JPH0368759A - 薄膜形成装置 - Google Patents

薄膜形成装置

Info

Publication number
JPH0368759A
JPH0368759A JP1043757A JP4375789A JPH0368759A JP H0368759 A JPH0368759 A JP H0368759A JP 1043757 A JP1043757 A JP 1043757A JP 4375789 A JP4375789 A JP 4375789A JP H0368759 A JPH0368759 A JP H0368759A
Authority
JP
Japan
Prior art keywords
substrate
boat
thin film
evaporation
deposit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1043757A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0477071B2 (enEXAMPLES
Inventor
Takashi Iwabuchi
岩渕　俊
Takuhiro Ono
小野　拓弘
Takeo Miyata
宮田　威男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP1043757A priority Critical patent/JPH0368759A/ja
Publication of JPH0368759A publication Critical patent/JPH0368759A/ja
Publication of JPH0477071B2 publication Critical patent/JPH0477071B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Surface Treatment Of Optical Elements (AREA)
  • Physical Vapour Deposition (AREA)
JP1043757A 1989-02-23 1989-02-23 薄膜形成装置 Granted JPH0368759A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1043757A JPH0368759A (ja) 1989-02-23 1989-02-23 薄膜形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1043757A JPH0368759A (ja) 1989-02-23 1989-02-23 薄膜形成装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP57222415A Division JPS59113174A (ja) 1982-12-17 1982-12-17 薄膜形成方法および薄膜形成装置

Publications (2)

Publication Number Publication Date
JPH0368759A true JPH0368759A (ja) 1991-03-25
JPH0477071B2 JPH0477071B2 (enEXAMPLES) 1992-12-07

Family

ID=12672634

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1043757A Granted JPH0368759A (ja) 1989-02-23 1989-02-23 薄膜形成装置

Country Status (1)

Country Link
JP (1) JPH0368759A (enEXAMPLES)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008255465A (ja) * 2007-03-15 2008-10-23 Nippon Steel Materials Co Ltd 一酸化珪素蒸着材料の製造方法およびその製造装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008255465A (ja) * 2007-03-15 2008-10-23 Nippon Steel Materials Co Ltd 一酸化珪素蒸着材料の製造方法およびその製造装置

Also Published As

Publication number Publication date
JPH0477071B2 (enEXAMPLES) 1992-12-07

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