JPH036615B2 - - Google Patents
Info
- Publication number
- JPH036615B2 JPH036615B2 JP56030266A JP3026681A JPH036615B2 JP H036615 B2 JPH036615 B2 JP H036615B2 JP 56030266 A JP56030266 A JP 56030266A JP 3026681 A JP3026681 A JP 3026681A JP H036615 B2 JPH036615 B2 JP H036615B2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- hole
- center point
- objective lens
- lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003287 optical effect Effects 0.000 claims description 11
- 230000007246 mechanism Effects 0.000 claims description 8
- 230000004907 flux Effects 0.000 claims description 5
- 239000011324 bead Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 9
- 230000000694 effects Effects 0.000 description 4
- 238000010894 electron beam technology Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56030266A JPS57145259A (en) | 1981-03-03 | 1981-03-03 | Scanning type electron microscope and its similar device |
US06/347,863 US4437009A (en) | 1981-03-03 | 1982-02-11 | Scanning electron microscope or similar equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56030266A JPS57145259A (en) | 1981-03-03 | 1981-03-03 | Scanning type electron microscope and its similar device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57145259A JPS57145259A (en) | 1982-09-08 |
JPH036615B2 true JPH036615B2 (US20100223739A1-20100909-C00005.png) | 1991-01-30 |
Family
ID=12298894
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56030266A Granted JPS57145259A (en) | 1981-03-03 | 1981-03-03 | Scanning type electron microscope and its similar device |
Country Status (2)
Country | Link |
---|---|
US (1) | US4437009A (US20100223739A1-20100909-C00005.png) |
JP (1) | JPS57145259A (US20100223739A1-20100909-C00005.png) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5978434A (ja) * | 1982-10-26 | 1984-05-07 | Akashi Seisakusho Co Ltd | 電磁式対物レンズ |
JPS60155162U (ja) * | 1984-03-26 | 1985-10-16 | 日本電子株式会社 | 走査電子顕微鏡用対物レンズ |
US4864228A (en) * | 1985-03-15 | 1989-09-05 | Fairchild Camera And Instrument Corporation | Electron beam test probe for integrated circuit testing |
US4912405A (en) * | 1985-08-16 | 1990-03-27 | Schlumberger Technology Corporation | Magnetic lens and electron beam deflection system |
JPH0530279Y2 (US20100223739A1-20100909-C00005.png) * | 1987-04-17 | 1993-08-03 | ||
KR920000941B1 (ko) * | 1988-02-16 | 1992-01-31 | 후지쓰 가부시끼가이샤 | 전자빔 노광장치 |
JPH077654B2 (ja) * | 1988-04-01 | 1995-01-30 | 株式会社日立製作所 | 走査型電子顕微鏡 |
US5079428A (en) * | 1989-08-31 | 1992-01-07 | Bell Communications Research, Inc. | Electron microscope with an asymmetrical immersion lens |
JP2875940B2 (ja) * | 1993-08-26 | 1999-03-31 | 株式会社日立製作所 | 試料の高さ計測手段を備えた電子ビーム装置 |
JP2003331770A (ja) * | 2002-05-15 | 2003-11-21 | Seiko Instruments Inc | 電子線装置 |
JP5350123B2 (ja) | 2009-08-10 | 2013-11-27 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置及び画像表示方法 |
US8389962B2 (en) * | 2011-05-31 | 2013-03-05 | Applied Materials Israel, Ltd. | System and method for compensating for magnetic noise |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4851578A (US20100223739A1-20100909-C00005.png) * | 1971-10-29 | 1973-07-19 | ||
JPS54935A (en) * | 1977-06-06 | 1979-01-06 | Hitachi Ltd | Pattern detector |
JPS5532298U (US20100223739A1-20100909-C00005.png) * | 1978-08-24 | 1980-03-01 | ||
JPS55115247A (en) * | 1979-02-28 | 1980-09-05 | Jeol Ltd | Scale factor controller for scanning electron microscope |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5758689Y2 (US20100223739A1-20100909-C00005.png) * | 1977-02-08 | 1982-12-15 | ||
JPS5841642Y2 (ja) * | 1979-01-08 | 1983-09-20 | 株式会社島津製作所 | 電子線照射分析装置の試料ホルダ− |
-
1981
- 1981-03-03 JP JP56030266A patent/JPS57145259A/ja active Granted
-
1982
- 1982-02-11 US US06/347,863 patent/US4437009A/en not_active Expired - Lifetime
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4851578A (US20100223739A1-20100909-C00005.png) * | 1971-10-29 | 1973-07-19 | ||
JPS54935A (en) * | 1977-06-06 | 1979-01-06 | Hitachi Ltd | Pattern detector |
JPS5532298U (US20100223739A1-20100909-C00005.png) * | 1978-08-24 | 1980-03-01 | ||
JPS55115247A (en) * | 1979-02-28 | 1980-09-05 | Jeol Ltd | Scale factor controller for scanning electron microscope |
Also Published As
Publication number | Publication date |
---|---|
JPS57145259A (en) | 1982-09-08 |
US4437009A (en) | 1984-03-13 |
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