embodiment, so a description thereof will be omitted.

In FIG. 19, 45 is the scanning direction of the ultrasound probe 1 (
The first normal direction detection device detects the normal direction of the surface of the subject 5 with respect to the It is a receiving probe.

46 is a second normal direction detection device that detects the surface of the subject 5 in a direction (Y direction) perpendicular to the scanning direction of the ultrasound probe 1, and is set at an angle δttl'i1 with respect to the ultrasound probe l. This is an ultrasonic transmitting/receiving probe connected by a first bracket 3D. The number 4g is 40 of the second embodiment in Figure 9.
As in the case of a, the distance between the ultrasonic transducer 46 and the surface of the subject 5 is measured by the distance detection device 14, and the distance between the ultrasonic transducer 46 and the surface of the object 5 is outputted to the control device 1-5, and the received wave signal is also sent to the control device. 15.

The detection direction of the normal direction in this embodiment is the detection direction of the normal to the surface of the subject 5 in the fourth embodiment shown in FIG. You can also do exactly the same method. That is, the α-axis drive device 6 is driven so that the intensity of the received wave from the first normal direction detection device 45 is always a certain constant value, and the intensity of the received wave from the second normal direction detection device 46 is always kept at a certain constant value. The β-axis drive device 7 is driven to a certain constant value.

By using the normal direction detection method and control method described above and the control method such as the correction control of the x, y, and z axes caused by the normal direction control described in the first embodiment, an object having a complicated Ultrasonic flaw detection becomes possible.

Furthermore, since the normal direction detection uses information about the surface on which the ultrasonic beam of the ultrasonic probe 1 hits, the accuracy is high.

Furthermore, the normal direction detection device and the distance detection device can be configured with two ultrasonic probes, resulting in an inexpensive device.

Next, a sixth embodiment of the present invention will be described with reference to FIGS. 22 to 24.

FIG. 22 is a side view in the X-axis direction of the wrist part of the ultrasonic flaw detection device according to the sixth embodiment of the present invention, FIG. 23 is a side view in the Y-axis direction, and FIG. FIG. 3 is an explanatory diagram of the arrangement of probes and the like. The configuration of the ultrasonic flaw detection device other than those shown is the same as that shown in FIG. 1.

In FIGS. 22 and 23, parts with the same reference numerals as in FIG. 2 are the same parts as in the previous embodiment, and therefore their explanation will be omitted.

In FIG. 22 and FIG. 23, 47 is number ■.

An ultrasonic transceiver probe that also serves as a second normal direction detection device.
It is coupled by the first bracket 3E at an angle of 6.2 with respect to the ultrasonic probe 1, and the signal is transmitted as shown in the second bracket in FIG.
As in the case of 40a in the embodiment, the distance detection device 14 determines the distance between the ultrasonic transducer 47 and the surface of the object 5, and outputs the received wave signal to the control device 15. is also output to the control device 15.

Detection and control of the normal direction of the surface of the object 5 with respect to the scanning direction (X direction) of the ultrasonic probe 1 in the sixth embodiment shown in FIG. 22 is performed by using the probe 1 also as a distance detection element. do. The previous distance detection value T, 1 and the current distance detection value L2 at a position separated by a predetermined travel distance in the X direction in Fig. 22
The line connecting the fixed points on both sides is determined as an approximate tangent line, and the line parallel to this tangent line is determined as the normal line to control the direction of the ultrasound probe 1.

On the other hand, the method shown in FIG. 9 or 16 is employed to detect and control the normal direction of the subject 5 with respect to the direction (Y direction) perpendicular to the scanning direction shown in FIG. 23.

By using the normal direction detection method and control method described above and the control method such as correction control of the x, y, and z axes generated by the normal direction control described in the first embodiment, objects with complex curved surfaces can be Ultrasonic flaw detection becomes possible.

Furthermore, the normal direction detection device and the distance detection device can be configured with one ultrasonic probe, resulting in a very inexpensive device.

In each of the above embodiments, an ultrasonic probe was used as a device for measuring only distance, but any device may be used as long as it can detect distance.

In addition, a driving device is provided to drive only the ultrasound probe 1 in a downward direction, and a focusing probe is used as the ultrasound probe 1, and the focusing probe is moved little by little. Flaw detection enables so-called B-scope method flaw detection and three-dimensional flaw detection, and the present invention is also effective for these methods.

By using the device of the present invention as described above, it is possible to distinguish between a device for normal direction control and a probe for probing, and select the most suitable probe for flaw detection.

In addition, since detection of the normal direction of the surface of the object in the direction perpendicular to the scanning direction of the ultrasound probe 1 is based on information about the surface that is hit by the ultrasound beam of the ultrasound probe, the normal direction Detection accuracy is good and flaw detection of the object is accurate.

〔Effect of the invention〕

According to the present invention, an inexpensive ultrasonic flaw detection device capable of accurately detecting flaws in a test object having a complicated curved surface can be obtained.

