JPH0365907B2 - - Google Patents
Info
- Publication number
- JPH0365907B2 JPH0365907B2 JP60026938A JP2693885A JPH0365907B2 JP H0365907 B2 JPH0365907 B2 JP H0365907B2 JP 60026938 A JP60026938 A JP 60026938A JP 2693885 A JP2693885 A JP 2693885A JP H0365907 B2 JPH0365907 B2 JP H0365907B2
- Authority
- JP
- Japan
- Prior art keywords
- firing
- boat
- cdte
- solar cell
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010304 firing Methods 0.000 claims description 80
- 229910004613 CdTe Inorganic materials 0.000 claims description 32
- 238000000034 method Methods 0.000 claims description 25
- 125000006850 spacer group Chemical group 0.000 claims description 11
- 238000004519 manufacturing process Methods 0.000 claims description 10
- 239000000758 substrate Substances 0.000 claims description 10
- 230000004907 flux Effects 0.000 claims description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 2
- 229910052799 carbon Inorganic materials 0.000 claims description 2
- 239000011521 glass Substances 0.000 claims description 2
- 239000000843 powder Substances 0.000 claims description 2
- 229910052709 silver Inorganic materials 0.000 claims description 2
- 239000004332 silver Substances 0.000 claims description 2
- -1 Ag-In Chemical compound 0.000 claims 1
- 229910052980 cadmium sulfide Inorganic materials 0.000 claims 1
- 238000010030 laminating Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- YKYOUMDCQGMQQO-UHFFFAOYSA-L cadmium dichloride Chemical compound Cl[Cd]Cl YKYOUMDCQGMQQO-UHFFFAOYSA-L 0.000 description 26
- 239000007789 gas Substances 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 7
- 239000013078 crystal Substances 0.000 description 7
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 239000000155 melt Substances 0.000 description 4
- 239000011261 inert gas Substances 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/543—Solar cells from Group II-VI materials
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Photovoltaic Devices (AREA)
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、太陽電池などに使用可能なCdS／
CdTe構造の太陽電池素子の製造方法に関するも
のである。[Detailed Description of the Invention] Industrial Application Field The present invention provides CdS/
The present invention relates to a method for manufacturing a solar cell element having a CdTe structure.
従来の技術
従来CdS／CdTe構造の太陽電池素子の製造方
法は、例えば特開昭59−115569号公報の第２図に
示されているような方法になつていた。すなわ
ち、その図において、ベルトコンベア式連続焼成
炉１のベルトコンベア２上にCdTeを塗布した太
陽電池基板を入れた半気密性焼成ボート３を１段
に並べて焼成するようになつている。BACKGROUND ART Conventionally, a method for manufacturing a solar cell element having a CdS/CdTe structure has been a method as shown in FIG. 2 of Japanese Patent Application Laid-Open No. 59-115569, for example. That is, in the figure, semi-hermetic firing boats 3 containing solar cell substrates coated with CdTe are arranged in a single stage on a belt conveyor 2 of a belt conveyor-type continuous firing furnace 1 for firing.
発明が解決しようとする問題点
すでに知られているように、CdS／CdTe構造
の太陽電池素子の製造方法として、ガラス基板上
にｎ形CdS焼結膜を形成し、その上に（Cd＋Te）
粉と、融剤として作用する塩化カドミウムと粘結
剤を加えて混合し、泥状にしたものをスクリーン
印刷し、これを有孔蓋付きアルミナボート（半気
密性焼成ボート）に入れベルトコンベア式連続焼
成炉で温度620℃近傍の不活性ガスを含む雰囲気
中で焼成することによつてCdTe焼結膜を形成す
るものである。Problems to be Solved by the Invention As is already known, as a method for manufacturing solar cell elements with a CdS/CdTe structure, an n-type CdS sintered film is formed on a glass substrate, and (Cd+Te)
The powder is mixed with cadmium chloride, which acts as a flux, and a binder, and the resulting slurry is screen printed and placed in an alumina boat (semi-airtight firing boat) with a perforated lid and conveyor belt-type. A CdTe sintered film is formed by firing in an atmosphere containing inert gas at a temperature of around 620°C in a continuous firing furnace.
上記方法において、融剤として添加した塩化カ
ドミウムは、焼成中温度上昇と共に融解し、徐々
に蒸発しながらCdTeの結晶成長作用を行い、焼
成が終了した時点ではほとんど塩化カドミウムは
存在しなくなることが望ましい。 In the above method, it is desirable that the cadmium chloride added as a flux melts as the temperature rises during firing and gradually evaporates to grow CdTe crystals, so that by the time firing is complete, almost no cadmium chloride exists. .
以上のように、塩化カドミウムが融解し、
CdTeの結晶成長作用をさせながら焼成終了した
時点でほとんど塩化カドミウムは存在しない焼成
方法として、従来は焼成中の時間を長くして上述
の条件を満たすようにしていた。例えば、焼成炉
のベルトコンベアのスピードを１分間30mm（30
mm／min）で焼成をする。この方法では、塩化カ
ドミウムが融解、CdTeの結晶成長にも十分時間
的余裕があり、再現性のよい素子が得られている
が、焼成ベルトコンベアの長さは、焼成温度分布
を考慮して、4550mmある。そこで、１分間30mmの
焼成ベルトスピードでは約150分かかり、量産性
の向上が必要である。かかる問題に対して、ベル
トスピードを早くして焼成を試みたが、目的の特
性値が得られず、１分間30mmの焼成ベルトスピー
ドが限度であつた。 As mentioned above, cadmium chloride melts,
Conventionally, as a firing method in which almost no cadmium chloride is present at the end of firing while allowing CdTe crystal growth to occur, the firing time has been lengthened to satisfy the above-mentioned conditions. For example, the speed of the belt conveyor in the kiln can be set to 30 mm (30 mm) per minute.
mm/min). With this method, there is sufficient time for melting cadmium chloride and crystal growth of CdTe, and devices with good reproducibility have been obtained. However, the length of the firing belt conveyor is determined by taking into account the firing temperature distribution. It is 4550mm. Therefore, at a firing belt speed of 30 mm per minute, it takes about 150 minutes, so it is necessary to improve mass productivity. To solve this problem, firing was attempted by increasing the belt speed, but the desired characteristic values could not be obtained, and the firing belt speed of 30 mm per minute was the limit.
そこで、本発明は太陽電池に悪影響を与えず量
産性にすぐれ、再現性のあるCdTe膜焼成方法を
提供するものである。 Therefore, the present invention provides a CdTe film firing method that does not adversely affect solar cells, has excellent mass productivity, and is reproducible.
問題点を解決するための手段
そして上記問題点を解決する本発明の技術的な
手段は、上記CdTeを塗布した太陽電池基板を入
れた半気密性焼成ボートを積重ねて焼成するに際
し、上下の焼成ボートの間に少なくとも２mmの〓
間を空けるものである。Means for Solving the Problems The technical means of the present invention for solving the above problems is that when the semi-hermetic firing boats containing the solar cell substrates coated with CdTe are stacked and fired, the upper and lower firing At least 2mm between the boats
It is something that leaves a gap.
作 用 この技術的手段による作用は次のようになる。Effect The effect of this technical means is as follows.
すなわち、CdTeを塗布した太陽電池基板を入
れた半気密性焼成ボートを積重ねて焼成する時、
上下ボートの間に２mm以上のすきまを空けて焼成
する。それによつて下段側の焼成ボート内の基板
からも発生する融剤の塩化カドミウムが、スムー
ズに蒸発できるものである。この作用により、上
段側のCdTe焼成膜と全く変わらない特性が得ら
れ、量産性が１段とよくなるものである。 In other words, when semi-hermetic firing boats containing solar cell substrates coated with CdTe are stacked and fired,
Fire with a gap of 2mm or more between the top and bottom boats. As a result, cadmium chloride, which is a flux generated from the substrates in the lower firing boat, can be smoothly evaporated. Due to this effect, characteristics that are completely the same as those of the fired CdTe film on the upper stage side can be obtained, and mass productivity is further improved.
実施例
以下、本発明の一実施例を比較例とともに添付
図面にもとづいて説明する。Example Hereinafter, an example of the present invention will be described along with a comparative example based on the attached drawings.
比較例 １
第５図は、本発明に用いるベルトコンベア式連
続焼成炉で焼成ボートを１段積にした時の図であ
る。同図において、本体は部分的にカバー１で包
囲されており、ヒータ４によつて中央部が約620
℃となるように設定されている。N2ガスはガス
流出孔のあるガス管５により流量され、炉内の上
部には、数箇所に吸い込み孔のあるガス排気用管
６が取り付けられている。焼成ボート３には、
CdS膜上にCdTeを塗布した基板を入れ、第６図
に示すように無数に穴７をあけたアルミナの蓋８
を乗せて半気密性にして、ベルト２上に１段に並
べて焼成をする。Comparative Example 1 FIG. 5 is a diagram when the firing boats are stacked in one layer in the belt conveyor type continuous firing furnace used in the present invention. In the same figure, the main body is partially surrounded by a cover 1, and the center part is approximately 620 mm wide by the heater 4.
It is set to ℃. The N 2 gas is flowed through a gas pipe 5 having gas outlet holes, and a gas exhaust pipe 6 having suction holes at several locations is attached to the upper part of the furnace. In the firing boat 3,
A substrate coated with CdTe is placed on the CdS film, and an alumina lid 8 is made with numerous holes 7 as shown in Figure 6.
are placed on the belt to make it semi-airtight, and fired by arranging them in one layer on the belt 2.
焼成の条件として、焼成温度、焼成炉ベルトス
ピード及び不活性ガスの強制排気量、N2ガス流
量等を設定する。焼成温度は620℃、焼成ベルト
スピード30cm／min、不活性ガスの強性排気量５
／min、N2ガス流量合計44／min、以上の条
件で焼成を行つた。その後すでに知られているよ
うに、CdTe膜上にカーボン膜、さらにその上に
銀膜、CdS膜上にはAg−In膜を形成させそれぞ
れ規定の焼成熱処理をすることにより、第４図に
示すような特性が得られた。 As the firing conditions, the firing temperature, firing furnace belt speed, forced exhaust amount of inert gas, N2 gas flow rate, etc. are set. Firing temperature: 620℃, firing belt speed: 30cm/min, strong inert gas exhaust volume: 5
Firing was performed under the above conditions, with a total N 2 gas flow rate of 44/min. Thereafter, as is already known, a carbon film was formed on the CdTe film, a silver film was further formed on the CdTe film, and an Ag-In film was formed on the CdS film, and the respective prescribed firing heat treatments were performed, as shown in Fig. 4. Such characteristics were obtained.
比較例 ２
比較例１と異なる点は、前記方法において
CdTe焼成ボートを２段に積重ねて焼成する方法
である。前記に述べたように、融剤として添加し
た塩化カドミウムは、焼成中温度上昇とともに融
解し、前記アルミナ製ボートの蓋の無数の穴（半
気密性）から徐々に蒸発しながらCdTeの結晶成
長を行うものである。その意味から２段以上積重
ねて焼成する場合上下の焼成ボートを密着させて
焼成すると、下段の焼成ボートの蓋の無数の穴が
ふさがつて、CdTeの結晶成長が進みにくく、又
基板全体が黒くなつて、太陽光の入射が妨げられ
特性が悪くなる。Comparative Example 2 The difference from Comparative Example 1 is that in the above method
This is a method in which CdTe firing boats are stacked in two layers and fired. As mentioned above, the cadmium chloride added as a flux melts as the temperature rises during firing, and gradually evaporates from the numerous holes (semi-airtight) in the lid of the alumina boat, promoting the crystal growth of CdTe. It is something to do. For this reason, if two or more layers are stacked and fired, if the upper and lower firing boats are placed in close contact with each other, the numerous holes in the lid of the lower firing boat will be blocked, making it difficult for CdTe crystal growth to proceed, and the entire substrate will turn black. This prevents sunlight from entering and deteriorates the characteristics.
そこで本発明では、第２図に示すように、前記
アルミナ製ボートの蓋に高さ１mmの突起９をつけ
て、上段ボートと、下段ボートの間に１mmのスペ
ーサを施し、第１図のようにベルト上にボート１
０，１０′を２段積にして比較例１と同じ条件で
焼成をした。すなわち、上下のボートの１mmのス
ペーサを施すことにより、下段の基板の前記塩化
カドミウムが融解し、CdTeの結晶成長作用が容
易になる。しかしこの方法によつてできた素子の
特性は第４図に示すように、下段の焼成素子の特
性は上段焼成素子より約10〜15％悪くなつた。こ
れは、１mmのスペーサでは、下段の基板の塩化カ
ドミウムの蒸発が不十分で、塩化カドミウムが
Cdte膜中に存在しているものである。 Therefore, in the present invention, as shown in FIG. 2, a protrusion 9 with a height of 1 mm is attached to the lid of the alumina boat, and a 1 mm spacer is provided between the upper boat and the lower boat, as shown in FIG. 1. belt on boat 1
0 and 10' were stacked in two stages and fired under the same conditions as Comparative Example 1. That is, by providing 1 mm spacers on the upper and lower boats, the cadmium chloride on the lower substrate is melted and the crystal growth of CdTe is facilitated. However, as shown in FIG. 4, the characteristics of the elements produced by this method were about 10 to 15% worse than those of the upper fired elements. This is because the 1mm spacer does not evaporate the cadmium chloride on the lower substrate enough, and the cadmium chloride
This is present in the Cdte film.
実施例 １
比較例２と異なる点は、前記アルミナボートの
蓋の突起の高さを２mmにした。各条件は比較例
１、２と同じ方法で焼成をした。上下焼成ポート
のスペーサを２mmにすることにより、融剤として
添加した塩化カドミウムは、焼成中温度上昇と共
に融解し、何の障害もなく、徐々に蒸発ができ、
ほとんど塩化カドミウムの存在もなく、CdTeの
結晶成長作用され、第４図に示すように、上下焼
成のボートによる特性の差はなく、そして、従来
の１段焼成方式と全く変わらない特性を得ること
ができた。又第３図に示すように、焼成ボート底
側にスペーサ用の突起のあるもの１１及び上下の
焼成ボートの間にスペーサ物を部分的に置いて焼
成する方法では、そのいずれも２mm以上のすき間
を空けることにより従来の１段焼成方式と全く変
わらない特性が得られた。Example 1 The difference from Comparative Example 2 was that the height of the protrusion on the lid of the alumina boat was 2 mm. Firing was performed under the same conditions as in Comparative Examples 1 and 2. By setting the spacers of the upper and lower firing ports to 2 mm, the cadmium chloride added as a flux melts as the temperature rises during firing, allowing gradual evaporation without any hindrance.
There is almost no cadmium chloride, and CdTe crystal growth is effected. As shown in Figure 4, there is no difference in properties between the upper and lower firing boats, and the properties are completely the same as those of the conventional one-stage firing method. was completed. Furthermore, as shown in Fig. 3, in the case of a firing boat with a protrusion for a spacer on the bottom side 11 and a method of firing with a spacer partially placed between the upper and lower firing boats, there is a gap of 2 mm or more. By leaving a space between 1 and 2, it was possible to obtain properties that are completely the same as those of the conventional one-stage firing method.
発明の効果
以上詳述したように、本発明によるCdTe2段
焼成方式、すなわちアルミナ製焼成ボートの蓋及
び焼成ボートの底側に２mmの突起をつけて、上下
の焼成ボートにスペースを施すことによつて、従
来の１段焼成と全く同条件で、同じ特性が得られ
る。そして工数は、従来より大幅によくなり、量
産性向上に大いに貢献できるものである。Effects of the Invention As detailed above, the CdTe two-stage firing method according to the present invention, that is, by providing a 2 mm protrusion on the lid of the alumina firing boat and the bottom side of the firing boat to create a space between the upper and lower firing boats. Therefore, the same characteristics can be obtained under exactly the same conditions as conventional one-stage firing. Moreover, the number of man-hours is significantly improved compared to the conventional method, and it can greatly contribute to improving mass productivity.
今回の実験で使用した焼成炉の大きさは、２段
焼成が限度であるが、大型焼成炉を使用すること
により、さらに積重ねてCdTe膜の焼成ができる
ものである。なお、CdSの焼成に同様の製造方法
を適用した場合、CdS膜が黒く着色したり、CdS
膜の高抵抗化が生じるのに対し、CdTeの場合
は、そのような否定的な現象が生じない、本発明
の製造方法の効果は、著しく大きいものである。 The size of the firing furnace used in this experiment is limited to two-stage firing, but by using a large firing furnace, it is possible to fire CdTe films in further stacks. Note that if a similar manufacturing method is applied to CdS firing, the CdS film may be colored black or the CdS
Whereas the resistance of the film increases, in the case of CdTe, such a negative phenomenon does not occur, and the effect of the manufacturing method of the present invention is extremely large.
第１図は本発明のCdTe膜２段焼成方法の焼成
ボートとベルトコンベア式連続焼成炉の断面図、
第２図は本発明のスペース用の突起のついた焼成
ボートの蓋を示す斜視図、第３図は本発明の焼成
ボート底側にスペーサ用の突起のついた焼成ボー
トを示す斜視図、第４図はCdTe膜焼成の１段焼
成と、本発明の２段焼成との太陽電池特性比較
図、第５図は従来のCdTe膜１段焼成方法の焼成
ボートと、ベルトコンベア式連続焼成炉の断面
図、第６図は従来のCdTe1段焼成ボートの蓋を
示す斜視図である。
１……焼成炉カバー、２……焼成炉ベルト、３
……１段焼成方式の焼成ボート、４……ヒータ、
５……N2ガス管、６……ガス排気用管、７……
従来の焼成ボート蓋の半気密性の穴、８……従来
の焼成ボートの蓋、９……本発明のCdTe膜焼成
２段方式の焼成ボートの蓋、１０……本発明の
CdTe膜焼成２段方式の上段焼成ボート、１０′
……本発明のCdTe膜焼成２段方式の下段焼成ボ
ート。
Figure 1 is a cross-sectional view of the firing boat and belt conveyor type continuous firing furnace of the two-stage CdTe film firing method of the present invention;
FIG. 2 is a perspective view showing a lid of a baking boat with a spacer projection according to the present invention, FIG. 3 is a perspective view showing a baking boat with a spacer projection on the bottom side of the baking boat according to the invention Figure 4 is a comparison of solar cell characteristics between the one-stage CdTe film firing method and the two-stage firing method of the present invention. Figure 5 is a comparison of the firing boat for the conventional one-stage CdTe film firing method and the belt conveyor type continuous firing furnace. The sectional view and FIG. 6 are perspective views showing the lid of a conventional CdTe single-stage firing boat. 1... Firing furnace cover, 2... Firing furnace belt, 3
... one-stage firing boat, 4... heater,
5... N2 gas pipe, 6...Gas exhaust pipe, 7...
Semi-airtight hole in conventional firing boat lid, 8...Conventional firing boat lid, 9...CdTe film firing two-stage firing boat lid of the present invention, 10...The present invention.
CdTe film firing two-stage upper stage firing boat, 10'
...Lower firing boat of the two-stage CdTe film firing method of the present invention.
