JPH0366279B2 - - Google Patents

Info

Publication number
JPH0366279B2
JPH0366279B2 JP57139029A JP13902982A JPH0366279B2 JP H0366279 B2 JPH0366279 B2 JP H0366279B2 JP 57139029 A JP57139029 A JP 57139029A JP 13902982 A JP13902982 A JP 13902982A JP H0366279 B2 JPH0366279 B2 JP H0366279B2
Authority
JP
Japan
Prior art keywords
crystal
melt
gaas
pulling
inner tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57139029A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5930793A (ja
Inventor
Yoshinari Matsumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP57139029A priority Critical patent/JPS5930793A/ja
Publication of JPS5930793A publication Critical patent/JPS5930793A/ja
Publication of JPH0366279B2 publication Critical patent/JPH0366279B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP57139029A 1982-08-10 1982-08-10 結晶成長方法及び結晶引上げ装置 Granted JPS5930793A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57139029A JPS5930793A (ja) 1982-08-10 1982-08-10 結晶成長方法及び結晶引上げ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57139029A JPS5930793A (ja) 1982-08-10 1982-08-10 結晶成長方法及び結晶引上げ装置

Publications (2)

Publication Number Publication Date
JPS5930793A JPS5930793A (ja) 1984-02-18
JPH0366279B2 true JPH0366279B2 (enrdf_load_stackoverflow) 1991-10-16

Family

ID=15235798

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57139029A Granted JPS5930793A (ja) 1982-08-10 1982-08-10 結晶成長方法及び結晶引上げ装置

Country Status (1)

Country Link
JP (1) JPS5930793A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS5930793A (ja) 1984-02-18

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