JPS6398367U - - Google Patents
Info
- Publication number
- JPS6398367U JPS6398367U JP19221386U JP19221386U JPS6398367U JP S6398367 U JPS6398367 U JP S6398367U JP 19221386 U JP19221386 U JP 19221386U JP 19221386 U JP19221386 U JP 19221386U JP S6398367 U JPS6398367 U JP S6398367U
- Authority
- JP
- Japan
- Prior art keywords
- holder
- block
- sample
- cool
- rotating shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011810 insulating material Substances 0.000 claims description 2
- 239000000498 cooling water Substances 0.000 claims 2
- 238000001816 cooling Methods 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19221386U JPS6398367U (id) | 1986-12-12 | 1986-12-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19221386U JPS6398367U (id) | 1986-12-12 | 1986-12-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6398367U true JPS6398367U (id) | 1988-06-25 |
Family
ID=31147079
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19221386U Pending JPS6398367U (id) | 1986-12-12 | 1986-12-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6398367U (id) |
-
1986
- 1986-12-12 JP JP19221386U patent/JPS6398367U/ja active Pending