JPH0367062U - - Google Patents
Info
- Publication number
- JPH0367062U JPH0367062U JP12795889U JP12795889U JPH0367062U JP H0367062 U JPH0367062 U JP H0367062U JP 12795889 U JP12795889 U JP 12795889U JP 12795889 U JP12795889 U JP 12795889U JP H0367062 U JPH0367062 U JP H0367062U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- substrate holder
- forming apparatus
- film forming
- sealing mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 9
- 238000001816 cooling Methods 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims 3
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989127958U JP2508722Y2 (ja) | 1989-10-31 | 1989-10-31 | 成膜装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989127958U JP2508722Y2 (ja) | 1989-10-31 | 1989-10-31 | 成膜装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0367062U true JPH0367062U (id) | 1991-06-28 |
JP2508722Y2 JP2508722Y2 (ja) | 1996-08-28 |
Family
ID=31675692
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1989127958U Expired - Lifetime JP2508722Y2 (ja) | 1989-10-31 | 1989-10-31 | 成膜装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2508722Y2 (id) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001354083A (ja) * | 2000-06-14 | 2001-12-25 | Miyazaki Mold Kk | 自動車ナンバープレート用カバー装置 |
JP2002339064A (ja) * | 2001-05-16 | 2002-11-27 | Anelva Corp | 真空処理装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61142863U (id) * | 1985-02-27 | 1986-09-03 | ||
JPS6220868U (id) * | 1985-07-23 | 1987-02-07 | ||
JPS62235729A (ja) * | 1986-04-07 | 1987-10-15 | Nec Corp | 気相エピタキシヤル成長装置 |
JPH01149472U (id) * | 1988-04-08 | 1989-10-17 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5952583A (ja) * | 1982-09-18 | 1984-03-27 | Dowa Mining Co Ltd | 鉄酸化バクテリアを使用する砒素と鉄を含有する水溶液の処理法 |
-
1989
- 1989-10-31 JP JP1989127958U patent/JP2508722Y2/ja not_active Expired - Lifetime
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61142863U (id) * | 1985-02-27 | 1986-09-03 | ||
JPS6220868U (id) * | 1985-07-23 | 1987-02-07 | ||
JPS62235729A (ja) * | 1986-04-07 | 1987-10-15 | Nec Corp | 気相エピタキシヤル成長装置 |
JPH01149472U (id) * | 1988-04-08 | 1989-10-17 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001354083A (ja) * | 2000-06-14 | 2001-12-25 | Miyazaki Mold Kk | 自動車ナンバープレート用カバー装置 |
JP2002339064A (ja) * | 2001-05-16 | 2002-11-27 | Anelva Corp | 真空処理装置 |
Also Published As
Publication number | Publication date |
---|---|
JP2508722Y2 (ja) | 1996-08-28 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |