JPH0365909U - - Google Patents

Info

Publication number
JPH0365909U
JPH0365909U JP12730589U JP12730589U JPH0365909U JP H0365909 U JPH0365909 U JP H0365909U JP 12730589 U JP12730589 U JP 12730589U JP 12730589 U JP12730589 U JP 12730589U JP H0365909 U JPH0365909 U JP H0365909U
Authority
JP
Japan
Prior art keywords
photodiodes
light
measured
displacement measuring
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12730589U
Other languages
English (en)
Japanese (ja)
Other versions
JPH084564Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12730589U priority Critical patent/JPH084564Y2/ja
Publication of JPH0365909U publication Critical patent/JPH0365909U/ja
Application granted granted Critical
Publication of JPH084564Y2 publication Critical patent/JPH084564Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
JP12730589U 1989-10-31 1989-10-31 光学式変位測定器 Expired - Fee Related JPH084564Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12730589U JPH084564Y2 (ja) 1989-10-31 1989-10-31 光学式変位測定器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12730589U JPH084564Y2 (ja) 1989-10-31 1989-10-31 光学式変位測定器

Publications (2)

Publication Number Publication Date
JPH0365909U true JPH0365909U (OSRAM) 1991-06-26
JPH084564Y2 JPH084564Y2 (ja) 1996-02-07

Family

ID=31675065

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12730589U Expired - Fee Related JPH084564Y2 (ja) 1989-10-31 1989-10-31 光学式変位測定器

Country Status (1)

Country Link
JP (1) JPH084564Y2 (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06194125A (ja) * 1992-10-05 1994-07-15 Carl Zeiss:Fa 対物レンズの焦点から物体のずれ又は位置変化を検出する方法及び装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06194125A (ja) * 1992-10-05 1994-07-15 Carl Zeiss:Fa 対物レンズの焦点から物体のずれ又は位置変化を検出する方法及び装置

Also Published As

Publication number Publication date
JPH084564Y2 (ja) 1996-02-07

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees