JPH0366147U - - Google Patents
Info
- Publication number
- JPH0366147U JPH0366147U JP12730289U JP12730289U JPH0366147U JP H0366147 U JPH0366147 U JP H0366147U JP 12730289 U JP12730289 U JP 12730289U JP 12730289 U JP12730289 U JP 12730289U JP H0366147 U JPH0366147 U JP H0366147U
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- sample
- inductively coupled
- coupled plasma
- cooling water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009616 inductively coupled plasma Methods 0.000 claims description 4
- 239000000498 cooling water Substances 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims 1
- 150000002500 ions Chemical class 0.000 claims 1
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
Landscapes
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Electron Tubes For Measurement (AREA)
Description
第１図は本考案実施例の要部裁断構成斜視図、
第２図は高周波誘導結合プラズマ質量分析計の全
体的な構成説明図、第３図は従来例の要部構成説
明図である。 １……プラズマトーチ、３……アルゴンガス供
給源、７……高周波誘導結合プラズマ、８……ノ
ズル、９……スキマー、１６……マスフイルタ、
１９……光電子増倍管、２０……信号処理部、２
１……ノズル基盤、２２……冷却水導出入口、２
３……流量調節弁、２４……流量制御部。
第２図は高周波誘導結合プラズマ質量分析計の全
体的な構成説明図、第３図は従来例の要部構成説
明図である。 １……プラズマトーチ、３……アルゴンガス供
給源、７……高周波誘導結合プラズマ、８……ノ
ズル、９……スキマー、１６……マスフイルタ、
１９……光電子増倍管、２０……信号処理部、２
１……ノズル基盤、２２……冷却水導出入口、２
３……流量調節弁、２４……流量制御部。
Claims (1)
- 高周波誘導結合プラズマを用いて試料を励起さ
せ生じたイオンをノズルとスキマーからなるイン
ターフエイスを介して質量分析計検出器に導いて
検出することにより前記試料中の被測定元素を分
析する分析計において、前記ノズルを冷却するた
めノズル基盤に冷却水を供給する冷却水導入流路
の途中に流量調節弁を設け、該調節弁を前記試料
に応じて調節することによつて前記ノズルを一定
温度に保つことを特徴とする高周波誘導結合プラ
ズマ質量分析計。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12730289U JPH0366147U (ja) | 1989-10-31 | 1989-10-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12730289U JPH0366147U (ja) | 1989-10-31 | 1989-10-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0366147U true JPH0366147U (ja) | 1991-06-27 |
Family
ID=31675062
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12730289U Pending JPH0366147U (ja) | 1989-10-31 | 1989-10-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0366147U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101988755B1 (ko) * | 2017-12-19 | 2019-06-12 | 주식회사 포스코 | 벨트식 반응로 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63254639A (ja) * | 1987-04-11 | 1988-10-21 | Nissin Electric Co Ltd | イオン源 |
-
1989
- 1989-10-31 JP JP12730289U patent/JPH0366147U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63254639A (ja) * | 1987-04-11 | 1988-10-21 | Nissin Electric Co Ltd | イオン源 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101988755B1 (ko) * | 2017-12-19 | 2019-06-12 | 주식회사 포스코 | 벨트식 반응로 |
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