Claims (1)
ン、Ag−In及び銀の焼結膜を積層して太陽電池
素子を製造するに際し、前記CdS焼結膜上に前記
CdTeの粉末および融剤を含むペーストを塗布
し、これを半気密性焼成ボートに入れて、ベルト
コンベア式連続焼成炉を用いて焼成する方法であ
つて、前記半気密性焼成ボートを積み重ねて焼成
するに際し、上下の焼成ボートの間に少なくとも
２mmのすきまを空けることを特徴とする太陽電池
の製造方法。 ２ 焼成ボートの蓋にスペーサ用の突起があるこ
とを特徴とする特許請求の範囲第１項記載の太陽
電池の製造方法。 ３ 焼成ボートのケースの底側にスペーサ用の突
起があることを特徴とする特許請求の範囲第１項
記載の太陽電池の製造方法。 ４ 焼成ボート上下の間にスペーサ用物を部分的
に置いてすき間を空けることを特徴とする特許請
求の範囲第１項記載の太陽電池の製造方法。[Claims] 1. When manufacturing a solar cell element by laminating sintered films of CdS, CdTe, carbon, Ag-In, and silver on a transparent glass substrate,
A method in which a paste containing CdTe powder and a flux is applied, placed in a semi-airtight firing boat, and fired using a belt conveyor type continuous firing furnace, in which the semi-hermetic firing boats are stacked and fired. A method for manufacturing a solar cell, characterized in that a gap of at least 2 mm is left between the upper and lower firing boats. 2. The method for manufacturing a solar cell according to claim 1, wherein the lid of the firing boat has a projection for a spacer. 3. The method for manufacturing a solar cell according to claim 1, characterized in that there is a protrusion for a spacer on the bottom side of the case of the firing boat. 4. The method for manufacturing a solar cell according to claim 1, wherein a spacer material is partially placed between the upper and lower sides of the firing boat to create a gap.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60026938A JPS61187281A (en) | 1985-02-14 | 1985-02-14 | Manufacture of solar cell |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60026938A JPS61187281A (en) | 1985-02-14 | 1985-02-14 | Manufacture of solar cell |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61187281A JPS61187281A (en) | 1986-08-20 |
| JPH0365907B2 true JPH0365907B2 (en) | 1991-10-15 |
Family
ID=12207088
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60026938A Granted JPS61187281A (en) | 1985-02-14 | 1985-02-14 | Manufacture of solar cell |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61187281A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63144584A (en) * | 1986-12-09 | 1988-06-16 | Matsushita Electric Ind Co Ltd | Baking method of carbon film of solar cell |
| JPS6457764A (en) * | 1987-08-28 | 1989-03-06 | Matsushita Electric Ind Co Ltd | Manufacture of photovoltaic element |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5144376A (en) * | 1974-10-15 | 1976-04-15 | Chiyoda Chem Eng Construct Co | Rokashujinki narabini rokatogyakusensochi |
| JPS59115577A (en) * | 1982-12-22 | 1984-07-04 | Agency Of Ind Science & Technol | Manufacture of cadmium sulfide sintered film |
| JPS59115570A (en) * | 1982-12-22 | 1984-07-04 | Agency Of Ind Science & Technol | Manufacture of photovoltaic element |
| JPS59115569A (en) * | 1982-12-22 | 1984-07-04 | Agency Of Ind Science & Technol | Manufacture of photovoltaic element |
-
1985
- 1985-02-14 JP JP60026938A patent/JPS61187281A/en active Granted
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5144376A (en) * | 1974-10-15 | 1976-04-15 | Chiyoda Chem Eng Construct Co | Rokashujinki narabini rokatogyakusensochi |
| JPS59115577A (en) * | 1982-12-22 | 1984-07-04 | Agency Of Ind Science & Technol | Manufacture of cadmium sulfide sintered film |
| JPS59115570A (en) * | 1982-12-22 | 1984-07-04 | Agency Of Ind Science & Technol | Manufacture of photovoltaic element |
| JPS59115569A (en) * | 1982-12-22 | 1984-07-04 | Agency Of Ind Science & Technol | Manufacture of photovoltaic element |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61187281A (en) | 1986-08-20 |
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