JPH0367062U - - Google Patents

Info

Publication number
JPH0367062U
JPH0367062U JP12795889U JP12795889U JPH0367062U JP H0367062 U JPH0367062 U JP H0367062U JP 12795889 U JP12795889 U JP 12795889U JP 12795889 U JP12795889 U JP 12795889U JP H0367062 U JPH0367062 U JP H0367062U
Authority
JP
Japan
Prior art keywords
substrate
substrate holder
forming apparatus
film forming
sealing mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12795889U
Other languages
Japanese (ja)
Other versions
JP2508722Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989127958U priority Critical patent/JP2508722Y2/en
Publication of JPH0367062U publication Critical patent/JPH0367062U/ja
Application granted granted Critical
Publication of JP2508722Y2 publication Critical patent/JP2508722Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案の一実施例による成膜装置の概
略構成図、第２図は前記装置における冷却水配管
システムの模式図である。 １……チヤンバ、２……基板ホルダ、３……基
板、６……ヒータ、９……中空軸、１２……支持
部材、１３ａ〜１３ｄ……Ｏリング、１５……サ
ブジヤケツト、２５……モータ、３０……冷却ジ
ヤケツト。 FIG. 1 is a schematic diagram of a film forming apparatus according to an embodiment of the present invention, and FIG. 2 is a schematic diagram of a cooling water piping system in the apparatus. DESCRIPTION OF SYMBOLS 1... Chamber, 2... Substrate holder, 3... Substrate, 6... Heater, 9... Hollow shaft, 12... Support member, 13a-13d... O-ring, 15... Sub jacket, 25... Motor , 30...cooling jacket.

Claims (1)

【実用新案登録請求の範囲】 基板を加熱しながら回転させて成膜を行う成膜
装置であつて、 基板背面側に設けられ基板を加熱するためのヒ
ータと、チヤンバに回転自在に支持され基板を保
持するための基板ホルダと、前記基板ホルダの支
持部をシールするためのシール機構と、前記シー
ル機構を冷却するための冷却ジヤケツトとを備え
た成膜装置。[Claim for Utility Model Registration] A film forming apparatus that forms a film by rotating a substrate while heating it, which includes a heater provided on the back side of the substrate to heat the substrate, and a substrate rotatably supported in a chamber. A film forming apparatus comprising: a substrate holder for holding a substrate holder; a sealing mechanism for sealing a support portion of the substrate holder; and a cooling jacket for cooling the sealing mechanism.
JP1989127958U 1989-10-31 1989-10-31 Film forming equipment Expired - Lifetime JP2508722Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989127958U JP2508722Y2 (en) 1989-10-31 1989-10-31 Film forming equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989127958U JP2508722Y2 (en) 1989-10-31 1989-10-31 Film forming equipment

Publications (2)

Publication Number Publication Date
JPH0367062U true JPH0367062U (en) 1991-06-28
JP2508722Y2 JP2508722Y2 (en) 1996-08-28

Family

ID=31675692

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989127958U Expired - Lifetime JP2508722Y2 (en) 1989-10-31 1989-10-31 Film forming equipment

Country Status (1)

Country Link
JP (1) JP2508722Y2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001354083A (en) * 2000-06-14 2001-12-25 Miyazaki Mold Kk Device for covering automobile number plate
JP2002339064A (en) * 2001-05-16 2002-11-27 Anelva Corp Vacuum treatment apparatus

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61142863U (en) * 1985-02-27 1986-09-03
JPS6220868U (en) * 1985-07-23 1987-02-07
JPS62235729A (en) * 1986-04-07 1987-10-15 Nec Corp Vapor phase epitaxial growth device
JPH01149472U (en) * 1988-04-08 1989-10-17

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5952583A (en) * 1982-09-18 1984-03-27 Dowa Mining Co Ltd Treatment of aqueous solution containing arsenic and iron using iron-oxidizing bacteria

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61142863U (en) * 1985-02-27 1986-09-03
JPS6220868U (en) * 1985-07-23 1987-02-07
JPS62235729A (en) * 1986-04-07 1987-10-15 Nec Corp Vapor phase epitaxial growth device
JPH01149472U (en) * 1988-04-08 1989-10-17

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001354083A (en) * 2000-06-14 2001-12-25 Miyazaki Mold Kk Device for covering automobile number plate
JP2002339064A (en) * 2001-05-16 2002-11-27 Anelva Corp Vacuum treatment apparatus

Also Published As

Publication number Publication date
JP2508722Y2 (en) 1996-08-28

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term