JPS6381863U - - Google Patents
Info
- Publication number
- JPS6381863U JPS6381863U JP17465786U JP17465786U JPS6381863U JP S6381863 U JPS6381863 U JP S6381863U JP 17465786 U JP17465786 U JP 17465786U JP 17465786 U JP17465786 U JP 17465786U JP S6381863 U JPS6381863 U JP S6381863U
- Authority
- JP
- Japan
- Prior art keywords
- film
- heat medium
- movable
- disposed
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims description 5
- 230000003028 elevating effect Effects 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
- Physical Vapour Deposition (AREA)
Description
第１図は本考案の一実施例を示すフイルム加熱
機構の全体断面図であり、第２図はその要部の断
面図である。
Ｆ……フイルム、１……フイルム保持機構、２
……フイルム加熱機構、１２……ワーク回転軸（
ヒータ昇降部材）、１３……ヒータ、２７ａ，ｂ
，ｃ……熱媒体ジヤケツト、３０……加熱面。
FIG. 1 is an overall sectional view of a film heating mechanism showing an embodiment of the present invention, and FIG. 2 is a sectional view of the main parts thereof. F...Film, 1...Film holding mechanism, 2
...Film heating mechanism, 12...Work rotation axis (
heater elevating member), 13... heater, 27a, b
, c... Heat medium jacket, 30... Heating surface.
Claims (1)
ると共に加熱面にクラウンを形成してなるヒータ
を、フイルムに対し昇降自在に配設したことを特
徴とするフイルム加熱機構。 A film heating mechanism characterized in that a heater including a heat medium jacket for circulating heat medium oil and having a crown formed on the heating surface is disposed so as to be movable up and down with respect to the film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986174657U JPH0619566Y2 (en) | 1986-11-12 | 1986-11-12 | Film substrate deposition equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986174657U JPH0619566Y2 (en) | 1986-11-12 | 1986-11-12 | Film substrate deposition equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6381863U true JPS6381863U (en) | 1988-05-30 |
| JPH0619566Y2 JPH0619566Y2 (en) | 1994-05-25 |
Family
ID=31113248
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986174657U Expired - Lifetime JPH0619566Y2 (en) | 1986-11-12 | 1986-11-12 | Film substrate deposition equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0619566Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010165818A (en) * | 2009-01-15 | 2010-07-29 | Fuji Electric Holdings Co Ltd | Method of manufacturing thin film photoelectric conversion element, and film-forming apparatus |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59107076A (en) * | 1982-12-09 | 1984-06-21 | Ricoh Co Ltd | Forming device for thin film |
-
1986
- 1986-11-12 JP JP1986174657U patent/JPH0619566Y2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59107076A (en) * | 1982-12-09 | 1984-06-21 | Ricoh Co Ltd | Forming device for thin film |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010165818A (en) * | 2009-01-15 | 2010-07-29 | Fuji Electric Holdings Co Ltd | Method of manufacturing thin film photoelectric conversion element, and film-forming apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0619566Y2 (en) | 1994-05-25 |