JPH0363834U - - Google Patents

Info

Publication number
JPH0363834U
JPH0363834U JP12413389U JP12413389U JPH0363834U JP H0363834 U JPH0363834 U JP H0363834U JP 12413389 U JP12413389 U JP 12413389U JP 12413389 U JP12413389 U JP 12413389U JP H0363834 U JPH0363834 U JP H0363834U
Authority
JP
Japan
Prior art keywords
pressure
pressure sensor
diaphragm
casing
receiving part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12413389U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12413389U priority Critical patent/JPH0363834U/ja
Publication of JPH0363834U publication Critical patent/JPH0363834U/ja
Pending legal-status Critical Current

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  • Measuring Fluid Pressure (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本考案による圧力センサの実施例を示
す図、第2図は第1図の要部断面図、第3図は従
来の技術による圧力センサの実施例を示す図、第
4図は第3図の要部断面図である。 1,11……ケーシング、2a,12a……受
圧部、2b……外周部、2,12……ダイアフラ
ム、3,13……固定リング、4,14……固定
ナツト、5a,15a……歪みゲージ、5b,1
5b……リード線、5c,15c……回路板、5
,15……検知部材、6,16……端子、7……
スリツト溝、8……段差面、9,17……Oリン
グ。
FIG. 1 is a diagram showing an embodiment of a pressure sensor according to the present invention, FIG. 2 is a cross-sectional view of the main part of FIG. 1, FIG. 3 is a diagram showing an embodiment of a pressure sensor according to the conventional technology, and FIG. FIG. 4 is a sectional view of the main part of FIG. 3; 1, 11...Casing, 2a, 12a...Pressure receiving part, 2b...Outer periphery, 2, 12...Diaphragm, 3, 13...Fixing ring, 4, 14...Fixing nut, 5a, 15a...Distortion Gauge, 5b, 1
5b...Lead wire, 5c, 15c...Circuit board, 5
, 15... detection member, 6, 16... terminal, 7...
Slit groove, 8... step surface, 9, 17... O-ring.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 流体の圧力を測定する圧力センサであつて、該
圧力センサは、圧力検知部位に取り付けられるケ
ーシング1と、該ケーシング1内に設けられ、外
周部2bが固定されるとともに、また中央部に圧
力の作用時に変位する受圧部2aが設けられたダ
イアフラム2と、該ダイアフラム2の受圧部2a
の変位に応じた出力をする検知部材5とを具え、
前記ダイアフラム2に、前記受圧部2aを囲んだ
状態で、環状をなすスリツト溝7を形成したこと
を特徴とする圧力センサ。
This pressure sensor measures the pressure of a fluid, and the pressure sensor includes a casing 1 attached to a pressure detection part, a casing 1 provided inside the casing 1, an outer peripheral part 2b fixed, and a pressure sensor in the central part. A diaphragm 2 provided with a pressure receiving part 2a that is displaced during operation, and a pressure receiving part 2a of the diaphragm 2.
and a detection member 5 that outputs an output according to the displacement of
A pressure sensor characterized in that an annular slit groove 7 is formed in the diaphragm 2 to surround the pressure receiving part 2a.
JP12413389U 1989-10-24 1989-10-24 Pending JPH0363834U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12413389U JPH0363834U (en) 1989-10-24 1989-10-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12413389U JPH0363834U (en) 1989-10-24 1989-10-24

Publications (1)

Publication Number Publication Date
JPH0363834U true JPH0363834U (en) 1991-06-21

Family

ID=31672073

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12413389U Pending JPH0363834U (en) 1989-10-24 1989-10-24

Country Status (1)

Country Link
JP (1) JPH0363834U (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001011329A1 (en) * 1999-08-05 2001-02-15 Fujikin Incorporated Pressure detector mounting structure
JP2004045424A (en) * 2003-09-22 2004-02-12 Tadahiro Omi Mounting structure of pressure detector
JP2009020290A (en) * 2007-07-11 2009-01-29 Fujikura Ltd Optical module, method for manufacturing gripping part of optical module, optical path-changing method, and metallic pipe for optical module

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5839069A (en) * 1981-08-31 1983-03-07 Shimadzu Corp Semiconductor diaphragm
JPS6165126A (en) * 1984-09-06 1986-04-03 Copal Denshi Kk Pressure sensor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5839069A (en) * 1981-08-31 1983-03-07 Shimadzu Corp Semiconductor diaphragm
JPS6165126A (en) * 1984-09-06 1986-04-03 Copal Denshi Kk Pressure sensor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001011329A1 (en) * 1999-08-05 2001-02-15 Fujikin Incorporated Pressure detector mounting structure
JP2004045424A (en) * 2003-09-22 2004-02-12 Tadahiro Omi Mounting structure of pressure detector
JP2009020290A (en) * 2007-07-11 2009-01-29 Fujikura Ltd Optical module, method for manufacturing gripping part of optical module, optical path-changing method, and metallic pipe for optical module

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