JPS6161442U - - Google Patents
Info
- Publication number
- JPS6161442U JPS6161442U JP14576284U JP14576284U JPS6161442U JP S6161442 U JPS6161442 U JP S6161442U JP 14576284 U JP14576284 U JP 14576284U JP 14576284 U JP14576284 U JP 14576284U JP S6161442 U JPS6161442 U JP S6161442U
- Authority
- JP
- Japan
- Prior art keywords
- pressure sensor
- stem
- semiconductor
- semiconductor pressure
- outer periphery
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Description
第１図は本考案の半導体圧力センサーの概略縦
断面図、第２図は本考案の半導体圧力センサーの
他の実施例を示す概略縦断面図、第３図は本考案
の半導体圧力センサーの実施態様の一例を示す説
明図、第４図は本考案の半導体圧力センサーの実
施態様の他の一例を示す説明図、第５図は従来の
半導体圧力センサーの概略縦断面図である。
１…半導体ダイヤフラムチツプ、２…ステム、
３…リード端子、７…金属ステム、７ａ…鍔部、
８…台座、９…継手、１０…カバー、１１…電子
回路、１３…継手。
FIG. 1 is a schematic vertical cross-sectional view of the semiconductor pressure sensor of the present invention, FIG. 2 is a schematic vertical cross-sectional view showing another embodiment of the semiconductor pressure sensor of the present invention, and FIG. 3 is an implementation of the semiconductor pressure sensor of the present invention. FIG. 4 is an explanatory diagram showing another example of the embodiment of the semiconductor pressure sensor of the present invention, and FIG. 5 is a schematic vertical sectional view of a conventional semiconductor pressure sensor. 1... Semiconductor diaphragm chip, 2... Stem,
3... Lead terminal, 7... Metal stem, 7a... Flange part,
8...Pedestal, 9...Joint, 10...Cover, 11...Electronic circuit, 13...Joint.
Claims (1)
成してなる半導体圧力センサーチツプを耐電圧材
料からなるステムに取付けてなる圧力センサーに
おいて、該ステムの外周に鍔部を環設した両端開
放の筒体からなる金属ステムを固着したことを特
徴とする半導体圧力センサー。 A pressure sensor in which a semiconductor pressure sensor chip formed by forming a piezoresistive layer on the surface of a semiconductor diaphragm is attached to a stem made of a voltage-resistant material, which consists of a cylindrical body with both ends open and a flange provided around the outer periphery of the stem. A semiconductor pressure sensor characterized by a fixed metal stem.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14576284U JPH0345161Y2 (en) | 1984-09-28 | 1984-09-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14576284U JPH0345161Y2 (en) | 1984-09-28 | 1984-09-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6161442U true JPS6161442U (en) | 1986-04-25 |
| JPH0345161Y2 JPH0345161Y2 (en) | 1991-09-24 |
Family
ID=30704018
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14576284U Expired JPH0345161Y2 (en) | 1984-09-28 | 1984-09-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0345161Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005049240A (en) * | 2003-07-29 | 2005-02-24 | Nec Schott Components Corp | Pressure sensor |
-
1984
- 1984-09-28 JP JP14576284U patent/JPH0345161Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005049240A (en) * | 2003-07-29 | 2005-02-24 | Nec Schott Components Corp | Pressure sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0345161Y2 (en) | 1991-09-24 |
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