[Brief explanation of drawings]

FIG. 1 is a block diagram showing the overall configuration of the first embodiment of the ultrasonic flaw detection device according to the present invention, FIGS. 2 and 3 are side views showing details of the wrist portion in FIG. 1, and FIG. Fig. 1 is a diagram showing the arrangement of each probe, etc. of the device, Fig. 5 is a block diagram showing an example of the configuration of the distance detection device, and Fig. 6 is the reception of the first normal direction detection device in the device shown in Fig. 1. A diagram showing an example of wave intensity characteristics, No. 7 (3) is the control ViP! FIG. 8 is a diagram showing an example of the movement path of an ultrasound probe detected by a patient, FIG.
10 and 10 are side views of the wrist part of the ultrasonic flaw detection device according to the second embodiment of the present invention, FIG. I1 is a diagram showing the arrangement of each probe of the device in FIG. FIG. 13 is a side view of the wrist part of the ultrasonic flaw detection device according to the third embodiment of the present invention, FIG. 14 is a diagram showing the arrangement α of each probe, etc. of the device in FIG. 12, and FIGS. 15 and 16. 17 is a side view of the wrist part of the ultrasonic flaw detection device according to the fourth embodiment of the present invention, FIG. 17 is a diagram showing the arrangement of each probe etc. in the device shown in FIG. 15, and FIG. 2. Diagrams 19 and 20 showing the intensity characteristics of the received waves of the normal direction detection device.
The figure is a side view of the wrist part of the ultrasonic flaw detection device according to the fifth embodiment of the present invention, FIG. 21 is a diagram showing the arrangement of each probe etc. of the device in FIG. 19, and FIGS. FIG. 24 is a side view of the wrist part of the ultrasonic flaw detection apparatus according to the sixth embodiment of the invention, and FIG. 22 is a diagram showing the arrangement of each probe of the apparatus. 1... Ultrasonic probe, 2,40a, 42,43°4
5... first normal direction detection device, 4, 40 b, 40
c, 41, 44.46... second normal direction detection device, 5
...Object to be inspected, 6...α-axis drive device, 7...
β-axis drive device, 10... Z-axis circumferential drive device,
12... Input device, 14... Distance detection device,
15...control device.

Claims (1)

[Scope of Claims] 1. Ultrasonic waves having an ultrasonic probe that transmits ultrasonic waves to a subject whose surface is not necessarily flat and receives reflected waves from the subject, and means for positioning the ultrasonic probe. The flaw detection device includes: a first normal direction detection device that detects a component in a normal direction of the surface of the object to be inspected with respect to the scanning direction of the ultrasonic probe; a second normal direction detection device that detects a component in the normal direction of the specimen surface; a distance detection device that detects the distance between the ultrasound probe and the specimen; and a position and orientation of the ultrasound probe. an axial drive device for a plurality of axes that changes the direction of the ultrasonic probe; An ultrasonic flaw detection apparatus comprising: a control device that aligns the central axis of the ultrasonic beam of the probe with the normal direction of the surface of the object to be inspected. 2. At least one of the first normal direction control device and the second normal direction control device has a predetermined angle (including 0 degrees) with respect to the ultrasound probe in a plane in the scanning direction. It consists of a combined ultrasonic transmitting probe and two ultrasonic receiving probes connected at a predetermined angle to both sides of the ultrasonic transmitting probe, and the control device controls the two ultrasonic receiving probes on both sides of the ultrasonic transmitting probe. 2. The ultrasonic flaw detection apparatus according to claim 1, further comprising means for determining a direction in which the outputs of the two ultrasonic receiving probes coincide as a normal direction on the surface of the object. 3. At least one of the first normal direction control device and the second normal direction control device has a predetermined angle (including 0 degrees) with respect to the ultrasonic probe in a plane in the scanning direction. The controller comprises coupled ultrasonic transmitting and receiving probes, and the control device detects two points based on detection signals at two points before and after the ultrasonic transmitting and receiving probe has moved a predetermined distance in the scanning direction.
2. The ultrasonic flaw detection apparatus according to claim 1, further comprising means for determining a tangent line between points and determining a direction of a perpendicular line to the tangent line as a normal direction. 4. At least one of the first normal direction control device and the second normal direction control device has a predetermined angle (including 0 degrees) with respect to the ultrasonic probe in a plane in the scanning direction. a coupled ultrasonic transmitting and receiving probe, and an ultrasonic probe coupled parallel to the ultrasonic probe on the opposite side of the ultrasonic transmitting probe with the ultrasonic probe in between. a sonic wave emitting/receiving probe; The ultrasonic flaw detection apparatus according to claim 1, further comprising means for determining a normal direction based on a detection distance of the object obtained through the apparatus. 5. At least one of the first normal direction control device and the second normal direction control device is parallel to the ultrasound probe and the same distance from the ultrasound probe in the scanning direction. It consists of two ultrasonic transmitting and receiving probes that are coupled apart, and the control device determines two detection distances of the object obtained from the two ultrasonic transmitting and receiving probes via the distance detecting device. The ultrasonic flaw detection apparatus according to claim 1, further comprising means for determining a coincident direction as a normal direction. 6. An ultrasonic transmitting/receiving probe in which at least one of the first normal direction control device and the second normal direction control device is coupled to the ultrasonic probe at a predetermined angle in the scanning direction. 2. The control device includes means for determining a direction in which a received wave of the ultrasonic wave emitting/receiving probe has a predetermined constant intensity as a normal direction in a scanning direction of the surface of the subject. Ultrasonic flaw detection equipment. 7. At least one of the first normal direction control device and the second normal direction control device includes the ultrasonic probe, and the control device controls the ultrasonic probe in a predetermined direction in the scanning direction. A straight line connecting the measurement points at both positions is determined as an approximate tangent line based on the difference between the distance detection values obtained from the ultrasound probe at the positions before and after the distance has been moved, and the direction of the perpendicular line to this tangent line is determined as the normal direction. The ultrasonic flaw detection apparatus according to claim 1, further comprising means. 8. Claims 1 to 8, wherein the control device includes means for determining deviations in the X, Y, and Z axis directions by normal control in the scanning direction and a direction perpendicular to the scanning direction, and causing the respective axis driving devices to correct the deviations. 7. The ultrasonic flaw detection device according to any one of 7.