JPS5930793A - 結晶成長方法及び結晶引上げ装置 - Google Patents

結晶成長方法及び結晶引上げ装置

Info

Publication number
JPS5930793A
JPS5930793A JP57139029A JP13902982A JPS5930793A JP S5930793 A JPS5930793 A JP S5930793A JP 57139029 A JP57139029 A JP 57139029A JP 13902982 A JP13902982 A JP 13902982A JP S5930793 A JPS5930793 A JP S5930793A
Authority
JP
Japan
Prior art keywords
crystal
melt
gaas
inner tube
pulling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57139029A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0366279B2 (enrdf_load_stackoverflow
Inventor
Yoshinari Matsumoto
松本　良成
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP57139029A priority Critical patent/JPS5930793A/ja
Publication of JPS5930793A publication Critical patent/JPS5930793A/ja
Publication of JPH0366279B2 publication Critical patent/JPH0366279B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP57139029A 1982-08-10 1982-08-10 結晶成長方法及び結晶引上げ装置 Granted JPS5930793A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57139029A JPS5930793A (ja) 1982-08-10 1982-08-10 結晶成長方法及び結晶引上げ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57139029A JPS5930793A (ja) 1982-08-10 1982-08-10 結晶成長方法及び結晶引上げ装置

Publications (2)

Publication Number Publication Date
JPS5930793A true JPS5930793A (ja) 1984-02-18
JPH0366279B2 JPH0366279B2 (enrdf_load_stackoverflow) 1991-10-16

Family

ID=15235798

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57139029A Granted JPS5930793A (ja) 1982-08-10 1982-08-10 結晶成長方法及び結晶引上げ装置

Country Status (1)

Country Link
JP (1) JPS5930793A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0366279B2 (enrdf_load_stackoverflow) 1991-10-16

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